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Plasma processing method and products thereof
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Patent number 5,185,179
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Issue date Feb 9, 1993
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Apparatus and method for forming thin films
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Patent number 5,079,031
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Issue date Jan 7, 1992
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Electrophotographic photoconductor
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Patent number 5,059,502
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Issue date Oct 22, 1991
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Ricoh Company, Ltd.
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Narihito Kojima
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Plasma processing method and apparatus
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Patent number 5,041,201
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Issue date Aug 20, 1991
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Photoelectric conversion device
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Patent number 5,035,753
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Issue date Jul 30, 1991
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Semiconductor Energy Laboratory Co., Ltd.
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Kunio Suzuki
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H01 - BASIC ELECTRIC ELEMENTS
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