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Pao-Yu Kuo
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Taipei, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Method to calibrate the wafer transfer for oxide etcher (with clamp)
Patent number
6,531,326
Issue date
Mar 11, 2003
Taiwan Semiconductor Manufacturing Company
Ching-Ming Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cryptographic checksum apparatus
Patent number
6,477,652
Issue date
Nov 5, 2002
Institute for Information Industry
Sung-Ming Yen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method to calibrate the wafer transfer for oxide etcher (with clamp)
Patent number
6,303,509
Issue date
Oct 16, 2001
Taiwan Semiconductor Manufacturing Company
Ching-Ming Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
SOG coated apparatus to solve SOG non-uniformity in the VLSI process
Patent number
5,454,871
Issue date
Oct 3, 1995
Taiwan Semiconductor Manufacturing Company, Ltd.
Yung-Haw Liaw
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to solve sog non-uniformity in the VLSI process
Patent number
5,371,046
Issue date
Dec 6, 1994
Taiwan Semiconductor Manufacturing Company
Yung-Haw Liaw
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method to calibrate the wafer transfer for oxide etcher (with clamp)
Publication number
20020013056
Publication date
Jan 31, 2002
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Ching-Ming Chen
H01 - BASIC ELECTRIC ELEMENTS