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SUBSTRATE PROCESSING APPARATUS
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Publication date May 2, 2024
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EBARA CORPORATION
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MATSUTARO MIYAMOTO
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B24 - GRINDING POLISHING
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SUBSTRATE HOLDER
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Publication number 20230268209
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Publication date Aug 24, 2023
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EBARA CORPORATION
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Matsutaro MIYAMOTO
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SUBSTRATE HOLDER
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Publication number 20210180204
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Publication date Jun 17, 2021
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EBARA CORPORATION
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Matsutaro Miyamoto
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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SUBSTRATE HOLDER
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Publication number 20210180205
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Publication date Jun 17, 2021
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EBARA CORPORATION
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Matsutaro Miyamoto
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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SEAL USED FOR SUBSTRATE HOLDER
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Publication number 20200190686
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Publication date Jun 18, 2020
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EBARA CORPORATION
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Matsutaro Miyamoto
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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SUBSTRATE HOLDER
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Publication number 20200006090
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Publication date Jan 2, 2020
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EBARA CORPORATION
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Matsutaro MIYAMOTO
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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ELECTRON BEAM APPARATUS
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Publication number 20090218506
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Publication date Sep 3, 2009
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EBARA CORPORATION
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Mamoru Nakasuji
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H01 - BASIC ELECTRIC ELEMENTS
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ROTARY APPARATUS
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Publication number 20090108703
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Publication date Apr 30, 2009
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EBARA CORPORATION
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Hiroyuki KAWASAKI
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Turbo-molecular pump
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Publication number 20030017047
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Publication date Jan 23, 2003
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EBARA CORPORATION
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Atsushi Shiokawa
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Vacuum pump
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Publication date Apr 4, 2002
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EBARA CORPORATION
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Matsutaro Miyamoto
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Magnetic levitation rotating machine
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Publication number 20020036435
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Publication date Mar 28, 2002
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Atsushi Ooyama
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Turbo-molecular pump
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Publication number 20020028132
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Publication date Mar 7, 2002
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EBARA CORPORATION
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TETSUMA IKEGAMI
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Substrate processing apparatus
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Publication number 20020005167
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Publication date Jan 17, 2002
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EBARA CORPORATION
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Matsutaro Miyamoto
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