Mehrdad Nikoonahad

Person

Menlo Park, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for determining a critical dimension and overla...
- Patent number 8,502,979
- Issue date Aug 6, 2013
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a critical dimension and overla...
- Patent number 8,179,530
- Issue date May 15, 2012
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
Parametric profiling using optical spectroscopic systems
- Patent number 7,826,071
- Issue date Nov 2, 2010
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
System for scatterometric measurements and applications
- Patent number 7,821,654
- Issue date Oct 26, 2010
- KLA-Tencor Corporation
- Anatoly Fabrikant
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a critical dimension and overla...
- Patent number 7,751,046
- Issue date Jul 6, 2010
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
Overlay error measurement using fourier optics
- Patent number 7,656,529
- Issue date Feb 2, 2010
- Mehrdad Nikoonahad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for scatterometric measurements and applications
- Patent number 7,511,830
- Issue date Mar 31, 2009
- KLA-Tencor Technologies Corporation
- Anatloy Fabrikant
- G01 - MEASURING TESTING
Information Patent Grant
Optical scanning system for surface inspection
- Patent number 7,477,372
- Issue date Jan 13, 2009
- KLA-Tencor Technologies Corporation
- Brian C. Leslie
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a presence of macro and micro d...
- Patent number 7,460,981
- Issue date Dec 2, 2008
- KLA-Tencor Technologies Corp.
- Gary Bultman
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring periodic structures
- Patent number 7,433,037
- Issue date Oct 7, 2008
- KLA-Tencor Technologies Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Overlay error detection
- Patent number 7,375,810
- Issue date May 20, 2008
- KLA-Tencor Corporation
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Grant
Optical system for measuring samples using short wavelength radiation
- Patent number 7,369,233
- Issue date May 6, 2008
- KLA-Tencor Technologies Corporation
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a property of a specimen prior...
- Patent number 7,349,090
- Issue date Mar 25, 2008
- KLA-Tencor Technologies Corp.
- Dan Wack
- G01 - MEASURING TESTING
Information Patent Grant
Parametric profiling using optical spectroscopic systems to adjust...
- Patent number 7,312,881
- Issue date Dec 25, 2007
- KLA-Tencor Technologies Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
System for scatterometric measurements and applications
- Patent number 7,301,649
- Issue date Nov 27, 2007
- KLA-Tencor Technologies Corporation
- Anatoly Fabrikant
- G01 - MEASURING TESTING
Information Patent Grant
Time-resolved measurement technique using radiation pulses
- Patent number 7,295,325
- Issue date Nov 13, 2007
- KLA-Tencor Technologies Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Grant
Parametric profiling using optical spectroscopic systems
- Patent number 7,280,230
- Issue date Oct 9, 2007
- KLA-Tencor Technologies Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a thin film characteristic and...
- Patent number 7,196,782
- Issue date Mar 27, 2007
- KLA-Tencor Technologies Corp.
- John Fielden
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a composition and a thickness o...
- Patent number 7,139,083
- Issue date Nov 21, 2006
- KLA-Tencor Technologies Corp.
- John Fielden
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining an adhesion characteristic and...
- Patent number 7,130,029
- Issue date Oct 31, 2006
- KLA-Tencor Technologies Corp.
- Dan Wack
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a presence of defects and a thi...
- Patent number 7,106,425
- Issue date Sep 12, 2006
- KLA-Tencor Technologies Corp.
- Gary Bultman
- G01 - MEASURING TESTING
Information Patent Grant
System for scatterometric measurements and applications
- Patent number 7,099,005
- Issue date Aug 29, 2006
- KLA-Tencor Technologies Corporation
- Anatoly Fabrikant
- G01 - MEASURING TESTING
Information Patent Grant
Scanning system for inspecting anomalies on surfaces
- Patent number 7,084,967
- Issue date Aug 1, 2006
- KLA-Tencor Corporation
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Grant
Optical scanning system for surface inspection
- Patent number 7,075,637
- Issue date Jul 11, 2006
- KLA-Tencor Corporation
- Brian C. Leslie
- G01 - MEASURING TESTING
Information Patent Grant
Parametric profiling using optical spectroscopic systems
- Patent number 7,023,549
- Issue date Apr 4, 2006
- KLA-Tencor Technologies Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Overlay error detection
- Patent number 7,009,704
- Issue date Mar 7, 2006
- KLA-Tencor Technologies Corporation
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining overlay and flatness of a specimen
- Patent number 7,006,235
- Issue date Feb 28, 2006
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a thickness of a structure on a...
- Patent number 6,950,196
- Issue date Sep 27, 2005
- KLA-Tencor Technologies Corp.
- John Fielden
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a characteristic of a layer for...
- Patent number 6,946,394
- Issue date Sep 20, 2005
- KLA Tencor Technologies
- John Fielden
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for simultaneous or sequential multi-perspectiv...
- Patent number 6,922,236
- Issue date Jul 26, 2005
- KLA-Tencor Technologies Corp.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Methods and Systems for Determining a Critical Dimension and Overla...
- Publication number 20130314710
- Publication date Nov 28, 2013
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...
- Publication number 20130039460
- Publication date Feb 14, 2013
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...
- Publication number 20100271621
- Publication date Oct 28, 2010
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
HIGH EFFICIENCY SOLAR PANEL AND SYSTEM
- Publication number 20100116325
- Publication date May 13, 2010
- Mehrdad Nikoonahad
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SYSTEM FOR SCATTEROMETRIC MEASUREMENTS AND APPLICATIONS
- Publication number 20090195779
- Publication date Aug 6, 2009
- Anatoly Fabrikant
- G02 - OPTICS
Information Patent Application
Parametric Profiling Using Optical Spectroscopic Systems
- Publication number 20090135416
- Publication date May 28, 2009
- KLA-Tencor Technologies Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
System for Scatterometric Measurements and Applications
- Publication number 20080084567
- Publication date Apr 10, 2008
- Anatoly Fabrikant
- G02 - OPTICS
Information Patent Application
Optical Scanning System For Surface Inspection
- Publication number 20070188744
- Publication date Aug 16, 2007
- KLA-Tencor Technologies Corporation
- Brian C. Leslie
- G01 - MEASURING TESTING
Information Patent Application
Multi-channel optical metrology
- Publication number 20070091325
- Publication date Apr 26, 2007
- Mehrdad Nikoonahad
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Application
System for Measuring Periodic Structures
- Publication number 20060290931
- Publication date Dec 28, 2006
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Optical Scanning System for Surface Inspection
- Publication number 20060203235
- Publication date Sep 14, 2006
- KLA-Tencor Technologies Corporation
- Brian C. Leslie
- G01 - MEASURING TESTING
Information Patent Application
Parametric profiling using optical spectroscopic systems to adjust...
- Publication number 20060132806
- Publication date Jun 22, 2006
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Overlay error detection
- Publication number 20060098199
- Publication date May 11, 2006
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for determining a presence of macro and micro d...
- Publication number 20060072807
- Publication date Apr 6, 2006
- KLA-Tencor Technologies.
- Gary Bultman
- G01 - MEASURING TESTING
Information Patent Application
System for scatterometric measurements and applications
- Publication number 20050274901
- Publication date Dec 15, 2005
- Anatoly Fabrikant
- G02 - OPTICS
Information Patent Application
Scanning system for inspecting anamolies on surfaces
- Publication number 20050110986
- Publication date May 26, 2005
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Application
System for measuring periodic structures
- Publication number 20050099627
- Publication date May 12, 2005
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Metrology system using optical phase
- Publication number 20050094153
- Publication date May 5, 2005
- Mehrdad Nikoonahad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning system for inspecting anamolies on surfaces
- Publication number 20050036137
- Publication date Feb 17, 2005
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Application
Parametric profiling using optical spectroscopic systems
- Publication number 20040257588
- Publication date Dec 23, 2004
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for determining a critical dimension and overla...
- Publication number 20040235205
- Publication date Nov 25, 2004
- KLA-Tencor, Inc.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
Time-resolved measurement technique using radiation pulses
- Publication number 20040207850
- Publication date Oct 21, 2004
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Application
Metrology system using optical phase
- Publication number 20040207849
- Publication date Oct 21, 2004
- KLA-Tencor Corporation
- Mehrdad Nikoonahad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical system for measuring samples using short wavelength radiation
- Publication number 20040150820
- Publication date Aug 5, 2004
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Application
System for measuring periodic structures
- Publication number 20040141177
- Publication date Jul 22, 2004
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for determining a presence of macro defects and...
- Publication number 20040115843
- Publication date Jun 17, 2004
- KLA-Tencor, Inc.
- Dan Wack
- G01 - MEASURING TESTING
Information Patent Application
System and method for characterizing three-dimensional structures
- Publication number 20040105099
- Publication date Jun 3, 2004
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for determining a presence of macro and micro d...
- Publication number 20040092045
- Publication date May 13, 2004
- Gary Bultman
- G01 - MEASURING TESTING
Information Patent Application
Parametric profiling using optical spectroscopic systems
- Publication number 20040070772
- Publication date Apr 15, 2004
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for determining a critical dimension and a thin...
- Publication number 20040073398
- Publication date Apr 15, 2004
- KLA-Tencor, Inc.
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING

Mehrdad Nikoonahad

Person

Patents Grantslast 30 patents

Methods and systems for determining a critical dimension and overla...

Methods and systems for determining a critical dimension and overla...

Parametric profiling using optical spectroscopic systems

System for scatterometric measurements and applications

Methods and systems for determining a critical dimension and overla...

Overlay error measurement using fourier optics

System for scatterometric measurements and applications

Optical scanning system for surface inspection

Methods and systems for determining a presence of macro and micro d...

System for measuring periodic structures

Overlay error detection

Optical system for measuring samples using short wavelength radiation

Methods and systems for determining a property of a specimen prior...

Parametric profiling using optical spectroscopic systems to adjust...

System for scatterometric measurements and applications

Time-resolved measurement technique using radiation pulses

Parametric profiling using optical spectroscopic systems

Methods and systems for determining a thin film characteristic and...

Methods and systems for determining a composition and a thickness o...

Methods and systems for determining an adhesion characteristic and...

Methods and systems for determining a presence of defects and a thi...

System for scatterometric measurements and applications

Scanning system for inspecting anomalies on surfaces

Optical scanning system for surface inspection

Parametric profiling using optical spectroscopic systems

Overlay error detection

Methods and systems for determining overlay and flatness of a specimen

Methods and systems for determining a thickness of a structure on a...

Methods and systems for determining a characteristic of a layer for...

Systems and methods for simultaneous or sequential multi-perspectiv...

Patents Applicationslast 30 patents

Methods and Systems for Determining a Critical Dimension and Overla...

METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...

METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...

HIGH EFFICIENCY SOLAR PANEL AND SYSTEM

SYSTEM FOR SCATTEROMETRIC MEASUREMENTS AND APPLICATIONS

Parametric Profiling Using Optical Spectroscopic Systems

System for Scatterometric Measurements and Applications

Optical Scanning System For Surface Inspection

Multi-channel optical metrology

System for Measuring Periodic Structures

Optical Scanning System for Surface Inspection

Parametric profiling using optical spectroscopic systems to adjust...

Overlay error detection

Methods and systems for determining a presence of macro and micro d...

System for scatterometric measurements and applications

Scanning system for inspecting anamolies on surfaces

System for measuring periodic structures

Metrology system using optical phase

Scanning system for inspecting anamolies on surfaces

Parametric profiling using optical spectroscopic systems

Methods and systems for determining a critical dimension and overla...

Time-resolved measurement technique using radiation pulses

Metrology system using optical phase

Optical system for measuring samples using short wavelength radiation

System for measuring periodic structures

Methods and systems for determining a presence of macro defects and...

System and method for characterizing three-dimensional structures

Methods and systems for determining a presence of macro and micro d...

Parametric profiling using optical spectroscopic systems

Methods and systems for determining a critical dimension and a thin...