Pai Hsueh Yang

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Motor with force constant modeling and identification for flexible...
- Patent number 11,223,303
- Issue date Jan 11, 2022
- Nikon Research Corporation of America
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual valve fluid actuator assembly
- Patent number 11,092,170
- Issue date Aug 17, 2021
- NIKON CORPORATION
- Alex Ka Tim Poon
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Magnet array for moving magnet planar motor
- Patent number 10,261,419
- Issue date Apr 16, 2019
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnetic sensor calibration and servo for planar motor stage
- Patent number 9,921,495
- Issue date Mar 20, 2018
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for limiting counter-mass trim-motor force and stage assemb...
- Patent number 9,529,353
- Issue date Dec 27, 2016
- Nikon Corporation
- Pai-Hsueh Yang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for determining a commutation offset and for determining a c...
- Patent number 9,465,305
- Issue date Oct 11, 2016
- Nikon Corporation
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for calibrating a force constant of a motorized stage used f...
- Patent number 9,243,969
- Issue date Jan 26, 2016
- Nikon Corporation
- Pai-Hsueh Yang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus to allow a plurality of stages to operate in c...
- Patent number 9,030,057
- Issue date May 12, 2015
- Nikon Corporation
- Michael B. Binnad
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for determing a commutation offset and for determining a com...
- Patent number 9,013,134
- Issue date Apr 21, 2015
- Nikon Corporation
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Control systems and methods for compensating for effects of a stage...
- Patent number 8,853,988
- Issue date Oct 7, 2014
- Nikon Corporation
- Michael B. Binnard
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage assembly with measurement system initialization, vibration co...
- Patent number 8,582,080
- Issue date Nov 12, 2013
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control systems and methods applying iterative feedback tuning for...
- Patent number 8,451,431
- Issue date May 28, 2013
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
On-machine methods for identifying and compensating force-ripple an...
- Patent number 8,140,288
- Issue date Mar 20, 2012
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Active-isolation mounts for optical elements
- Patent number 7,989,756
- Issue date Aug 2, 2011
- Nikon Corporation
- Shiang-Lung Koo
- G02 - OPTICS
Information Patent Grant
Stage assembly with measurement system initialization, vibration co...
- Patent number 7,417,714
- Issue date Aug 26, 2008
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
E/I core actuator commutation formula and control method
- Patent number 7,253,576
- Issue date Aug 7, 2007
- Nikon Corporation
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Fine force actuator assembly for chemical mechanical polishing appa...
- Patent number 7,172,493
- Issue date Feb 6, 2007
- Nikon Corporation
- W. Thomas Novak
- B24 - GRINDING POLISHING
Information Patent Grant
Auto-calibration of attraction-only type actuator commutations
- Patent number 7,034,474
- Issue date Apr 25, 2006
- Nikon Corporation
- Pai Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Modular stage with reaction force cancellation
- Patent number 6,917,412
- Issue date Jul 12, 2005
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fine force control of actuators for chemical mechanical polishing a...
- Patent number 6,855,032
- Issue date Feb 15, 2005
- Nikon Corporation
- Pai-Hsueh Yang
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
DUAL VALVE FLUID ACTUATOR ASSEMBLY
- Publication number 20190376531
- Publication date Dec 12, 2019
- Nikon Corporation
- Alex Ka Tim Poon
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Application
MOTOR WITH FORCE CONSTANT MODELING AND IDENTIFICATION FOR FLEXIBLE...
- Publication number 20180367067
- Publication date Dec 20, 2018
- Nikon Research Corporation of America
- Pai-Hsueh Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNET ARRAY FOR MOVING MAGNET PLANAR MOTOR
- Publication number 20150338750
- Publication date Nov 26, 2015
- Nikon Corporation
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Dynamic Correction to Remove the Influence of Motor Coil Flux on Ha...
- Publication number 20150241525
- Publication date Aug 27, 2015
- Nikon Corporation
- Pai-Hsueh Yang
- G01 - MEASURING TESTING
Information Patent Application
Coil Switching Method for Moving Magnet Planar Motor
- Publication number 20150241794
- Publication date Aug 27, 2015
- Nikon Corporation
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
MAGNETIC SENSOR CALIBRATION AND SERVO FOR PLANAR MOTOR STAGE
- Publication number 20140204358
- Publication date Jul 24, 2014
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
FEEDFORWARD CONTROL ADJUSTED WITH ITERATIVE LEARNING
- Publication number 20130116814
- Publication date May 9, 2013
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Force Distribution Method for Stage Systems Utilizing Dual Actuators
- Publication number 20130049647
- Publication date Feb 28, 2013
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus to Allow a Plurality of Stages to Operate in C...
- Publication number 20120328836
- Publication date Dec 27, 2012
- Nikon Corporation
- Michael B. Binnad
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Synchronization control devices and methods
- Publication number 20120319637
- Publication date Dec 20, 2012
- NIKON CORPORATION
- Pai-Hsueh Yang
Information Patent Application
METHOD FOR DETERMING A COMMUTATION OFFSET AND FOR DETERMINING A COM...
- Publication number 20120127447
- Publication date May 24, 2012
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A COMMUTATION OFFSET AND FOR DETERMINING A C...
- Publication number 20120113405
- Publication date May 10, 2012
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR LIMITING COUNTER-MASS TRIM-MOTOR FORCE AND STAGE ASSEMB...
- Publication number 20120069316
- Publication date Mar 22, 2012
- NIKON CORPORATION
- Pai-Hsueh Yang
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR CALIBRATING A FORCE CONSTANT OF A MOTORIZED STAGE USED F...
- Publication number 20120060582
- Publication date Mar 15, 2012
- NIKON CORPORATION
- Pai-Hsueh Yang
- G01 - MEASURING TESTING
Information Patent Application
Control Systems and Methods for Compensating for Effects of a Stage...
- Publication number 20100237819
- Publication date Sep 23, 2010
- Nikon Corporation
- Michael B. Binnard
- G05 - CONTROLLING REGULATING
Information Patent Application
Stage-control systems and methods including inverse closed loop wit...
- Publication number 20100222898
- Publication date Sep 2, 2010
- NIKON CORPORATION
- Pai-Hsueh Yang
- G05 - CONTROLLING REGULATING
Information Patent Application
Control systems and methods applying iterative feedback tuning for...
- Publication number 20100188647
- Publication date Jul 29, 2010
- NIKON CORPORATION
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTIVE-ISOLATION MOUNTS FOR OPTICAL ELEMENTS
- Publication number 20090237793
- Publication date Sep 24, 2009
- NIKON CORPORATION
- Shiang-Lung Koo
- G02 - OPTICS
Information Patent Application
STAGE ASSEMBLY WITH MEASUREMENT SYSTEM INITIALIZATION, VIBRATION CO...
- Publication number 20080278705
- Publication date Nov 13, 2008
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
On-machine methods for identifying and compensating force-ripple an...
- Publication number 20080275661
- Publication date Nov 6, 2008
- NIKON CORPORATION
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Linear motor force ripple identification and compensation with iter...
- Publication number 20060170382
- Publication date Aug 3, 2006
- Nikon Corporation
- Pai-Hsueh Yang
- G05 - CONTROLLING REGULATING
Information Patent Application
Stage assembly with measurement system initialization, vibration co...
- Publication number 20060101928
- Publication date May 18, 2006
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fine force actuator assembly for chemical mechanical polishing appa...
- Publication number 20060035564
- Publication date Feb 16, 2006
- NIKON CORPORATION
- W. Thomas Novak
- B24 - GRINDING POLISHING
Information Patent Application
Feedforward control with reduced learning time for lithographic sys...
- Publication number 20050231706
- Publication date Oct 20, 2005
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
E/I core actuator commutation formula and control method
- Publication number 20050218842
- Publication date Oct 6, 2005
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Fine force control of actuators for chemical mechanical polishing a...
- Publication number 20050197045
- Publication date Sep 8, 2005
- W. Thomas Novak
- B24 - GRINDING POLISHING
Information Patent Application
Auto calibration of attraction-only type actuator commutations
- Publication number 20050173992
- Publication date Aug 11, 2005
- Pai Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
MODULAR STAGE WITH REACTION FORCE CANCELLATION
- Publication number 20040165172
- Publication date Aug 26, 2004
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Control system and method for improving tracking accuracy of a stag...
- Publication number 20040128918
- Publication date Jul 8, 2004
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Double isolation fine stage
- Publication number 20040119964
- Publication date Jun 24, 2004
- NIKON CORPORATION
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Pai Hsueh Yang

Person

Patents Grantslast 30 patents

Motor with force constant modeling and identification for flexible...

Dual valve fluid actuator assembly

Magnet array for moving magnet planar motor

Magnetic sensor calibration and servo for planar motor stage

Methods for limiting counter-mass trim-motor force and stage assemb...

Method for determining a commutation offset and for determining a c...

Method for calibrating a force constant of a motorized stage used f...

Method and apparatus to allow a plurality of stages to operate in c...

Method for determing a commutation offset and for determining a com...

Control systems and methods for compensating for effects of a stage...

Stage assembly with measurement system initialization, vibration co...

Control systems and methods applying iterative feedback tuning for...

On-machine methods for identifying and compensating force-ripple an...

Active-isolation mounts for optical elements

Stage assembly with measurement system initialization, vibration co...

E/I core actuator commutation formula and control method

Fine force actuator assembly for chemical mechanical polishing appa...

Auto-calibration of attraction-only type actuator commutations

Modular stage with reaction force cancellation

Fine force control of actuators for chemical mechanical polishing a...

Patents Applicationslast 30 patents

DUAL VALVE FLUID ACTUATOR ASSEMBLY

MOTOR WITH FORCE CONSTANT MODELING AND IDENTIFICATION FOR FLEXIBLE...

MAGNET ARRAY FOR MOVING MAGNET PLANAR MOTOR

Dynamic Correction to Remove the Influence of Motor Coil Flux on Ha...

Coil Switching Method for Moving Magnet Planar Motor

MAGNETIC SENSOR CALIBRATION AND SERVO FOR PLANAR MOTOR STAGE

FEEDFORWARD CONTROL ADJUSTED WITH ITERATIVE LEARNING

Force Distribution Method for Stage Systems Utilizing Dual Actuators

Method and Apparatus to Allow a Plurality of Stages to Operate in C...

Synchronization control devices and methods

METHOD FOR DETERMING A COMMUTATION OFFSET AND FOR DETERMINING A COM...

METHOD FOR DETERMINING A COMMUTATION OFFSET AND FOR DETERMINING A C...

METHODS FOR LIMITING COUNTER-MASS TRIM-MOTOR FORCE AND STAGE ASSEMB...

METHOD FOR CALIBRATING A FORCE CONSTANT OF A MOTORIZED STAGE USED F...

Control Systems and Methods for Compensating for Effects of a Stage...

Stage-control systems and methods including inverse closed loop wit...

Control systems and methods applying iterative feedback tuning for...

ACTIVE-ISOLATION MOUNTS FOR OPTICAL ELEMENTS

STAGE ASSEMBLY WITH MEASUREMENT SYSTEM INITIALIZATION, VIBRATION CO...

On-machine methods for identifying and compensating force-ripple an...

Linear motor force ripple identification and compensation with iter...

Stage assembly with measurement system initialization, vibration co...

Fine force actuator assembly for chemical mechanical polishing appa...

Feedforward control with reduced learning time for lithographic sys...

E/I core actuator commutation formula and control method

Fine force control of actuators for chemical mechanical polishing a...

Auto calibration of attraction-only type actuator commutations

MODULAR STAGE WITH REACTION FORCE CANCELLATION

Control system and method for improving tracking accuracy of a stag...

Double isolation fine stage