Paul Butterfield

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Steam treatment stations for chemical mechanical polishing system
- Patent number 12,030,093
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Haosheng Wu
- B08 - CLEANING
Information Patent Grant
Slurry distribution device for chemical mechanical polishing
- Patent number 11,986,926
- Issue date May 21, 2024
- Applied Materials, Inc.
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of steam generation for chemical mechanical polishing
- Patent number 11,833,637
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Hari Soundararajan
- F22 - STEAM GENERATION
Information Patent Grant
Slurry distribution device for chemical mechanical polishing
- Patent number 11,806,835
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of steam generation for chemical mechanical polishing
- Patent number 11,801,582
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Hari Soundararajan
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with annular platen or polishing pad
- Patent number 11,780,046
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Use of steam for pre-heating of CMP components
- Patent number 11,633,833
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Haosheng Wu
- B24 - GRINDING POLISHING
Information Patent Grant
Steam cleaning of CMP components
- Patent number 11,628,478
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Haosheng Wu
- B08 - CLEANING
Information Patent Grant
Polishing system with support post and annular platen or polishing pad
- Patent number 11,511,388
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Steam treatment stations for chemical mechanical polishing system
- Patent number 11,446,711
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Haosheng Wu
- B08 - CLEANING
Information Patent Grant
Slurry distribution device for chemical mechanical polishing
- Patent number 11,077,536
- Issue date Aug 3, 2021
- Applied Materials, Inc.
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slurry distribution device for chemical mechanical polishing
- Patent number 10,967,483
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing system with annular platen or polishing pad for substrate...
- Patent number 10,562,147
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Orbital polishing with small pad
- Patent number 10,076,817
- Issue date Sep 18, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods for substrate polishing end point detection usi...
- Patent number 9,862,070
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with front side pressure control
- Patent number 9,808,906
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad cleaning systems employing fluid outlets oriented to...
- Patent number 9,687,960
- Issue date Jun 27, 2017
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Vacuum cleaning systems for polishing pads, and related methods
- Patent number 9,452,506
- Issue date Sep 27, 2016
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with front side pressure control
- Patent number 9,358,658
- Issue date Jun 7, 2016
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Multi-disk chemical mechanical polishing pad conditioners and methods
- Patent number 9,308,623
- Issue date Apr 12, 2016
- Applied Materials, Inc.
- Hung Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods for substrate polishing end point detection usi...
- Patent number 9,061,394
- Issue date Jun 23, 2015
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for removal of films and flakes from the edge...
- Patent number 8,142,260
- Issue date Mar 27, 2012
- Applied Materials, Inc.
- Eashwer Kollata
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for conditioning processing pads
- Patent number 7,828,626
- Issue date Nov 9, 2010
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for electrochemical mechanical processing
- Patent number 7,678,245
- Issue date Mar 16, 2010
- Applied Materials, Inc.
- Yan Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for conditioning processing pads
- Patent number 7,666,061
- Issue date Feb 23, 2010
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Biased retaining ring
- Patent number 7,608,173
- Issue date Oct 27, 2009
- Applied Materials, Inc.
- Antoine P. Manens
- B24 - GRINDING POLISHING
Information Patent Grant
Contacts for electrochemical processing
- Patent number 7,569,134
- Issue date Aug 4, 2009
- Applied Materials, Inc.
- Paul Butterfield
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Conductive polishing article for electrochemical mechanical polishing
- Patent number 7,422,516
- Issue date Sep 9, 2008
- Applied Materials, Inc.
- Paul D. Butterfield
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Polishing media stabilizer
- Patent number 7,381,116
- Issue date Jun 3, 2008
- Applied Materials, Inc.
- Phillip R. Sommer
- B24 - GRINDING POLISHING
Information Patent Grant
Optimized modular electrical machine using permanent magnets
- Patent number 7,375,449
- Issue date May 20, 2008
- Paul D. Butterfield
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
STEAM TREATMENT STATIONS FOR CHEMICAL MECHANICAL POLISHING SYSTEM
- Publication number 20240307928
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Haosheng Wu
- B08 - CLEANING
Information Patent Application
CONTROL OF STEAM GENERATION FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20230415297
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Hari Soundararajan
- B24 - GRINDING POLISHING
Information Patent Application
USE OF STEAM FOR PRE-HEATING OF CMP COMPONENTS
- Publication number 20230256562
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Haosheng Wu
- B24 - GRINDING POLISHING
Information Patent Application
STEAM CLEANING OF CMP COMPONENTS
- Publication number 20230249225
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Haosheng Wu
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING SYSTEM WITH ANNULAR PLATEN OR POLISHING PAD
- Publication number 20220410335
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20220402096
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STEAM TREATMENT STATIONS FOR CHEMICAL MECHANICAL POLISHING SYSTEM
- Publication number 20220388041
- Publication date Dec 8, 2022
- Applied Materials, Inc.
- Haosheng Wu
- B24 - GRINDING POLISHING
Information Patent Application
INSULATED FLUID LINES IN CHEMICAL MECHANICAL POLISHING
- Publication number 20220282807
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Chad Pollard
- B24 - GRINDING POLISHING
Information Patent Application
CONTROL OF STEAM GENERATION FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20210402554
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Hari Soundararajan
- B24 - GRINDING POLISHING
Information Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20210331288
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20210205953
- Publication date Jul 8, 2021
- Applied Materials, Inc.
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STEAM GENERATION FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20200406310
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Hari Soundararajan
- B08 - CLEANING
Information Patent Application
USE OF STEAM FOR PRE-HEATING OF CMP COMPONENTS
- Publication number 20200376626
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Haosheng Wu
- B24 - GRINDING POLISHING
Information Patent Application
STEAM TREATMENT STATIONS FOR CHEMICAL MECHANICAL POLISHING SYSTEM
- Publication number 20200376523
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Haosheng Wu
- B08 - CLEANING
Information Patent Application
STEAM CLEANING OF CMP COMPONENTS
- Publication number 20200376522
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Haosheng Wu
- B08 - CLEANING
Information Patent Application
POLISHING SYSTEM WITH SUPPORT POST AND ANNULAR PLATEN OR POLISHING PAD
- Publication number 20200114487
- Publication date Apr 16, 2020
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING SYSTEM WITH ANNULAR PLATEN OR POLISHING PAD FOR SUBSTRATE...
- Publication number 20180056477
- Publication date Mar 1, 2018
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20170368663
- Publication date Dec 28, 2017
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20170368664
- Publication date Dec 28, 2017
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing System with Front Side Pressure Control
- Publication number 20160279756
- Publication date Sep 29, 2016
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Application
Polishing Pad Cleaning Systems Employing Fluid Outlets Oriented To...
- Publication number 20160114459
- Publication date Apr 28, 2016
- Applied Materials, Inc.
- Paul D. BUTTERFIELD
- B24 - GRINDING POLISHING
Information Patent Application
ORBITAL POLISHING WITH SMALL PAD
- Publication number 20160016280
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Hung Chih Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CLEANING SYSTEMS FOR POLISHING PADS, AND RELATED METHODS
- Publication number 20160016283
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Paul D. BUTTERFIELD
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING SYSTEM WITH LOCAL AREA RATE CONTROL
- Publication number 20150111478
- Publication date Apr 23, 2015
- Applied Materials, Inc.
- Chih Hung CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-DISK CHEMICAL MECHANICAL POLISHING PAD CONDITIONERS AND METHODS
- Publication number 20140315473
- Publication date Oct 23, 2014
- Hung Chen
- B24 - GRINDING POLISHING
Information Patent Application
Polishing System with Front Side Pressure Control
- Publication number 20140273765
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Application
Polishing System with Front Side Pressure Control
- Publication number 20140273766
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Application
DAMPER FOR POLISHING PAD CONDITIONER
- Publication number 20140113533
- Publication date Apr 24, 2014
- Applied Materials, Inc.
- Jason Garcheung Fung
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE POLISHING END POINT DETECTION USI...
- Publication number 20130122788
- Publication date May 16, 2013
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE POLISHING END POINT DETECTION USI...
- Publication number 20130122782
- Publication date May 16, 2013
- Applied Materials, Inc.
- Shou-Sung Chang
- B24 - GRINDING POLISHING

Paul Butterfield

Person

Patents Grantslast 30 patents

Steam treatment stations for chemical mechanical polishing system

Slurry distribution device for chemical mechanical polishing

Control of steam generation for chemical mechanical polishing

Slurry distribution device for chemical mechanical polishing

Control of steam generation for chemical mechanical polishing

Polishing system with annular platen or polishing pad

Use of steam for pre-heating of CMP components

Steam cleaning of CMP components

Polishing system with support post and annular platen or polishing pad

Steam treatment stations for chemical mechanical polishing system

Slurry distribution device for chemical mechanical polishing

Slurry distribution device for chemical mechanical polishing

Polishing system with annular platen or polishing pad for substrate...

Orbital polishing with small pad

Systems and methods for substrate polishing end point detection usi...

Polishing system with front side pressure control

Polishing pad cleaning systems employing fluid outlets oriented to...

Vacuum cleaning systems for polishing pads, and related methods

Polishing system with front side pressure control

Multi-disk chemical mechanical polishing pad conditioners and methods

Systems and methods for substrate polishing end point detection usi...

Methods and apparatus for removal of films and flakes from the edge...

Apparatus for conditioning processing pads

Method and apparatus for electrochemical mechanical processing

Method for conditioning processing pads

Biased retaining ring

Contacts for electrochemical processing

Conductive polishing article for electrochemical mechanical polishing

Polishing media stabilizer

Optimized modular electrical machine using permanent magnets

Patents Applicationslast 30 patents

STEAM TREATMENT STATIONS FOR CHEMICAL MECHANICAL POLISHING SYSTEM

CONTROL OF STEAM GENERATION FOR CHEMICAL MECHANICAL POLISHING

USE OF STEAM FOR PRE-HEATING OF CMP COMPONENTS

STEAM CLEANING OF CMP COMPONENTS

POLISHING SYSTEM WITH ANNULAR PLATEN OR POLISHING PAD

SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING

STEAM TREATMENT STATIONS FOR CHEMICAL MECHANICAL POLISHING SYSTEM

INSULATED FLUID LINES IN CHEMICAL MECHANICAL POLISHING

CONTROL OF STEAM GENERATION FOR CHEMICAL MECHANICAL POLISHING

SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING

SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING

STEAM GENERATION FOR CHEMICAL MECHANICAL POLISHING

USE OF STEAM FOR PRE-HEATING OF CMP COMPONENTS

STEAM TREATMENT STATIONS FOR CHEMICAL MECHANICAL POLISHING SYSTEM

STEAM CLEANING OF CMP COMPONENTS

POLISHING SYSTEM WITH SUPPORT POST AND ANNULAR PLATEN OR POLISHING PAD

POLISHING SYSTEM WITH ANNULAR PLATEN OR POLISHING PAD FOR SUBSTRATE...

SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING

SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING

Polishing System with Front Side Pressure Control

Polishing Pad Cleaning Systems Employing Fluid Outlets Oriented To...

ORBITAL POLISHING WITH SMALL PAD

VACUUM CLEANING SYSTEMS FOR POLISHING PADS, AND RELATED METHODS

POLISHING SYSTEM WITH LOCAL AREA RATE CONTROL

MULTI-DISK CHEMICAL MECHANICAL POLISHING PAD CONDITIONERS AND METHODS

Polishing System with Front Side Pressure Control

Polishing System with Front Side Pressure Control

DAMPER FOR POLISHING PAD CONDITIONER

SYSTEMS AND METHODS FOR SUBSTRATE POLISHING END POINT DETECTION USI...

SYSTEMS AND METHODS FOR SUBSTRATE POLISHING END POINT DETECTION USI...