Peter Satitpunwaycha

Person

People

Patents Grantslast 30 patents

Information Patent Grant
System for multi-region processing
- Patent number 9,175,392
- Issue date Nov 3, 2015
- Intermolecular, Inc.
- Peter Satitpunwaycha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Masking method and apparatus
- Patent number 8,709,270
- Issue date Apr 29, 2014
- Intermolecular, Inc.
- Peter Satitpunwaycha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask etch processing apparatus
- Patent number 7,879,151
- Issue date Feb 1, 2011
- Applied Materials, Inc.
- Khiem Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combinatorial processing including rotation and movement within a r...
- Patent number 7,785,172
- Issue date Aug 31, 2010
- Intermolecular, Inc.
- Peter Satitpunwaycha
- B24 - GRINDING POLISHING
Information Patent Grant
Interferometer endpoint monitoring device
- Patent number 7,682,984
- Issue date Mar 23, 2010
- Applied Materials, Inc.
- Khiem K. Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask etch processing apparatus
- Patent number 7,128,806
- Issue date Oct 31, 2006
- Applied Materials, Inc.
- Khiem Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated PVD system for aluminum hole filling using ionized metal...
- Patent number 6,238,533
- Issue date May 29, 2001
- Applied Materials, Inc.
- Peter Satitpunwaycha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cathode assembly containing an electrostatic chuck for retaining a...
- Patent number 6,219,219
- Issue date Apr 17, 2001
- Applied Materials, Inc.
- Gilbert Hausmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF electrode contact assembly for a detachable electrostatic chuck
- Patent number 6,159,055
- Issue date Dec 12, 2000
- Applied Materials, Inc.
- Peter Satitpunwaycha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coil and coil feedthrough
- Patent number 6,139,679
- Issue date Oct 31, 2000
- Applied Materials, Inc.
- Peter Satitpunwaycha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aluminum hole filling method using ionized metal adhesion layer
- Patent number 6,045,666
- Issue date Apr 4, 2000
- Applied Materials, Inc.
- Peter Satitpunwaycha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PHOTOMASK PLASMA ETCHING
- Publication number 20140190632
- Publication date Jul 10, 2014
- Applied Materials, Inc.
- Ajay KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Cooled Sputter Apertured Shields
- Publication number 20140147593
- Publication date May 29, 2014
- Intermolecular, Inc.
- Peter Satitpunwaycha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Contactless Magnetically Driven Agitation Systems
- Publication number 20140133265
- Publication date May 15, 2014
- Intermolecular, Inc.
- Aaron T. Francis
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Masking Method and Apparatus
- Publication number 20130149868
- Publication date Jun 13, 2013
- Intermolecular, Inc.
- Peter Satitpunwaycha
- C40 - COMBINATORIAL CHEMISTRY
Information Patent Application
SUBSTRATE PROCESSING TOOL SHOWERHEAD
- Publication number 20130145989
- Publication date Jun 13, 2013
- Intermolecular, Inc.
- Peter Satitpunwaycha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CELL MOCVD APPARATUS
- Publication number 20130136862
- Publication date May 30, 2013
- Intermolecular, Inc.
- Peter Satitpunwaycha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR MULTI-REGION PROCESSING
- Publication number 20120321786
- Publication date Dec 20, 2012
- Intermolecular, Inc.
- Peter Satitpunwaycha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINATORIAL PROCESSING INCLUDING ROTATION AND MOVEMENT WITHIN A R...
- Publication number 20090047881
- Publication date Feb 19, 2009
- Peter Satitpunwaycha
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
INTERFEROMETER ENDPOINT MONITORING DEVICE
- Publication number 20070023393
- Publication date Feb 1, 2007
- Khiem K. Nguyen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PHOTOMASK PLASMA ETCHING
- Publication number 20070017898
- Publication date Jan 25, 2007
- Ajay Kumar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK ETCH PROCESSING APPARATUS
- Publication number 20070007660
- Publication date Jan 11, 2007
- Khiem Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for photomask plasma etching
- Publication number 20060000802
- Publication date Jan 5, 2006
- Ajay Kumar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Tuned potential pedestal for mask etch processing apparatus
- Publication number 20050133166
- Publication date Jun 23, 2005
- APPLIED MATERIALS, INC.
- Peter Satitpunwaycha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mask etch processing apparatus
- Publication number 20050082007
- Publication date Apr 21, 2005
- APPLIED MATERIALS, INC.
- Khiem Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interferometer endpoint monitoring device
- Publication number 20050067103
- Publication date Mar 31, 2005
- APPLIED MATERIALS, INC.
- Khiem K. Nguyen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for critical flow particle removal
- Publication number 20020096195
- Publication date Jul 25, 2002
- Applied Materials, Inc.
- Stefanie Harvey
- H01 - BASIC ELECTRIC ELEMENTS

Peter Satitpunwaycha

Person

Patents Grantslast 30 patents

System for multi-region processing

Masking method and apparatus

Mask etch processing apparatus

Combinatorial processing including rotation and movement within a r...

Interferometer endpoint monitoring device

Mask etch processing apparatus

Integrated PVD system for aluminum hole filling using ionized metal...

Cathode assembly containing an electrostatic chuck for retaining a...

RF electrode contact assembly for a detachable electrostatic chuck

Coil and coil feedthrough

Aluminum hole filling method using ionized metal adhesion layer

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR PHOTOMASK PLASMA ETCHING

Liquid Cooled Sputter Apertured Shields

Contactless Magnetically Driven Agitation Systems

Masking Method and Apparatus

SUBSTRATE PROCESSING TOOL SHOWERHEAD

MULTI-CELL MOCVD APPARATUS

SYSTEM FOR MULTI-REGION PROCESSING

COMBINATORIAL PROCESSING INCLUDING ROTATION AND MOVEMENT WITHIN A R...

INTERFEROMETER ENDPOINT MONITORING DEVICE

METHOD AND APPARATUS FOR PHOTOMASK PLASMA ETCHING

MASK ETCH PROCESSING APPARATUS

Method and apparatus for photomask plasma etching

Tuned potential pedestal for mask etch processing apparatus

Mask etch processing apparatus

Interferometer endpoint monitoring device

Method and apparatus for critical flow particle removal