Claims
- 1. A radiation sensitive composition comprising
- (a) a terpolymer containing 20-70 mole percent of repeating structural units of formula (I) and 3 to 40 mole percent of repeating structural units of the formula (II): ##STR10## as well as repeating units of formula (III): ##STR11## whereby A indicates a direct single bond or group of the formula: ##STR12## R.sub.1 indicates a hydrogen atom or a methyl group R.sub.2 indicates a 2-furanyloxy or 2-pyranyloxy group or a group of the formula: ##STR13## R.sub.3 indicates a group of the formulas:
- --COOH or --CN,
- R.sub.4 indicates a group selected from the groups of the formula: ##STR14## R.sub.5 indicates a C.sub.1 -C.sub.6 alkyl group or a phenyl group, R.sub.6 indicates a C.sub.1 -C.sub.6 alkyl group or a phenyl group,
- R.sub.7 indicates a C.sub.1 -C.sub.6 alkyl group or a phenyl group,
- Y indicates a hydrogen or a methyl group,
- Z indicates a group of the formula --OSi(CH.sub.3).sub.3,
- m indicates 1, 2 or 3, n indicates 3 minus m, and
- p indicates 0, 1, 2 or 3
- and whereby
- as many structural units of formula (III) are contained in the terpolymer such that its silicon content amounts to 7-20 weight percent; and
- (b) a photoinitiator that forms acid under the effect of actinic radiation with a wavelength below 300 nm.
- 2. The radiation sensitive composition of claim 1 wherein R.sub.3 is --COOH.
- 3. The radiation sensitive composition of claim 1 wherein R.sub.1 is methyl.
- 4. The radiation sensitive composition of claim 1 wherein p equals 1, 2 or 3.
- 5. The radiation sensitive composition of claim 4 wherein p equals 3.
- 6. The radiation sensitive composition of claim 1 wherein R.sub.2 is selected from the group consisting of: ##STR15## .
- 7. The radiation sensitive composition of claim 1 wherein R.sub.2 is: ##STR16## R.sub.3 is --COOH; and R.sub.4 is --(CH.sub.2).sub.3 --Si[OSi(CH.sub.3).sub.3 ].sub.3.
- 8. The radiation sensitive composition of claim 1, containing 3 to 35 mole percent of repeating units of formula (II).
- 9. The radiation sensitive composition of claim 7, containing 3 to 31 mole percent of repeating structural units of formula (II), 10 to 30 mole percent of repeating structural units of formula (III), and wherein repeating structural units of formula (I) form the balance to 100 mole percent.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2292/95 |
Aug 1995 |
CHX |
|
Parent Case Info
This is division of application Ser. No. 08/682,171 filed Jul. 16, 1996, now U.S. Pat. No. 5,886,119.
US Referenced Citations (5)
Number |
Name |
Date |
Kind |
4481049 |
Reichmanis et al. |
Nov 1984 |
|
5102771 |
Vogel et al. |
Apr 1992 |
|
5369200 |
Schaedeli et al. |
Nov 1994 |
|
5552260 |
Vogel et al. |
Sep 1996 |
|
5886119 |
Schaedeli et al. |
Mar 1999 |
|
Foreign Referenced Citations (1)
Number |
Date |
Country |
WO 9411788 |
May 1994 |
WOX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
682171 |
Jul 1996 |
|