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System and Method for Cryogenic Cooling
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Publication date Apr 25, 2019
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Brooks Automation, Inc.
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Allen J. Bartlett
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Multi-Refrigerator High Speed Cryopump
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Publication date Oct 26, 2017
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Brooks Automation, Inc.
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Allen J. Bartlett
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Cryopump
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Publication number 20160146200
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Publication date May 26, 2016
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Brooks Automation, Inc.
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Sergei Syssoev
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CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE
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Publication number 20130239593
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Publication date Sep 19, 2013
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Brooks Automation, Inc.
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Michael J. Eacobacci
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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MULTI-REFRIGERATOR HIGH SPEED CRYOPUMP
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Publication number 20130205805
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Publication date Aug 15, 2013
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Brooks Automation, Inc.
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Allen J. Bartlett
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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SYSTEM AND METHOD FOR CRYOGENIC COOLING
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Publication number 20120038120
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Publication date Feb 16, 2012
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Allen J. Bartlett
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F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
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Pressure burst free high capacity cryopump
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Publication number 20080168778
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Publication date Jul 17, 2008
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Brooks Automation, Inc.
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Allen J. Bartlett
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Cryopump temperature control of arrays
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Publication number 20050081536
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Publication date Apr 21, 2005
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Helix Technology Corporation
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Peter W. Gaudet
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Electronically controlled vacuum pump gauge
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Publication number 20040194477
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Publication date Oct 7, 2004
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Helix Technology Corporation
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Peter W. Gaudet
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Electronically controlled cryopump
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Publication number 20030051487
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Publication date Mar 20, 2003
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Helix Technology Corporation
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Peter W. Gaudet
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Electronically controlled vacuum pump
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Publication number 20020094277
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Publication date Jul 18, 2002
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Helix Technology Corporation
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Peter W. Gaudet
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...