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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming silicon carbide film containing oxygen
Patent number
8,080,282
Issue date
Dec 20, 2011
ASM Japan K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming dielectric film using siloxane-silazane mixture
Patent number
8,003,174
Issue date
Aug 23, 2011
ASM Japan K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming inorganic silazane-based dielectric film
Patent number
7,781,352
Issue date
Aug 24, 2010
ASM Japan K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming insulation film having high density
Patent number
7,718,553
Issue date
May 18, 2010
ASM Japan K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming silicon-containing insulation film having low die...
Patent number
7,655,577
Issue date
Feb 2, 2010
ASM Japan K.K.
Yasuyoshi Hyodo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming silazane-based dielectric film
Patent number
7,651,959
Issue date
Jan 26, 2010
ASM Japan K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a carbon polymer film using plasma CVD
Patent number
7,638,441
Issue date
Dec 29, 2009
ASM Japan K.K.
Yoshinori Morisada
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Device isolation technology on semiconductor substrate
Patent number
7,622,369
Issue date
Nov 24, 2009
ASM Japan K.K.
Woo Jin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of stabilizing film quality of low-dielectric constant film
Patent number
7,560,144
Issue date
Jul 14, 2009
ASM Japan K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a carbon polymer film using plasma CVD
Patent number
7,504,344
Issue date
Mar 17, 2009
ASM Japan K.K.
Nobuo Matsuki
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of forming a carbon polymer film using plasma CVD
Patent number
7,470,633
Issue date
Dec 30, 2008
ASM Japan K.K.
Nobuo Matsuki
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of forming carbon polymer film using plasma CVD
Patent number
7,410,915
Issue date
Aug 12, 2008
ASM Japan K.K.
Yoshinori Morisada
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method for forming insulation film
Patent number
7,354,873
Issue date
Apr 8, 2008
ASM Japan K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming silicon-containing insulation film having low di...
Patent number
7,147,900
Issue date
Dec 12, 2006
ASM Japan K.K.
Naoto Tsuji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming silicon-containing insulation film having low die...
Patent number
7,148,154
Issue date
Dec 12, 2006
ASM Japan K.K.
Yasuyoshi Hyodo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming low-k hard film
Patent number
7,064,088
Issue date
Jun 20, 2006
ASM Japan K.K.
Yasuyoshi Hyodo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas-shield electron-beam gun for thin-film curing application
Patent number
7,012,268
Issue date
Mar 14, 2006
ASM Japan K.K.
Nobuo Matsuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Insulation film on semiconductor substrate and method for forming same
Patent number
6,881,683
Issue date
Apr 19, 2005
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Insulation film on semiconductor substrate and method for forming same
Patent number
6,852,650
Issue date
Feb 8, 2005
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for forming low dielectric constant film
Patent number
6,830,007
Issue date
Dec 14, 2004
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Insulation film on semiconductor substrate and method for forming same
Patent number
6,784,123
Issue date
Aug 31, 2004
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming low dielectric constant interlayer insulation film
Patent number
6,759,344
Issue date
Jul 6, 2004
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma CVD film-forming device
Patent number
6,740,367
Issue date
May 25, 2004
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming low dielectric constant insulation film for semic...
Patent number
6,737,366
Issue date
May 18, 2004
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicone polymer insulation film on semiconductor substrate
Patent number
6,653,719
Issue date
Nov 25, 2003
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma CVD film-forming device
Patent number
6,631,692
Issue date
Oct 14, 2003
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for forming thin film on semiconductor substrate by plasm...
Patent number
6,602,800
Issue date
Aug 5, 2003
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Siloxan polymer film on semiconductor substrate
Patent number
6,559,520
Issue date
May 6, 2003
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for forming low dielectric constant film
Patent number
6,537,928
Issue date
Mar 25, 2003
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Siloxan polymer film on semiconductor substrate and method for form...
Patent number
6,514,880
Issue date
Feb 4, 2003
ASM Japan K.K.
Nobuo Matsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
INSULATING FILM FORMING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20240321571
Publication date
Sep 26, 2024
TOKYO ELECTRON LIMITED
Daisuke OBA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A MOISTURE BARRIER ON PHOTOSENSITIVE ORGANOMETALL...
Publication number
20240085793
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SILICON-CONTAINING FILM AND FILM FORMING APPARATUS
Publication number
20240087883
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Nobuo MATSUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING PHOTOSENSITIVE ORGANOMETALLIC OXIDES BY CHEMICAL...
Publication number
20240045332
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240014005
Publication date
Jan 11, 2024
TOKYO ELECTRON LIMITED
Hiroyuki MATSUURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240014013
Publication date
Jan 11, 2024
TOKYO ELECTRON LIMITED
Nobuo MATSUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230295797
Publication date
Sep 21, 2023
Tokyo Electron Limited
Nobuo MATSUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
Publication number
20230215754
Publication date
Jul 6, 2023
Tokyo Electron Limited
Satoru KAWAKAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING INSULATION FILM
Publication number
20220235456
Publication date
Jul 28, 2022
Tokyo Electron Limited
Nobuo MATSUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE ISOLATION TECHNOLOGY ON SEMICONDUCTOR SUBSTRATE
Publication number
20090298257
Publication date
Dec 3, 2009
ASM JAPAN K.K.
Woo Jin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING DIELECTRIC FILM USING SILOXANE-SILAZANE MIXTURE
Publication number
20090156017
Publication date
Jun 18, 2009
ASM JAPAN K.K.
Atsuki FUKAZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING SILAZANE-BASED DIELECTRIC FILM
Publication number
20090142935
Publication date
Jun 4, 2009
ASM JAPAN K.K.
Atsuki FUKUZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A CARBON POLYMER FILM USING PLASMA CVD
Publication number
20090068852
Publication date
Mar 12, 2009
ASM JAPAN K.K.
Yoshinori MORISADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING INORGANIC SILAZANE-BASED DIELECTRIC FILM
Publication number
20080305648
Publication date
Dec 11, 2008
ASM JAPAN K.K.
Atsuki FUKAZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA CVD APPARATUS HAVING NON-METAL SUSCEPTOR
Publication number
20080299326
Publication date
Dec 4, 2008
ASM JAPAN K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for forming insulation film having high density
Publication number
20080076266
Publication date
Mar 27, 2008
ASM JAPAN K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING SILICON CARBIDE FILM CONTAINING OXYGEN
Publication number
20080038485
Publication date
Feb 14, 2008
ASM JAPAN K.K.
Atsuki FUKAZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming carbon polymer film using plasma CVD
Publication number
20070224833
Publication date
Sep 27, 2007
ASM JAPAN K.K.
Yoshinori Morisada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming a carbon polymer film using plasma CVD
Publication number
20070218705
Publication date
Sep 20, 2007
ASM JAPAN K.K.
Nobuo Matsuki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...
Publication number
20070111540
Publication date
May 17, 2007
ASM JAPAN K.K.
Yasuyoshi Hyodo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma CVD film formation apparatus provided with mask
Publication number
20070065597
Publication date
Mar 22, 2007
ASM JAPAN K.K.
Shintaro Kaido
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...
Publication number
20070066086
Publication date
Mar 22, 2007
ASM JAPAN K.K.
Yasuyoshi Hyodo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Insulation film and method for manufacturing same
Publication number
20070009673
Publication date
Jan 11, 2007
ASM JAPAN K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING INSULATION FILM
Publication number
20070004204
Publication date
Jan 4, 2007
ASM JAPAN K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Formation technology for nanoparticle films having low dielectric c...
Publication number
20060269690
Publication date
Nov 30, 2006
ASM JAPAN K.K.
Yukio Watanabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for forming insulation film
Publication number
20060258176
Publication date
Nov 16, 2006
ASM JAPAN K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of stabilizing film quality of low-dielectric constant film
Publication number
20060216433
Publication date
Sep 28, 2006
ASM JAPAN K.K.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Formation technology of nano-particle films having low dielectric c...
Publication number
20060105583
Publication date
May 18, 2006
ASM JAPAN K.K.
Shingo Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming a carbon polymer film using plasma CVD
Publication number
20060084280
Publication date
Apr 20, 2006
Nobuo Matsuki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of forming silicon-containing insulation film having low die...
Publication number
20050042884
Publication date
Feb 24, 2005
ASM JAPAN K.K.
Yasuyoshi Hyodo
H01 - BASIC ELECTRIC ELEMENTS