Claims
- 1. A method of coating an object with a film comprising:
- disposing said object in a reaction chamber;
- inputting a reactive gas into said reaction chamber; and
- applying an electric power to said reactive gas in order to initiate a reaction of said reactive gas and form a film by deposition of the product of said reaction,
- wherein the magnitude of said electric power is amplitude modulated between different non-zero levels to provide a substantially uniform thickness of said film on said substrate, the speed of deposition being lower at a center portion than that at a peripheral portion of said substrate at one non-zero power level and the speed of deposition being higher at said center portion than that at said peripheral portion of said substrate at another non-zero power level.
- 2. The method of claim 1 wherein said electric power is carried by plasma discharge.
- 3. The method of claim 1 wherein said electric power is a RF power.
- 4. The method of claim 3 wherein said modulation has one cycle per 1 to 5 seconds.
- 5. The method of claim 4 wherein the degree of said modulation is less than 50%.
- 6. The method of claim 2 wherein said reactive gas includes silane gas.
- 7. The method of claim 3 wherein said reactive gas includes a hydrocarbon.
- 8. The method of claim 7 wherein the magnitude of said RF power is changed between 50 W and 1 KW.
- 9. Method of claim 1, wherein the power applying step is performed by a pair of electrodes and said disposing step comprises placing of an object in the form of a planar substrate within the reaction chamber with a surface thereof to be etched being situated perpendicular to and between said pair of electrodes.
- 10. The method of claim 1, wherein said electric power is carried by plasma discharge.
- 11. A method of claim 1 wherein said electric power is applied at only one frequency.
Priority Claims (1)
Number |
Date |
Country |
Kind |
61-186203 |
Aug 1986 |
JPX |
|
RELATED APPLICATION
This application is a continuation of Ser. No. 07/166,546, filed 3/10/88, now abandoned, which itself was a continuation in part of application Ser. No 07/082,541, filed Aug. 7, 1987, now abandoned.
US Referenced Citations (4)
Foreign Referenced Citations (1)
Number |
Date |
Country |
63-042115 |
Feb 1988 |
JPX |
Continuations (1)
|
Number |
Date |
Country |
Parent |
166546 |
Mar 1988 |
|
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
82541 |
Aug 1987 |
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