Pavel Adamec

Person

Haar, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus, scanning electron microscope, and...
- Patent number 11,469,072
- Issue date Oct 11, 2022
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High performance inspection scanning electron microscope device and...
- Patent number 10,504,684
- Issue date Dec 10, 2019
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device, cold field emitter, and method for regenerati...
- Patent number 9,847,208
- Issue date Dec 19, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Housing device for magnetic shielding, housing arrangement for magn...
- Patent number 9,673,017
- Issue date Jun 6, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter for an electron beam, electron beam device and method for p...
- Patent number 9,633,815
- Issue date Apr 25, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam scanning electron beam device and methods of using the same
- Patent number 9,153,413
- Issue date Oct 6, 2015
- Applied Materials Israel, Ltd.
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High brightness electron gun, system using the same, and method of...
- Patent number 8,987,692
- Issue date Mar 24, 2015
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun arrangement
- Patent number 8,957,390
- Issue date Feb 17, 2015
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of pretreatment of an electron gun chamber
- Patent number 8,878,148
- Issue date Nov 4, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feedback loop for emitter flashing
- Patent number 8,674,300
- Issue date Mar 18, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi channel detector, optics therefor and method of operating the...
- Patent number 8,618,500
- Issue date Dec 31, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement and method for the contrast improvement in a charged pa...
- Patent number 8,530,837
- Issue date Sep 10, 2013
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement and method for the contrast improvement in a charged pa...
- Patent number 8,164,067
- Issue date Apr 24, 2012
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for improved alignment of a high brightness charg...
- Patent number 8,101,911
- Issue date Jan 24, 2012
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lens coil cooling of a magnetic lens
- Patent number 8,044,368
- Issue date Oct 25, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftecknik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and method for inspecting specimen
- Patent number 8,008,629
- Issue date Aug 30, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam current calibration system
- Patent number 7,982,179
- Issue date Jul 19, 2011
- ICT Intergrated Circuit Testing Gesellschaft für Halbeiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast wafer inspection system
- Patent number 7,932,495
- Issue date Apr 26, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple lens assembly and charged particle beam device comprising...
- Patent number 7,928,403
- Issue date Apr 19, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic lens assembly
- Patent number 7,928,405
- Issue date Apr 19, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Energy filter for cold field emission electron beam apparatus
- Patent number 7,919,749
- Issue date Apr 5, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Fang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic lens assembly
- Patent number 7,872,239
- Issue date Jan 18, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope having multiple detectors and a method...
- Patent number 7,847,267
- Issue date Dec 7, 2010
- Applied Materials Israel, Ltd.
- Dror Shemesh
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle detector assembly, charged particle beam apparatus...
- Patent number 7,842,930
- Issue date Nov 30, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for the examination of specimen
- Patent number 7,800,062
- Issue date Sep 21, 2010
- Applied Materials, Inc.
- Alex Goldenshtein
- G01 - MEASURING TESTING
Information Patent Grant
Asymmetric annular detector
- Patent number 7,659,514
- Issue date Feb 9, 2010
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imaging system with multi source array
- Patent number 7,638,777
- Issue date Dec 29, 2009
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Hans-Peter Feuerbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam emitting device and method for operating a ch...
- Patent number 7,595,490
- Issue date Sep 29, 2009
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Fang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron beam device
- Patent number 7,282,711
- Issue date Oct 16, 2007
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method for operating the same
- Patent number 7,274,018
- Issue date Sep 25, 2007
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON MICROSCOPE, ELECTRON SOURCE FOR ELECTRON MICROSCOPE, AND M...
- Publication number 20230197399
- Publication date Jun 22, 2023
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, SCANNING ELECTRON MICROSCOPE, AND...
- Publication number 20220262592
- Publication date Aug 18, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOUSING DEVICE FOR MAGNETIC SHIELDING, HOUSING ARRANGEMENT FOR MAGN...
- Publication number 20170148608
- Publication date May 25, 2017
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN ARRANGEMENT
- Publication number 20140264019
- Publication date Sep 18, 2014
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT SCAN DEFLECTOR AND METHOD OF MANUFACTURING THEREOF
- Publication number 20140264062
- Publication date Sep 18, 2014
- ICT Integrated Circuit Testing Gessellschaft fur Halbleiterpruftechnik GmbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH BRIGHTNESS ELECTRON GUN, SYSTEM USING THE SAME, AND METHOD OF...
- Publication number 20140264063
- Publication date Sep 18, 2014
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELEMENT FOR FAST MAGNETIC BEAM DEFLECTION
- Publication number 20130306863
- Publication date Nov 21, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHANNEL DETECTOR, OPTICS THEREFOR AND METHOD OF OPERATING THE...
- Publication number 20130270439
- Publication date Oct 17, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARRANGEMENT AND METHOD FOR THE CONTRAST IMPROVEMENT IN A CHARGED PA...
- Publication number 20120261573
- Publication date Oct 18, 2012
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FEEDBACK LOOP FOR EMITTER FLASHING
- Publication number 20110221360
- Publication date Sep 15, 2011
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT SEM TOOL
- Publication number 20110163229
- Publication date Jul 7, 2011
- APPLIED MATERIALS ISRAEL, LTD.
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF PRETREATMENT OF AN ELECTRON GUN CHAMBER
- Publication number 20110084219
- Publication date Apr 14, 2011
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT SEM TOOL
- Publication number 20100320382
- Publication date Dec 23, 2010
- APPLIED MATERIALS ISRAEL, LTD.
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARRANGEMENT AND METHOD FOR THE CONTRAST IMPROVEMENT IN A CHARGED PA...
- Publication number 20100200748
- Publication date Aug 12, 2010
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR IMPROVED ALIGNMENT OF A HIGH BRIGHTNESS CHARG...
- Publication number 20100108904
- Publication date May 6, 2010
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST WAFER INSPECTION SYSTEM
- Publication number 20100051804
- Publication date Mar 4, 2010
- ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM CURRENT CALIBRATION SYSTEM
- Publication number 20090200497
- Publication date Aug 13, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENERGY FILTER FOR COLD FIELD EMISSION ELECTRON BEAM APPARATUS
- Publication number 20090101819
- Publication date Apr 23, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- FANG ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC LENS ASSEMBLY
- Publication number 20090039280
- Publication date Feb 12, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC LENS ASSEMBLY
- Publication number 20090026384
- Publication date Jan 29, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMITTER CHAMBER, CHARGED PARTICAL APPARATUS AND METHOD FOR OPERATIN...
- Publication number 20080283745
- Publication date Nov 20, 2008
- ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GUN CHAMBER, CHARGED PARTICLE BEAM APPARATUS AND METHOD OF OPERATIN...
- Publication number 20080284332
- Publication date Nov 20, 2008
- ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LENS COIL COOLING OF A MAGNETIC LENS
- Publication number 20080224062
- Publication date Sep 18, 2008
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE DETECTOR ASSEMBLY, CHARGED PARTICLE BEAM APPARATUS...
- Publication number 20080191134
- Publication date Aug 14, 2008
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASYMMETRIC ANNULAR DETECTOR
- Publication number 20080061244
- Publication date Mar 13, 2008
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING SPECIMEN
- Publication number 20080048116
- Publication date Feb 28, 2008
- PAVEL ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM EMITTING DEVICE AND METHOD FOR OPERATING A CH...
- Publication number 20070158588
- Publication date Jul 12, 2007
- Fang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Protecting Aperture for Charged Particle Emitter
- Publication number 20070145303
- Publication date Jun 28, 2007
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Field emitter arrangement and method of cleansing an emitting surfa...
- Publication number 20070018562
- Publication date Jan 25, 2007
- ICT. INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTINUOUSLY CLEANING OF THE EMISSION SURFACE OF A COLD FIELD EMISS...
- Publication number 20070001574
- Publication date Jan 4, 2007
- FANG ZHOU
- H01 - BASIC ELECTRIC ELEMENTS

Pavel Adamec

Person

Patents Grantslast 30 patents

Charged particle beam apparatus, scanning electron microscope, and...

High performance inspection scanning electron microscope device and...

Electron beam device, cold field emitter, and method for regenerati...

Housing device for magnetic shielding, housing arrangement for magn...

Emitter for an electron beam, electron beam device and method for p...

Multi-beam scanning electron beam device and methods of using the same

High brightness electron gun, system using the same, and method of...

Electron gun arrangement

Method and apparatus of pretreatment of an electron gun chamber

Feedback loop for emitter flashing

Multi channel detector, optics therefor and method of operating the...

Arrangement and method for the contrast improvement in a charged pa...

Arrangement and method for the contrast improvement in a charged pa...

Method and device for improved alignment of a high brightness charg...

Lens coil cooling of a magnetic lens

Charged particle beam device and method for inspecting specimen

Beam current calibration system

Fast wafer inspection system

Multiple lens assembly and charged particle beam device comprising...

Magnetic lens assembly

Energy filter for cold field emission electron beam apparatus

Electrostatic lens assembly

Scanning electron microscope having multiple detectors and a method...

Charged particle detector assembly, charged particle beam apparatus...

Method and system for the examination of specimen

Asymmetric annular detector

Imaging system with multi source array

Charged particle beam emitting device and method for operating a ch...

Multiple electron beam device

Charged particle beam apparatus and method for operating the same

Patents Applicationslast 30 patents

ELECTRON MICROSCOPE, ELECTRON SOURCE FOR ELECTRON MICROSCOPE, AND M...

CHARGED PARTICLE BEAM APPARATUS, SCANNING ELECTRON MICROSCOPE, AND...

HOUSING DEVICE FOR MAGNETIC SHIELDING, HOUSING ARRANGEMENT FOR MAGN...

ELECTRON GUN ARRANGEMENT

HIGH THROUGHPUT SCAN DEFLECTOR AND METHOD OF MANUFACTURING THEREOF

HIGH BRIGHTNESS ELECTRON GUN, SYSTEM USING THE SAME, AND METHOD OF...

ELEMENT FOR FAST MAGNETIC BEAM DEFLECTION

MULTI CHANNEL DETECTOR, OPTICS THEREFOR AND METHOD OF OPERATING THE...

ARRANGEMENT AND METHOD FOR THE CONTRAST IMPROVEMENT IN A CHARGED PA...

FEEDBACK LOOP FOR EMITTER FLASHING

HIGH THROUGHPUT SEM TOOL

METHOD AND APPARATUS OF PRETREATMENT OF AN ELECTRON GUN CHAMBER

HIGH THROUGHPUT SEM TOOL

ARRANGEMENT AND METHOD FOR THE CONTRAST IMPROVEMENT IN A CHARGED PA...

METHOD AND DEVICE FOR IMPROVED ALIGNMENT OF A HIGH BRIGHTNESS CHARG...

FAST WAFER INSPECTION SYSTEM

BEAM CURRENT CALIBRATION SYSTEM

ENERGY FILTER FOR COLD FIELD EMISSION ELECTRON BEAM APPARATUS

MAGNETIC LENS ASSEMBLY

ELECTROSTATIC LENS ASSEMBLY

EMITTER CHAMBER, CHARGED PARTICAL APPARATUS AND METHOD FOR OPERATIN...

GUN CHAMBER, CHARGED PARTICLE BEAM APPARATUS AND METHOD OF OPERATIN...

LENS COIL COOLING OF A MAGNETIC LENS

CHARGED PARTICLE DETECTOR ASSEMBLY, CHARGED PARTICLE BEAM APPARATUS...

ASYMMETRIC ANNULAR DETECTOR

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING SPECIMEN

CHARGED PARTICLE BEAM EMITTING DEVICE AND METHOD FOR OPERATING A CH...

Protecting Aperture for Charged Particle Emitter

Field emitter arrangement and method of cleansing an emitting surfa...

CONTINUOUSLY CLEANING OF THE EMISSION SURFACE OF A COLD FIELD EMISS...