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Rajinder DHINDSA
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Pleasanton, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-shape voltage pulse trains for uniformity and etch profile tu...
Patent number
12,255,051
Issue date
Mar 18, 2025
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated cleaning process for substrate etching
Patent number
12,255,055
Issue date
Mar 18, 2025
Applied Materials, Inc.
Yi Zhou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing assembly using pulsed-voltage and radio-frequency...
Patent number
12,237,148
Issue date
Feb 25, 2025
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lift pin mechanism
Patent number
12,211,734
Issue date
Jan 28, 2025
Applied Materials, Inc.
Alexander Sulyman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing chambers configured for tunable substrate and edg...
Patent number
12,142,469
Issue date
Nov 12, 2024
Applied Materials, Inc.
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer edge ring lifting solution
Patent number
12,094,752
Issue date
Sep 17, 2024
Applied Materials, Inc.
Michael R. Rice
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Feedback loop for controlling a pulsed voltage waveform
Patent number
12,057,292
Issue date
Aug 6, 2024
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sensors and system for in-situ edge ring erosion monitor
Patent number
12,009,236
Issue date
Jun 11, 2024
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma chamber and chamber component cleaning methods
Patent number
11,984,306
Issue date
May 14, 2024
Applied Materials, Inc.
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing using pulsed-voltage and radio-frequency power
Patent number
11,848,176
Issue date
Dec 19, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Delayed pulsing for plasma processing of wafers
Patent number
11,817,312
Issue date
Nov 14, 2023
Applied Materials, Inc.
Akhil Mehrotra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature and bias control of edge ring
Patent number
11,810,768
Issue date
Nov 7, 2023
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Confinement ring for use in a plasma processing system
Patent number
11,791,140
Issue date
Oct 17, 2023
Lam Research Corporation
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing assembly using pulsed-voltage and radio-frequency...
Patent number
11,776,789
Issue date
Oct 3, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Creating ion energy distribution functions (IEDF)
Patent number
11,728,124
Issue date
Aug 15, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Feedback loop for controlling a pulsed voltage waveform
Patent number
11,699,572
Issue date
Jul 11, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed plasma chamber in dual chamber configuration
Patent number
11,670,486
Issue date
Jun 6, 2023
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Condition selectable backside gas
Patent number
11,666,952
Issue date
Jun 6, 2023
Applied Materials, Inc.
Stephen D. Prouty
B08 - CLEANING
Information
Patent Grant
Apparatus and method for controlling edge ring variation
Patent number
11,668,553
Issue date
Jun 6, 2023
Applied Materials Inc.
Sathyendra Ghantasala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi zone gas injection upper electrode system
Patent number
11,594,400
Issue date
Feb 28, 2023
Lam Research Corporation
Ryan Bise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sheath and temperature control of a process kit in a substrate proc...
Patent number
11,551,916
Issue date
Jan 10, 2023
Applied Materials, Inc.
Jaeyong Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ deposition process
Patent number
11,521,849
Issue date
Dec 6, 2022
Applied Materials, Inc.
Sang Wook Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated cleaning process for substrate etching
Patent number
11,521,838
Issue date
Dec 6, 2022
Applied Materials, Inc.
Yi Zhou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High voltage filter assembly
Patent number
11,508,554
Issue date
Nov 22, 2022
Applied Materials, Inc.
Anurag Kumar Mishra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of enhancing etching selectivity using a pulsed plasma
Patent number
11,495,470
Issue date
Nov 8, 2022
Applied Materials, Inc.
Hailong Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,482,402
Issue date
Oct 25, 2022
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing assembly using pulsed-voltage and radio-frequency...
Patent number
11,462,388
Issue date
Oct 4, 2022
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed-voltage hardware assembly for use in a plasma processing system
Patent number
11,462,389
Issue date
Oct 4, 2022
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer edge ring lifting solution
Patent number
11,393,710
Issue date
Jul 19, 2022
Applied Materials, Inc.
Michael R. Rice
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Confinement ring for use in a plasma processing system
Patent number
11,342,166
Issue date
May 24, 2022
Lam Research Corporation
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WAFER EDGE RING LIFTING SOLUTION
Publication number
20240429088
Publication date
Dec 26, 2024
Applied Materials, Inc.
Michael R. RICE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FEEDBACK LOOP FOR CONTROLLING A PULSED VOLTAGE WAVEFORM
Publication number
20240395502
Publication date
Nov 28, 2024
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING
Publication number
20240355586
Publication date
Oct 24, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING
Publication number
20240355587
Publication date
Oct 24, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
Publication number
20240321610
Publication date
Sep 26, 2024
Applied Materials, Inc.
Yaoling PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-SHAPE VOLTAGE PULSE TRAINS FOR UNIFORMITY AND ETCH PROFILE TU...
Publication number
20240153741
Publication date
May 9, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK ASSEMBLY
Publication number
20240145220
Publication date
May 2, 2024
Applied Materials, Inc.
Jaeyong CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DELAYED PULSING FOR PLASMA PROCESSING OF WAFERS
Publication number
20240047195
Publication date
Feb 8, 2024
Applied Materials, Inc.
AKHIL MEHROTRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20240030002
Publication date
Jan 25, 2024
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE AND BIAS CONTROL OF EDGE RING
Publication number
20230360892
Publication date
Nov 9, 2023
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Creating Ion Energy Distribution Functions (IEDF)
Publication number
20230352264
Publication date
Nov 2, 2023
Applied Materials, Inc.
LEONID DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FEEDBACK LOOP FOR CONTROLLING A PULSED VOLTAGE WAVEFORM
Publication number
20230326717
Publication date
Oct 12, 2023
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION
Publication number
20230317412
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR CONTROLLING EDGE RING VARIATION
Publication number
20230280150
Publication date
Sep 7, 2023
Applied Materials, Inc.
Sathyendra GHANTASALA
G01 - MEASURING TESTING
Information
Patent Application
CONDITION SELECTABLE BACKSIDE GAS
Publication number
20230264238
Publication date
Aug 24, 2023
Applied Materials, Inc.
Stephen D. Prouty
B08 - CLEANING
Information
Patent Application
PLASMA CHAMBER WITH A MULTIPHASE ROTATING GAS CROSS-FLOW AND PERIPH...
Publication number
20230162950
Publication date
May 25, 2023
Applied Materials, Inc.
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING CHAMBERS CONFIGURED FOR TUNABLE SUBSTRATE AND EDG...
Publication number
20230132339
Publication date
Apr 27, 2023
Applied Materials, Inc.
Rajinder DHINDSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING CHAMBERS CONFIGURED FOR TUNABLE SUBSTRATE AND EDG...
Publication number
20230130986
Publication date
Apr 27, 2023
Applied Materials, Inc.
Rajinder DHINDSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING CHAMBERS CONFIGURED FOR TUNABLE SUBSTRATE AND EDG...
Publication number
20230130829
Publication date
Apr 27, 2023
Applied Materials, Inc.
Rajinder DHINDSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CLEANING PROCESS FOR SUBSTRATE ETCHING
Publication number
20230086917
Publication date
Mar 23, 2023
Applied Materials, Inc.
Yi Zhou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20230030927
Publication date
Feb 2, 2023
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CHAMBER AND CHAMBER COMPONENT CLEANING METHODS
Publication number
20220399194
Publication date
Dec 15, 2022
Applied Materials, Inc.
Rajinder DHINDSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CHAMBER AND CHAMBER COMPONENT CLEANING METHODS
Publication number
20220399185
Publication date
Dec 15, 2022
Applied Materials, Inc.
Rajinder DHINDSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO REDUCE FEATURE CHARGING IN PLASMA PROCESSIN...
Publication number
20220399183
Publication date
Dec 15, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO REDUCE FEATURE CHARGING IN PLASMA PROCESSIN...
Publication number
20220399186
Publication date
Dec 15, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ENHANCING ETCHING SELECTIVITY USING A PULSED PLASMA
Publication number
20220336222
Publication date
Oct 20, 2022
Applied Materials, Inc.
Hailong ZHOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER EDGE RING LIFTING SOLUTION
Publication number
20220319904
Publication date
Oct 6, 2022
Applied Materials, Inc.
Michael R. RICE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIFT PIN MECHANISM
Publication number
20220293452
Publication date
Sep 15, 2022
Alexander SULYMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Confinement Ring for Use in a Plasma Processing System
Publication number
20220254614
Publication date
Aug 11, 2022
LAM RESEARCH CORPORATION
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED-VOLTAGE HARDWARE ASSEMBLY FOR USE IN A PLASMA PROCESSING SYSTEM
Publication number
20220037120
Publication date
Feb 3, 2022
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS