Ming-Shu KUO

Follow

Person

San Ramon, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Residue free systems and methods for isotropically etching silicon...
- Patent number 9,385,003
- Issue date Jul 5, 2016
- Lam Research Corporation
- Ming-Shu Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for providing vias
- Patent number 8,999,184
- Issue date Apr 7, 2015
- Lam Research Corporation
- Ming-Shu Kuo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IN-SITU METAL RESIDUE CLEAN
- Publication number 20140179106
- Publication date Jun 26, 2014
- LAM RESEARCH CORPORATION
- Qinghua ZHONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCH WITH MIXED MODE PULSING
- Publication number 20140051256
- Publication date Feb 20, 2014
- LAM RESEARCH CORPORATION
- Qinghua ZHONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROVIDING VIAS
- Publication number 20140038419
- Publication date Feb 6, 2014
- LAM RESEARCH CORPORATION
- Ming-Shu KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SHRINK AND TUNE TRENCH/VIA CD
- Publication number 20140030893
- Publication date Jan 30, 2014
- LAM RESEARCH CORPORATION
- Ming-Shu KUO
- H01 - BASIC ELECTRIC ELEMENTS