Ralf Stuetzle

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for adjusting an illumination setting
- Patent number 9,690,203
- Issue date Jun 27, 2017
- Carl Zeiss SMT GmbH
- Joerg Zimmermann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catoptric illumination system for microlithography tool
- Patent number 9,588,434
- Issue date Mar 7, 2017
- Carl Zeiss SMT GmbH
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Component for setting a scan-integrated illumination energy in an o...
- Patent number 9,310,692
- Issue date Apr 12, 2016
- Carl Zeiss SMT GmbH
- Ralf Stuetzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for EUV microlithography
- Patent number 9,304,400
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Michael Layh
- G02 - OPTICS
Information Patent Grant
Illumination optical unit for microlithography
- Patent number 9,235,137
- Issue date Jan 12, 2016
- Carl Zeiss SMT GmbH
- Damian Fiolka
- G02 - OPTICS
Information Patent Grant
Illumination optical system for projection lithography
- Patent number 9,110,378
- Issue date Aug 18, 2015
- Carl Zeiss SMT GmbH
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optics for microlithography
- Patent number 8,937,708
- Issue date Jan 20, 2015
- Carl Zeiss SMT GmbH
- Martin Endres
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optics for EUV microlithography and related system and...
- Patent number 8,587,767
- Issue date Nov 19, 2013
- Carl Zeiss SMT GmbH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catoptric illumination system for microlithography tool
- Patent number 8,253,925
- Issue date Aug 28, 2012
- Carl Zeiss SMT GmbH
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjusting device with a laser light source and a reflector for alig...
- Patent number 8,179,519
- Issue date May 15, 2012
- Carl Zeiss SMT GmbH
- Ralf Stuetzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system for microlithography
- Patent number 8,174,677
- Issue date May 8, 2012
- Carl Zeiss SMT GmbH
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Collector for an illumination system
- Patent number 7,910,900
- Issue date Mar 22, 2011
- Carl Zeiss SMT GmbH
- Ralf Stuetzle
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ADJUSTING AN ILLUMINATION SETTING
- Publication number 20150153652
- Publication date Jun 4, 2015
- Carl Zeiss SMT GMBH
- Joerg Zimmermann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM FOR PROJECTION LITHOGRAPHY
- Publication number 20130250262
- Publication date Sep 26, 2013
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CATOPTRIC ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY TOOL
- Publication number 20120300185
- Publication date Nov 29, 2012
- Carl Zeiss SMT GMBH
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR MICROLITHOGRAPHY
- Publication number 20120162627
- Publication date Jun 28, 2012
- Carl Zeiss SMT GMBH
- Damian Fiolka
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY
- Publication number 20110235015
- Publication date Sep 29, 2011
- Carl Zeiss GmbH
- Guenther Dengel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR EUV MICROLITHOGRAPHY
- Publication number 20110177463
- Publication date Jul 21, 2011
- Carl Zeiss SMT GMBH
- Michael Layh
- G02 - OPTICS
Information Patent Application
COMPONENT FOR SETTING A SCAN-INTEGRATED ILLUMINATION ENERGY IN AN O...
- Publication number 20110096317
- Publication date Apr 28, 2011
- Carl Zeiss SMT GMBH
- Ralf Stuetzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY AND RELATED SYSTEM AND...
- Publication number 20110063598
- Publication date Mar 17, 2011
- Carl Zeiss SMT GMBH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICS FOR MICROLITHOGRAPHY
- Publication number 20100253926
- Publication date Oct 7, 2010
- Carl Zeiss SMT AG
- Martin Endres
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CATOPTRIC ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY TOOL
- Publication number 20090323044
- Publication date Dec 31, 2009
- Carl Zeiss SMT AG
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATING OPTICAL UNIT AND PROJECTION EXPOSURE APPARATUS FOR MIC...
- Publication number 20090251677
- Publication date Oct 8, 2009
- Carl Zeiss SMT AG
- Martin Endres
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20090091731
- Publication date Apr 9, 2009
- Carl Zeiss SMT AG
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADJUSTING DEVICE FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE INSTALL...
- Publication number 20080309907
- Publication date Dec 18, 2008
- Carl Zeiss SMT AG
- Ralf Stuetzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY
- Publication number 20080259303
- Publication date Oct 23, 2008
- Carl Zeiss SMT AG
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COLLECTOR FOR AN ILLUMINATION SYSTEM
- Publication number 20080018876
- Publication date Jan 24, 2008
- Carl Zeiss SMT AG
- Ralf Stuetzle
- G02 - OPTICS

Ralf Stuetzle

Person

Patents Grantslast 30 patents

Method for adjusting an illumination setting

Catoptric illumination system for microlithography tool

Component for setting a scan-integrated illumination energy in an o...

Illumination system for EUV microlithography

Illumination optical unit for microlithography

Illumination optical system for projection lithography

Illumination optics for microlithography

Illumination optics for EUV microlithography and related system and...

Catoptric illumination system for microlithography tool

Adjusting device with a laser light source and a reflector for alig...

Illumination optical system for microlithography

Collector for an illumination system

Patents Applicationslast 30 patents

METHOD FOR ADJUSTING AN ILLUMINATION SETTING

ILLUMINATION OPTICAL SYSTEM FOR PROJECTION LITHOGRAPHY

CATOPTRIC ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY TOOL

ILLUMINATION OPTICAL UNIT FOR MICROLITHOGRAPHY

ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR EUV MICROLITHOGRAPHY

COMPONENT FOR SETTING A SCAN-INTEGRATED ILLUMINATION ENERGY IN AN O...

ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY AND RELATED SYSTEM AND...

ILLUMINATION OPTICS FOR MICROLITHOGRAPHY

CATOPTRIC ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY TOOL

ILLUMINATING OPTICAL UNIT AND PROJECTION EXPOSURE APPARATUS FOR MIC...

ILLUMINATION OPTICAL SYSTEM FOR MICROLITHOGRAPHY

ADJUSTING DEVICE FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE INSTALL...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY

COLLECTOR FOR AN ILLUMINATION SYSTEM