Nick Ray Linebarger JR.

Person

Beaverton, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Friction stir welding in semiconductor manufacturing applications
- Patent number 12,272,591
- Issue date Apr 8, 2025
- Lam Research Corporation
- Nick Ray Linebarger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Distance measurement between gas distribution device and substrate...
- Patent number 12,050,112
- Issue date Jul 30, 2024
- Lam Research Corporation
- Mark E. Emerson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,851,760
- Issue date Dec 26, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,725,283
- Issue date Aug 15, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate pedestal including backside gas-delivery tube
- Patent number 11,634,817
- Issue date Apr 25, 2023
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,441,222
- Issue date Sep 13, 2022
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Distance measurement between gas distribution device and substrate...
- Patent number 11,408,734
- Issue date Aug 9, 2022
- Lam Research Corporation
- Mark E. Emerson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetric wafer bow compensation by chemical vapor deposition
- Patent number 10,903,070
- Issue date Jan 26, 2021
- Lam Research Corporation
- Chanyuan Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling showerhead heating via resistive thermal measurements
- Patent number 10,872,747
- Issue date Dec 22, 2020
- Lam Research Corporation
- Nick Ray Linebarger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 10,851,457
- Issue date Dec 1, 2020
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate pedestal module including backside gas delivery tube and...
- Patent number 10,655,225
- Issue date May 19, 2020
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier ring structure and chamber systems including the same
- Patent number 10,242,848
- Issue date Mar 26, 2019
- Lam Research Corporation
- Eli Jeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate pedestal module including backside gas delivery tube and...
- Patent number 9,738,975
- Issue date Aug 22, 2017
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUSES FOR BACKSIDE WAFER PROCESSING WITH EDGE-ONLY WAFER CONTACT
- Publication number 20250118592
- Publication date Apr 10, 2025
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY PROCESS TOOL WITH ADJUSTABLE FLOW VALVE
- Publication number 20250003069
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Jon Garret JUDGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLOCKABLE SUBSTRATE PROCESSING PEDESTAL FOR USE IN SEMICONDUCTOR FA...
- Publication number 20240371679
- Publication date Nov 7, 2024
- LAM RESEARCH CORPORATION
- Sky MULLENAUX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20240309507
- Publication date Sep 19, 2024
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20240167161
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...
- Publication number 20230352279
- Publication date Nov 2, 2023
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FRICTION STIR PROCESSING FOR CORROSION RESISTANCE
- Publication number 20230250524
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- Keith Joseph Martin
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
CARRIER RINGS WITH RADIALLY-VARIED PLASMA IMPEDANCE
- Publication number 20230238223
- Publication date Jul 27, 2023
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE
- Publication number 20230220549
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUPING FEATURES OF SHOWERHEADS IN SUBSTRATE PROCESSING SYSTEMS
- Publication number 20230166371
- Publication date Jun 1, 2023
- LAM RESEARCH CORPORATION
- Rohit ODE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DECOUPLING RADIOFREQUENCY (RF) SIGNALS FROM INPUT SIGNAL CONDUCTORS...
- Publication number 20230052543
- Publication date Feb 16, 2023
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU SURFACE COATING OF PROCESS CHAMBER
- Publication number 20230052089
- Publication date Feb 16, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Womack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER RING TO PEDESTAL KINEMATIC MOUNT FOR SUBSTRATE PROCESSING T...
- Publication number 20220415624
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Nick Ray LINEBARGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTANCE MEASUREMENT BETWEEN GAS DISTRIBUTION DEVICE AND SUBSTRATE...
- Publication number 20220364858
- Publication date Nov 17, 2022
- LAM RESEARCH CORPORATION
- Mark E. EMERSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20220298632
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FRICTION STIR WELDING IN SEMICONDUCTOR MANUFACTURING APPLICATIONS
- Publication number 20220189817
- Publication date Jun 16, 2022
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20220162755
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20220162754
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20220162753
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Depositing a Film on a Backside of a Substrate
- Publication number 20210108314
- Publication date Apr 15, 2021
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE
- Publication number 20200325578
- Publication date Oct 15, 2020
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- B32 - LAYERED PRODUCTS
Information Patent Application
DISTANCE MEASUREMENT BETWEEN GAS DISTRIBUTION DEVICE AND SUBSTRATE...
- Publication number 20200217657
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Mark E. EMERSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASYMMETRIC WAFER BOW COMPENSATION BY CHEMICAL VAPOR DEPOSITION
- Publication number 20200105523
- Publication date Apr 2, 2020
- LAM RESEARCH CORPORATION
- Chanyuan Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLING SHOWERHEAD HEATING VIA RESISTIVE THERMAL MEASUREMENTS
- Publication number 20200051789
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Nick Ray LINEBARGER
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PECVD Deposition System for Deposition on Selective Side of the Sub...
- Publication number 20190062918
- Publication date Feb 28, 2019
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND...
- Publication number 20170321324
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND...
- Publication number 20160333475
- Publication date Nov 17, 2016
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- B32 - LAYERED PRODUCTS
Information Patent Application
Carrier Ring Structure and Chamber Systems Including the Same
- Publication number 20160172165
- Publication date Jun 16, 2016
- LAM RESEARCH CORPORATION
- Eli Jeon
- H01 - BASIC ELECTRIC ELEMENTS

Nick Ray Linebarger JR.

Person

Patents Grantslast 30 patents

Friction stir welding in semiconductor manufacturing applications

Distance measurement between gas distribution device and substrate...

Spatially tunable deposition to compensate within wafer differentia...

PECVD deposition system for deposition on selective side of the sub...

PECVD deposition system for deposition on selective side of the sub...

Substrate pedestal including backside gas-delivery tube

PECVD deposition system for deposition on selective side of the sub...

Distance measurement between gas distribution device and substrate...

Asymmetric wafer bow compensation by chemical vapor deposition

Controlling showerhead heating via resistive thermal measurements

PECVD deposition system for deposition on selective side of the sub...

Substrate pedestal module including backside gas delivery tube and...

Carrier ring structure and chamber systems including the same

Substrate pedestal module including backside gas delivery tube and...

Patents Applicationslast 30 patents

APPARATUSES FOR BACKSIDE WAFER PROCESSING WITH EDGE-ONLY WAFER CONTACT

DRY PROCESS TOOL WITH ADJUSTABLE FLOW VALVE

CLOCKABLE SUBSTRATE PROCESSING PEDESTAL FOR USE IN SEMICONDUCTOR FA...

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...

FRICTION STIR PROCESSING FOR CORROSION RESISTANCE

CARRIER RINGS WITH RADIALLY-VARIED PLASMA IMPEDANCE

SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE

GROUPING FEATURES OF SHOWERHEADS IN SUBSTRATE PROCESSING SYSTEMS

DECOUPLING RADIOFREQUENCY (RF) SIGNALS FROM INPUT SIGNAL CONDUCTORS...

IN SITU SURFACE COATING OF PROCESS CHAMBER

CARRIER RING TO PEDESTAL KINEMATIC MOUNT FOR SUBSTRATE PROCESSING T...

DISTANCE MEASUREMENT BETWEEN GAS DISTRIBUTION DEVICE AND SUBSTRATE...

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

FRICTION STIR WELDING IN SEMICONDUCTOR MANUFACTURING APPLICATIONS

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

Methods for Depositing a Film on a Backside of a Substrate

SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE

DISTANCE MEASUREMENT BETWEEN GAS DISTRIBUTION DEVICE AND SUBSTRATE...

ASYMMETRIC WAFER BOW COMPENSATION BY CHEMICAL VAPOR DEPOSITION

CONTROLLING SHOWERHEAD HEATING VIA RESISTIVE THERMAL MEASUREMENTS

PECVD Deposition System for Deposition on Selective Side of the Sub...

SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND...

SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND...

Carrier Ring Structure and Chamber Systems Including the Same