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Osamu Kasahara
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last 30 patents
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Patent Grant
Method of manufacturing semiconductor device and substrate processi...
Patent number
9,096,928
Issue date
Aug 4, 2015
Hitachi Kokusai Electric Inc.
Ryota Sasajima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device and substrate processi...
Patent number
9,023,429
Issue date
May 5, 2015
Hitachi Kokusai Electric Inc.
Yuichiro Takeshima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device and method of processi...
Patent number
8,575,042
Issue date
Nov 5, 2013
Hitachi Kokusai Electric Inc.
Yosuke Ota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device manufacturing method and substrate processing...
Patent number
8,293,646
Issue date
Oct 23, 2012
Hitachi Kokusai Electric Inc.
Takashi Ozaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Manufacturing method of semiconductor device, and substrate process...
Patent number
7,494,941
Issue date
Feb 24, 2009
Hitachi Kokusai Electric Inc.
Osamu Kasahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for use in manufacturing a semiconductor device
Patent number
7,033,937
Issue date
Apr 25, 2006
Hitachi Kokusai Electric, Inc.
Kazuyuki Toyoda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
6,894,334
Issue date
May 17, 2005
Hitachi, Ltd.
Jun Sugiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for use in manufacturing a semiconductor device
Patent number
6,576,063
Issue date
Jun 10, 2003
Hitachi Kokusai Electric, Inc.
Kazuyuki Toyoda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP...
Patent number
6,548,847
Issue date
Apr 15, 2003
Hitachi, Ltd.
Jun Sugiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
6,342,412
Issue date
Jan 29, 2002
Hitachi, Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
6,169,324
Issue date
Jan 2, 2001
Hitachi, Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
6,127,255
Issue date
Oct 3, 2000
Hitachi, Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor integrated circuit, method of fabricating the same an...
Patent number
5,917,211
Issue date
Jun 29, 1999
Hitachi, Ltd.
Jun Murata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming teos oxide and silicon nitride passivation layer...
Patent number
5,811,316
Issue date
Sep 22, 1998
Hitachi Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
5,780,882
Issue date
Jul 14, 1998
Hitachi, Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing a BIMIS
Patent number
5,773,340
Issue date
Jun 30, 1998
Hitachi, Ltd.
Takahiro Kumauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit device process for fabricating the...
Patent number
5,739,589
Issue date
Apr 14, 1998
Hitachi, Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor integrated circuit, method of fabricating the same an...
Patent number
5,734,188
Issue date
Mar 31, 1998
Hitachi, Ltd.
Jun Murata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for forming multilayer wiring
Patent number
5,670,421
Issue date
Sep 23, 1997
Hitachi, Ltd.
Eisuke Nishitani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
5,557,147
Issue date
Sep 17, 1996
Hitachi, Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process for forming multilayer wiring
Patent number
5,498,768
Issue date
Mar 12, 1996
Hitachi, Ltd.
Eisuke Nishitani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor integrated circuit device having an improved vertical...
Patent number
5,468,989
Issue date
Nov 21, 1995
Hitachi, Ltd.
Hirotaka Nishizawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
5,331,191
Issue date
Jul 19, 1994
Hitachi, Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor integrated circuit, method of fabricating the same an...
Patent number
5,264,712
Issue date
Nov 23, 1993
Hitachi, Ltd.
Jun Murata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
5,202,275
Issue date
Apr 13, 1993
Hitachi Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor integrated circuit device and method of manufacturing...
Patent number
5,060,045
Issue date
Oct 22, 1991
Hitachi, Ltd.
Nobuo Owada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device with multilayer silicon oxide silicon nitride...
Patent number
4,907,046
Issue date
Mar 6, 1990
Hitachi Ltd.
Yuzuru Ohji
F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information
Patent Grant
Target for sputtering
Patent number
4,610,774
Issue date
Sep 9, 1986
Hitachi, Ltd.
Masao Sakata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Planar magnetron sputtering with modified field configuration
Patent number
4,606,802
Issue date
Aug 19, 1986
Hitachi, Ltd.
Shigeru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20140087567
Publication date
Mar 27, 2014
Hitachi Kokusai Electric Inc.
Kazuyuki TOYODA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INJECTION MEMBER FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PLASMA...
Publication number
20130276983
Publication date
Oct 24, 2013
Hitachi Kokusai Electric Inc.
Yong Sung Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
Publication number
20130078823
Publication date
Mar 28, 2013
Hitachi Kokusai Electric Inc.
Yuichiro Takeshima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF PROCESSI...
Publication number
20120220137
Publication date
Aug 30, 2012
Hitachi Kokusai Electric Inc.
Yosuke Ota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
Publication number
20120064733
Publication date
Mar 15, 2012
Hitachi Kokusai Electric Inc.
Ryota SASAJIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20110212625
Publication date
Sep 1, 2011
Hitachi Kokusai Electric Inc.
Kazuyuki TOYODA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SUBSTRATE PROCESSING...
Publication number
20110207302
Publication date
Aug 25, 2011
Hitachi Kokusai Electric Inc.
Jie WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device manufacturing method and substrate processing...
Publication number
20090117752
Publication date
May 7, 2009
Hitachi Kokusai Electric Inc.
Takashi Ozaki
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for manufacturing semiconductor device and substrate process...
Publication number
20070032045
Publication date
Feb 8, 2007
Hitachi Kokusai Electric Inc.
Osamu Kasahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor integrated circuit device, process for fabricating th...
Publication number
20030189255
Publication date
Oct 9, 2003
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for use in manufacturing a semiconductor device
Publication number
20030124876
Publication date
Jul 3, 2003
Kazuyuki Toyoda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for manufacturing semiconductor device, method for processin...
Publication number
20020192984
Publication date
Dec 19, 2002
HITACHI KOKUSAI ELECTRIC INC.
Shin Hiyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor integrated circuit device, process for fabricating th...
Publication number
20020017669
Publication date
Feb 14, 2002
Jun Sugiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for use in manufacturing a semiconductor device
Publication number
20010029112
Publication date
Oct 11, 2001
Hitachi Kokusai Electric Inc.
Kazuyuki Toyoda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...