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Paul J. Rubel
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Santa Barbara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Eight spring dual substrate MEMS plate switch and method of manufac...
Patent number
11,305,982
Issue date
Apr 19, 2022
Innovative Micro Technology
Christopher S. Gudeman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thermocompression bonding with raised feature
Patent number
10,011,478
Issue date
Jul 3, 2018
Innovative Micro Technology
Christopher S. Gudeman
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Dual substrate electrostatic MEMS switch with multiple hinges and m...
Patent number
9,953,787
Issue date
Apr 24, 2018
Innovative Micro Technology
Christopher S. Gudeman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Eye drug delivery system
Patent number
8,808,256
Issue date
Aug 19, 2014
Johnson & Johnson Vision Care, Inc.
Stephen R. Beaton
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
In-plane electromagnetic MEMS pump
Patent number
8,690,830
Issue date
Apr 8, 2014
Innovative Micro Technology
Gregory A. Carlson
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Microfabicated electromagnetic actuator with push-pull motion
Patent number
8,608,700
Issue date
Dec 17, 2013
Innovative Micro Technology
Paul J. Rubel
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Dual substrate MEMS plate switch and method of manufacture
Patent number
8,264,307
Issue date
Sep 11, 2012
Innovative Micro Technology
John S. Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a hysteretic MEMS two-dimensional thermal d...
Patent number
8,245,391
Issue date
Aug 21, 2012
Innovative Micro Technology
Paul J. Rubel
F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information
Patent Grant
Hysteretic MEMS thermal device and method of manufacture
Patent number
7,944,113
Issue date
May 17, 2011
Innovative Micro Technology
Paul J. Rubel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for forming moveable features on a composite subs...
Patent number
7,785,913
Issue date
Aug 31, 2010
Innovative Micro Technology
John S. Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS thermal actuator and method of manufacture
Patent number
7,759,152
Issue date
Jul 20, 2010
Innovative Micro Technology
Gregory A. Carlson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Singly attached MEMS thermal device and method of manufacture
Patent number
7,724,121
Issue date
May 25, 2010
Innovative Micro Technology
Paul J. Rubel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Interconnect structure using through wafer vias and method of fabri...
Patent number
7,675,162
Issue date
Mar 9, 2010
Innovative Micro Technology
John S. Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Hysteretic MEMS two-dimensional thermal device and method of manufa...
Patent number
7,626,311
Issue date
Dec 1, 2009
Innovative Micro Technology
Paul J. Rubel
F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information
Patent Grant
MEMS thermal actuator and method of manufacture
Patent number
7,622,783
Issue date
Nov 24, 2009
Innovative Micro Technology
Gregory A. Carlson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hysteretic MEMS thermal device and method of manufacture
Patent number
7,548,145
Issue date
Jun 16, 2009
Innovative Micro Technology
Paul J. Rubel
F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information
Patent Grant
Dual substrate electrostatic MEMS switch with hermetic seal and met...
Patent number
7,528,691
Issue date
May 5, 2009
Innovative Micro Technology
Andrew D. Wallis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple switch MEMS structure and method of manufacture
Patent number
7,276,991
Issue date
Oct 2, 2007
Innovative Micro Technology
Paul J. Rubel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
MEMS actuator and method of manufacture for MEMS particle sorting d...
Patent number
7,229,838
Issue date
Jun 12, 2007
Innovative Micro Technology
John S. Foster
C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information
Patent Grant
Method and apparatus for sorting particles with a MEMS device
Patent number
7,220,594
Issue date
May 22, 2007
Innovative Micro Technology
John S. Foster
C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information
Patent Grant
MEMS teeter-totter apparatus with curved beam and method of manufac...
Patent number
7,210,352
Issue date
May 1, 2007
Innovative Micro Technology
John S. Foster
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for assembling an array of micro-devices
Patent number
7,141,080
Issue date
Nov 28, 2006
Innovative Micro Technology
Patrick E. Feierabend
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for assembling an array of micro-devices
Patent number
7,057,245
Issue date
Jun 6, 2006
Innovative Micro Technology
Patrick Edward Feierabend
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low inertia latching microactuator
Patent number
6,831,380
Issue date
Dec 14, 2004
Innovative Micro Technology
Tara Jean Rybnicek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for assembling an array of micro-devices
Patent number
6,812,061
Issue date
Nov 2, 2004
Innovative Micro Technology
Patrick Edward Feierabend
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical switch with low-inertia micromirror
Patent number
6,801,681
Issue date
Oct 5, 2004
Optical Coating Laboratory, Inc.
Patrick E. Feierabend
G02 - OPTICS
Information
Patent Grant
Optical cross-connect with magnetic micro-electro-mechanical actuat...
Patent number
6,785,038
Issue date
Aug 31, 2004
Optical Coating Laboratory, Inc.
Bryant P. Hichwa
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
EIGHT SPRING DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFAC...
Publication number
20210017017
Publication date
Jan 21, 2021
Innovative Micro Technology
Christopher S. GUDEMAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SHIELDED DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFACTURE
Publication number
20190333728
Publication date
Oct 31, 2019
Innovative Micro Technology
Christopher S. GUDEMAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THERMOCOMPRESSION BONDING WITH RAISED FEATURE
Publication number
20170334712
Publication date
Nov 23, 2017
Innovative Micro Technology
Christopher S. GUDEMAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE WITH SEPARATION LIMITING STANDOFF
Publication number
20170062165
Publication date
Mar 2, 2017
Innovative Micro Technology
Christopher S. GUDEMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMOCOMPRESSION BONDING WITH RAISED FEATURE
Publication number
20160343684
Publication date
Nov 24, 2016
Innovative Micro Technology
Christopher S. GUDEMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL SUBSTRATE ELECTROSTATIC MEMS SWITCH WITH MULTIPLE HINGES AND M...
Publication number
20160268084
Publication date
Sep 15, 2016
Innovative Micro Technology
Christopher S. GUDEMAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EYE DRUG DELIVERY SYSTEM
Publication number
20130184661
Publication date
Jul 18, 2013
Stephen R. Beaton
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
Microfabricated electromagnetic actuator with push-pull motion
Publication number
20120302946
Publication date
Nov 29, 2012
Innovative Micro Technology
Paul J. Rubel
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
In-plane electromagnetic mems pump
Publication number
20110295229
Publication date
Dec 1, 2011
Innovative Micro Technology
Gregory A. Carlson
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
Dual substrate MEMS plate switch and method of manufacture
Publication number
20110155548
Publication date
Jun 30, 2011
Innovative Micro Technology
John S. Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Hysteretic MEMS two-dimensional thermal device and method of manufa...
Publication number
20100018021
Publication date
Jan 28, 2010
Innovative Micro Technology
Paul J. Rubel
F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information
Patent Application
Hysteretic mems thermal device and method of manufacture
Publication number
20090201119
Publication date
Aug 13, 2009
Innovative Micro Technology
Paul J. Rubel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS thermal actuator and method of manufacture
Publication number
20090181488
Publication date
Jul 16, 2009
Innovative Micro Technology
Gregory A. Carlson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Micromechanical device with gold alloy contacts and method of manuf...
Publication number
20080250785
Publication date
Oct 16, 2008
Innovative Micro Technology
Gregory A. Carlson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS thermal actuator and method of manufacture
Publication number
20080191303
Publication date
Aug 14, 2008
Innovative Micro Technology
Gregory A. Carlson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Interconnect structure using through wafer vias and method of fabri...
Publication number
20080079120
Publication date
Apr 3, 2008
Innovative Micro Technology
John S. Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Singly attached MEMS thermal device and method of manufacture
Publication number
20080061913
Publication date
Mar 13, 2008
Innovative Micro Technology
Paul J. Rubel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Dual substrate electrostatic MEMS switch with hermetic seal and met...
Publication number
20070236313
Publication date
Oct 11, 2007
Innovative Micro Technology
Andrew D. Wallis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for forming moveable features on a composite subs...
Publication number
20070196998
Publication date
Aug 23, 2007
Innovative Micro Technology
John S. Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Hysteretic MEMS thermal device and method of manufacture
Publication number
20070170811
Publication date
Jul 26, 2007
Innovative Micro Technology
Paul J. Rubel
F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information
Patent Application
Hysteretic MEMS two-dimensional thermal device and method of manufa...
Publication number
20070163255
Publication date
Jul 19, 2007
Innovative Micro Technology
Paul J. Rubel
F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information
Patent Application
Apparatus and method for holding tortilla during cooking
Publication number
20070110866
Publication date
May 17, 2007
Paul J. Rubel
A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information
Patent Application
Compact MEMS thermal device and method of manufacture
Publication number
20070096860
Publication date
May 3, 2007
Innovative Micro Technology
John S. Foster
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multiple switch MEMS structure and method of manufacture
Publication number
20070057746
Publication date
Mar 15, 2007
Innovative Micro Technology
Paul J. Rubel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS teeter-totter apparatus with curved beam and method of manufac...
Publication number
20060277997
Publication date
Dec 14, 2006
Innovative Micro Technology
John S. Foster
G01 - MEASURING TESTING
Information
Patent Application
Antistiction MEMS substrate and method of manufacture
Publication number
20060278942
Publication date
Dec 14, 2006
Innovative Micro Technology
Paul J. Rubel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microfabricated cross flow filter and method of manufacture
Publication number
20060266692
Publication date
Nov 30, 2006
Innovative Micro Technology
John S. Foster
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
MEMS actuator and method of manufacture for MEMS particle sorting d...
Publication number
20060062698
Publication date
Mar 23, 2006
Innovative Micro Technology
John S. Foster
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
Method and apparatus for assembling an array of micro-devices
Publication number
20060063307
Publication date
Mar 23, 2006
Innovative Micro Technology
Patrick Edward Feierabend
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and apparatus for sorting particles with a MEMS device
Publication number
20050282151
Publication date
Dec 22, 2005
Innovative Micro Technology
John S. Foster
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE