Nobutoshi Mizusawa

Person

Yamato, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus for synchrotron radiation lithography
- Patent number 6,167,111
- Issue date Dec 26, 2000
- Canon Kabushiki Kaisha
- Yutaka Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device and exposing apparatus using the same
- Patent number 5,999,589
- Issue date Dec 7, 1999
- Canon Kabushiki Kaisha
- Yuji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device and exposing apparatus using the same
- Patent number 5,883,932
- Issue date Mar 16, 1999
- Canon Kabushiki Kaisha
- Yuji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask supporting device and correction method therefor, and exposure...
- Patent number 5,854,819
- Issue date Dec 29, 1998
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and mask supporting mechanism
- Patent number 5,825,463
- Issue date Oct 20, 1998
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus and SOR X-ray exposure apparatus having same
- Patent number 5,822,389
- Issue date Oct 13, 1998
- Canon Kabushiki Kaisha
- Shunichi Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Recording apparatus and ink cartridge
- Patent number 5,760,802
- Issue date Jun 2, 1998
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Substrate conveying device and method of controlling the same
- Patent number 5,641,264
- Issue date Jun 24, 1997
- Canon Kabushiki Kaisha
- Mitsutoshi Kuno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature controlling device for mask and wafer holders
- Patent number 5,577,552
- Issue date Nov 26, 1996
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G05 - CONTROLLING REGULATING
Information Patent Grant
Recording apparatus having an ink mist evacuation system
- Patent number 5,552,812
- Issue date Sep 3, 1996
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Alignment apparatus and SOR x-ray exposure apparatus having same
- Patent number 5,524,131
- Issue date Jun 4, 1996
- Canon Kabushiki Kaisha
- Shunichi Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method
- Patent number 5,498,501
- Issue date Mar 12, 1996
- Canon Kabushiki Kaisha
- Isamu Shimoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray mask, and exposure apparatus and device production using the...
- Patent number 5,485,495
- Issue date Jan 16, 1996
- Canon Kabushiki Kaisha
- Takeshi Miyachi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Recording apparatus and ink cartridge
- Patent number 5,467,114
- Issue date Nov 14, 1995
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Exposure apparatus
- Patent number 5,390,227
- Issue date Feb 14, 1995
- Canon Kabushiki Kaisha
- Nobutoshi Mizusawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,377,251
- Issue date Dec 27, 1994
- Canon Kabushiki Kaisha
- Nobutoshi Mizusawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure control in an X-ray exposure apparatus
- Patent number 5,365,561
- Issue date Nov 15, 1994
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray mask structure
- Patent number 5,356,686
- Issue date Oct 18, 1994
- Canon Kabushiki Kaisha
- Hidehiko Fujioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,317,615
- Issue date May 31, 1994
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,285,488
- Issue date Feb 8, 1994
- Canon Kabushiki Kaisha
- Yutaka Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate conveying apparatus
- Patent number 5,277,539
- Issue date Jan 11, 1994
- Canon Kabushiki Kaisha
- Shin Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure apparatus
- Patent number 5,267,292
- Issue date Nov 30, 1993
- Canon Kabushiki Kaisha
- Yutaka Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,182,615
- Issue date Jan 26, 1993
- Canon Kabushiki Kaisha
- Hiroshi Kurosawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,172,402
- Issue date Dec 15, 1992
- Canon Kabushiki Kaisha
- Nobutoshi Mizusawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure apparatus
- Patent number 5,172,403
- Issue date Dec 15, 1992
- Canon Kabushiki Kaisha
- Yutaka Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacture of semiconductor devices
- Patent number 5,168,512
- Issue date Dec 1, 1992
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device
- Patent number 5,160,961
- Issue date Nov 3, 1992
- Canon Kabushiki Kaisha
- Mitsuji Marumo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray transmitting window and method of mounting the same
- Patent number 5,159,621
- Issue date Oct 27, 1992
- Canon Kabushiki Kaisha
- Yutaka Watanabe
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Exposure apparatus for controlling intensity of exposure radiation
- Patent number 5,157,700
- Issue date Oct 20, 1992
- Canon Kabushiki Kaisha
- Hiroshi Kurosawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,150,391
- Issue date Sep 22, 1992
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Nobutoshi Mizusawa

Person

Patents Grantslast 30 patents

Exposure apparatus for synchrotron radiation lithography

Substrate holding device and exposing apparatus using the same

Substrate holding device and exposing apparatus using the same

Mask supporting device and correction method therefor, and exposure...

Mask and mask supporting mechanism

Alignment apparatus and SOR X-ray exposure apparatus having same

Recording apparatus and ink cartridge

Substrate conveying device and method of controlling the same

Temperature controlling device for mask and wafer holders

Recording apparatus having an ink mist evacuation system

Alignment apparatus and SOR x-ray exposure apparatus having same

Exposure method

X-ray mask, and exposure apparatus and device production using the...

Recording apparatus and ink cartridge

Exposure apparatus

Exposure apparatus

Exposure control in an X-ray exposure apparatus

X-ray mask structure

Exposure apparatus

Exposure apparatus

Substrate conveying apparatus

X-ray exposure apparatus

Exposure apparatus

Exposure apparatus

X-ray exposure apparatus

Method of manufacture of semiconductor devices

Substrate holding device

X-ray transmitting window and method of mounting the same

Exposure apparatus for controlling intensity of exposure radiation

Exposure apparatus