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Charged particle beam device
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Patent number 11,869,745
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Issue date Jan 9, 2024
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HITACHI HIGH-TECH CORPORATION
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Minami Shouji
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H01 - BASIC ELECTRIC ELEMENTS
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Electron beam device
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Patent number 11,393,657
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Issue date Jul 19, 2022
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HITACHI HIGH-TECH CORPORATION
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Minami Shouji
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 11,355,308
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Issue date Jun 7, 2022
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HITACHI HIGH-TECH CORPORATION
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Yasuhiro Shirasaki
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 11,328,897
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Issue date May 10, 2022
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HITACHI HIGH-TECH CORPORATION
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Minami Shouji
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 10,134,564
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Issue date Nov 20, 2018
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Hitachi High-Technologies Corporation
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Taiga Okumura
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H01 - BASIC ELECTRIC ELEMENTS