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Paritosh Rajora
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Petaluma, CA, US
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last 30 patents
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Patent Grant
Method for minimizing the critical dimension growth of a feature on...
Patent number
6,774,046
Issue date
Aug 10, 2004
Tegal Corporation
Stephen P. DeOrnellas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for etching a semiconductor wafer with feature...
Patent number
6,492,280
Issue date
Dec 10, 2002
Tegal Corporation
Stephen P. DeOrnellas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for etching a semiconductor wafer with feature...
Patent number
6,127,277
Issue date
Oct 3, 2000
Tegal Corporation
Stephen P. DeOrnellas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for minimizing the critical dimension growth of a feature on...
Patent number
6,046,116
Issue date
Apr 4, 2000
Tegal Corporation
Stephen P. DeOrnellas
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for minimizing the critical dimension growth of a feature on...
Publication number
20010031561
Publication date
Oct 18, 2001
Tegal Corporation
Stephen P. DeOrnellas
H01 - BASIC ELECTRIC ELEMENTS