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Michael D. Willwerth
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San Ramon, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Capacitive sensor housing for chamber condition monitoring
Patent number
12,163,911
Issue date
Dec 10, 2024
Applied Materials, Inc.
Yaoling Pan
G01 - MEASURING TESTING
Information
Patent Grant
Gas distribution plate with UV blocker
Patent number
12,130,561
Issue date
Oct 29, 2024
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fast gas exchange apparatus, system, and method
Patent number
12,068,135
Issue date
Aug 20, 2024
Applied Materials, Inc.
Ming Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sensors and system for in-situ edge ring erosion monitor
Patent number
12,009,236
Issue date
Jun 11, 2024
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film, in-situ measurement through transparent crystal and tran...
Patent number
12,009,191
Issue date
Jun 11, 2024
Applied Materials, Inc.
Patrick Tae
G01 - MEASURING TESTING
Information
Patent Grant
Spatial optical emission spectroscopy for etch uniformity
Patent number
11,668,602
Issue date
Jun 6, 2023
Applied Materials, Inc.
Blake Erickson
G01 - MEASURING TESTING
Information
Patent Grant
Capacitive sensor for chamber condition monitoring
Patent number
11,581,206
Issue date
Feb 14, 2023
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resonant process monitor
Patent number
11,551,905
Issue date
Jan 10, 2023
Intel Corporation
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitive sensing data integration for plasma chamber condition mo...
Patent number
11,545,346
Issue date
Jan 3, 2023
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas distribution plate with UV blocker at the center
Patent number
11,448,977
Issue date
Sep 20, 2022
Applied Materials, Inc.
Kartik Ramaswamy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Capacitive sensor housing for chamber condition monitoring
Patent number
11,415,538
Issue date
Aug 16, 2022
Applied Materials, Inc.
Yaoling Pan
G01 - MEASURING TESTING
Information
Patent Grant
Conductive wafer lift pin o-ring gripper with resistor
Patent number
11,387,135
Issue date
Jul 12, 2022
Applied Materials, Inc.
Roberto Cesar Cotlear
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber lid with integrated heater
Patent number
11,264,252
Issue date
Mar 1, 2022
Applied Materials, Inc.
Michael D. Willwerth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support pedestal
Patent number
D931240
Issue date
Sep 21, 2021
Applied Materials, Inc.
Changhun Lee
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Processing chamber with substrate edge enhancement processing
Patent number
11,094,511
Issue date
Aug 17, 2021
Applied Materials, Inc.
Changhun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with variable pixelated magnetic field
Patent number
10,790,180
Issue date
Sep 29, 2020
Applied Materials, Inc.
Chih-Hsun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas flow for condensation reduction with a substrate processing chuck
Patent number
10,770,329
Issue date
Sep 8, 2020
Applied Materials, Inc.
Hun Sang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for reducing particles in semiconductor proce...
Patent number
10,770,269
Issue date
Sep 8, 2020
Applied Materials, Inc.
Andrew Nguyen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Cooling element for an electrostatic chuck assembly
Patent number
10,490,435
Issue date
Nov 26, 2019
Applied Materials, Inc.
Michael D. Willwerth
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Electrostatic chuck with variable pixelated magnetic field
Patent number
10,460,968
Issue date
Oct 29, 2019
Applied Materials, Inc.
Chih-Hsun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced plasma source for a plasma reactor
Patent number
10,290,469
Issue date
May 14, 2019
Applied Materials, Inc.
Valentin N. Todorow
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate lift pin actuator
Patent number
10,283,397
Issue date
May 7, 2019
Applied Materials, Inc.
Michael D. Willwerth
B66 - HOISTING LIFTING HAULING
Information
Patent Grant
Substrate support assembly
Patent number
10,257,887
Issue date
Apr 9, 2019
Applied Materials, Inc.
Alexander Matyushkin
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Gas flow for condensation reduction with a substrate processing chuck
Patent number
10,186,444
Issue date
Jan 22, 2019
Applied Materials, Inc.
Hun Sang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shielded lid heater assembly
Patent number
10,083,816
Issue date
Sep 25, 2018
Applied Materials, Inc.
Michael D. Willwerth
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High temperature electrostatic chuck with real-time heat zone regul...
Patent number
9,948,214
Issue date
Apr 17, 2018
Applied Materials, Inc.
Dmitry Lubomirsky
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate support assembly having rapid temperature control
Patent number
9,883,549
Issue date
Jan 30, 2018
Applied Materials, Inc.
Alexander Matyushkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for reducing particles in semiconductor proce...
Patent number
9,761,416
Issue date
Sep 12, 2017
Applied Materials, Inc.
Andrew Nguyen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Apparatus for controlling the flow of a gas in a process chamber
Patent number
9,443,753
Issue date
Sep 13, 2016
Applied Materials, Inc.
David Palagashvili
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shielded lid heater assembly
Patent number
9,362,148
Issue date
Jun 7, 2016
Applied Materials, Inc.
Michael D. Willwerth
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
Publication number
20240321610
Publication date
Sep 26, 2024
Applied Materials, Inc.
Yaoling PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN FILM, IN-SITU MEASUREMENT THROUGH TRANSPARENT CRYSTAL AND TRAN...
Publication number
20240290592
Publication date
Aug 29, 2024
Applied Materials, Inc.
Patrick Tae
G01 - MEASURING TESTING
Information
Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
Publication number
20230343568
Publication date
Oct 26, 2023
Applied Materials, Inc.
Yaoling Pan
G01 - MEASURING TESTING
Information
Patent Application
SPATIAL OPTICAL EMISSION SPECTROSCOPY FOR ETCH UNIFORMITY
Publication number
20230258500
Publication date
Aug 17, 2023
Applied Materials, Inc.
Blake Erickson
G01 - MEASURING TESTING
Information
Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
Publication number
20230103165
Publication date
Mar 30, 2023
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS DISTRIBUTION PLATE WITH UV BLOCKER
Publication number
20230102933
Publication date
Mar 30, 2023
Kartik RAMASWAMY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CAPACITIVE SENSOR HOUSING FOR CHAMBER CONDITION MONITORING
Publication number
20220341867
Publication date
Oct 27, 2022
Applied Materials, Inc.
Yaoling Pan
G01 - MEASURING TESTING
Information
Patent Application
SPATIAL OPTICAL EMISSION SPECTROSCOPY FOR ETCH UNIFORMITY
Publication number
20220333989
Publication date
Oct 20, 2022
Applied Materials, Inc.
Blake Erickson
G01 - MEASURING TESTING
Information
Patent Application
FAST GAS EXCHANGE APPARATUS, SYSTEM, AND METHOD
Publication number
20220262600
Publication date
Aug 18, 2022
Applied Materials, Inc.
Ming XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RING FOR SUBSTRATE EXTREME EDGE PROTECTION
Publication number
20220157574
Publication date
May 19, 2022
Applied Materials, Inc.
Benjamin SCHWARZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN FILM, IN-SITU MEASUREMENT THROUGH TRANSPARENT CRYSTAL AND TRAN...
Publication number
20210391157
Publication date
Dec 16, 2021
Applied Materials, Inc.
Patrick Tae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
Publication number
20210280400
Publication date
Sep 9, 2021
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITIVE SENSOR HOUSING FOR CHAMBER CONDITION MONITORING
Publication number
20210278360
Publication date
Sep 9, 2021
Applied Materials, Inc.
Yaoling Pan
G01 - MEASURING TESTING
Information
Patent Application
CAPACITIVE SENSOR FOR CHAMBER CONDITION MONITORING
Publication number
20210280443
Publication date
Sep 9, 2021
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITIVE SENSORS AND CAPACITIVE SENSING LOCATIONS FOR PLASMA CHAM...
Publication number
20210280399
Publication date
Sep 9, 2021
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW CONTACT AREA SUBSTRATE SUPPORT FOR ETCHING CHAMBER
Publication number
20210035851
Publication date
Feb 4, 2021
Applied Materials, Inc.
CHANGHUN LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
Publication number
20200335368
Publication date
Oct 22, 2020
Applied Materials, Inc.
Yaoling PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING CHAMBER WITH SUBSTRATE EDGE ENHANCEMENT PROCESSING
Publication number
20200152431
Publication date
May 14, 2020
Applied Materials, Inc.
Changhun LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHAMBER LID WITH INTEGRATED HEATER
Publication number
20200118844
Publication date
Apr 16, 2020
Applied Materials, Inc.
Michael D. WILLWERTH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH VARIABLE PIXELATED MAGNETIC FIELD
Publication number
20200013661
Publication date
Jan 9, 2020
Applied Materials, Inc.
Chih-Hsun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESONANT PROCESS MONITOR
Publication number
20190287758
Publication date
Sep 19, 2019
Yaoling PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COOLING ELEMENT FOR AN ELECTROSTATIC CHUCK ASSEMBLY
Publication number
20190244848
Publication date
Aug 8, 2019
Applied Materials, Inc.
Michael D. Willwerth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS FLOW FOR CONDENSATION REDUCTION WITH A SUBSTRATE PROCESSING CHUCK
Publication number
20190115240
Publication date
Apr 18, 2019
Applied Materials, Inc.
Hung Sang Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE SUPPORT ASSEMBLY
Publication number
20180103508
Publication date
Apr 12, 2018
Applied Materials, Inc.
Alexander Matyushkin
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
APPARATUS AND METHODS FOR REDUCING PARTICLES IN SEMICONDUCTOR PROCE...
Publication number
20170345623
Publication date
Nov 30, 2017
Applied Materials, Inc.
Andrew NGUYEN
B32 - LAYERED PRODUCTS
Information
Patent Application
CONDUCTIVE WAFER LIFT PIN O-RING GRIPPER WITH RESISTOR
Publication number
20170221750
Publication date
Aug 3, 2017
Applied Materials, Inc.
Roberto Cesar COTLEAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LIFT PIN ACTUATOR
Publication number
20170032997
Publication date
Feb 2, 2017
Applied Materials, Inc.
Michael D. WILLWERTH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH RATE AND CRITICAL DIMENSION UNIFORMITY BY SELECTION OF FOCUS R...
Publication number
20170011891
Publication date
Jan 12, 2017
Applied Materials, Inc.
Edward P. HAMMOND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS FLOW FOR CONDENSATION REDUCTION WITH A SUBSTRATE PROCESSING CHUCK
Publication number
20160276197
Publication date
Sep 22, 2016
Hun Sang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHIELDED LID HEATER ASSEMBLY
Publication number
20160254123
Publication date
Sep 1, 2016
Applied Materials, Inc.
Michael D. WILLWERTH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...