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Vacuum processing apparatus
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Patent number 8,460,467
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Issue date Jun 11, 2013
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Hitachi High-Technologies Corporation
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Akitaka Makino
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Vacuum processing apparatus
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Patent number 7,976,632
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Issue date Jul 12, 2011
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Hitachi High-Technologies Corporation
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Akitaka Makino
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Vacuum processing apparatus
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Patent number 7,833,382
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Issue date Nov 16, 2010
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Hitachi High-Technologies Corporation
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Akitaka Makino
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Vacuum processing apparatus
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Patent number 7,828,928
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Issue date Nov 9, 2010
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Hitachi High-Technologies Corporation
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Akitaka Makino
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Vacuum processing apparatus
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Patent number 7,335,277
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Issue date Feb 26, 2008
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Hitachi High-Technologies Corporation
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Akitaka Makino
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H01 - BASIC ELECTRIC ELEMENTS
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Vacuum processing apparatus
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Patent number 7,247,207
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Issue date Jul 24, 2007
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Hitachi High-Technologies Corporation
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Akitaka Makino
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer gripping device
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Patent number 4,453,757
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Issue date Jun 12, 1984
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Hitachi, Ltd.
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Minoru Soraoka
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS