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Polymers for photoresist compositions
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Patent number 6,124,405
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Issue date Sep 26, 2000
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Arch Specialty Chemicals, Inc.
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Carl-Lorenz Mertesdorf
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Photoresist compositions
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Patent number 5,928,818
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Issue date Jul 27, 1999
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Olin Microelectronic Chemicals, Inc.
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Carl-Lorenz Mertesdorf
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Crosslinked polymers
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Patent number 5,834,531
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Issue date Nov 10, 1998
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Olin Microelectronic Chemicals, Inc.
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Hans-Thomas Schacht
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Crosslinked polymers
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Patent number 5,714,559
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Issue date Feb 3, 1998
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Olin Microelectronic Chemicals, Inc.
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Hans-Thomas Schacht
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...