Randy Harris

Person

Huntsville, UT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
- Patent number 11,935,771
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
- Patent number 11,935,770
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for post exposure processing of photoresist wa...
- Patent number 11,899,366
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for post exposure processing of photoresist wa...
- Patent number 11,112,697
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectronic substrate electro processing system
- Patent number 10,837,119
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Robert B. Moore
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for post exposure processing of photoresist wa...
- Patent number 10,474,033
- Issue date Nov 12, 2019
- Applied Materials, Inc.
- Viachslav Babayan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for wetting substrates
- Patent number 10,373,864
- Issue date Aug 6, 2019
- Applied Materials, Inc.
- Paul McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
System and method for simulating infrared (IR) light halos in a com...
- Patent number 10,249,078
- Issue date Apr 2, 2019
- Rockwell Collins, Inc.
- David A. Buckmiller
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for post exposure processing of photoresist wa...
- Patent number 10,203,604
- Issue date Feb 12, 2019
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer electroplating chuck assembly
- Patent number 10,174,437
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Microelectronic substrate electro processing system
- Patent number 10,087,544
- Issue date Oct 2, 2018
- Applied Materials, Inc.
- Robert B. Moore
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Wafer processing system with chuck assembly maintenance module
- Patent number 9,812,344
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Jason Rye
- B08 - CLEANING
Information Patent Grant
Electroplating apparatus with contact ring deplating
- Patent number 9,598,788
- Issue date Mar 21, 2017
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Microelectronic substrate electro processing system
- Patent number 9,399,827
- Issue date Jul 26, 2016
- Applied Materials, Inc.
- Robert B. Moore
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electroplating processor with geometric electrolyte flow path
- Patent number 8,968,533
- Issue date Mar 3, 2015
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Contact ring for an electrochemical processor
- Patent number 8,900,425
- Issue date Dec 2, 2014
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
High throughput semiconductor wafer processing
- Patent number 7,934,898
- Issue date May 3, 2011
- Semitool, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for processing a workpiece
- Patent number 7,849,865
- Issue date Dec 14, 2010
- Semitool, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for cleaning and drying a container for semico...
- Patent number 7,520,286
- Issue date Apr 21, 2009
- Semitool, Inc.
- Jeffry Alan Davis
- B08 - CLEANING
Information Patent Grant
Thermal wafer processor
- Patent number 7,371,998
- Issue date May 13, 2008
- Semitool, Inc.
- Randy A. Harris
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Integrated tool with interchangeable wet processing components for...
- Patent number 7,371,306
- Issue date May 13, 2008
- Semitool, Inc.
- Jeffry Alan Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End-effectors for handling microelectronic wafers
- Patent number 7,334,826
- Issue date Feb 26, 2008
- Semitool, Inc.
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End-effectors for handling microelectronic workpieces
- Patent number 7,281,741
- Issue date Oct 16, 2007
- Semitool, Inc.
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated tool with interchangeable wet processing components for...
- Patent number 7,198,694
- Issue date Apr 3, 2007
- Semitool, Inc.
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and method for transferring and/or pre-processing micro...
- Patent number 7,114,903
- Issue date Oct 3, 2006
- Semitool, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for manually and automatically processing microelectronic...
- Patent number 6,991,710
- Issue date Jan 31, 2006
- Semitool, Inc.
- Randy Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for securing microelectronic workpiece containers
- Patent number 6,969,841
- Issue date Nov 29, 2005
- Semitool, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing tools, components of processing tools, and method of mak...
- Patent number 6,921,467
- Issue date Jul 26, 2005
- Semitool, Inc.
- Kyle M. Hanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adaptable electrochemical processing chamber
- Patent number 6,916,412
- Issue date Jul 12, 2005
- Semitool, Inc.
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single workpiece processing system
- Patent number 6,900,132
- Issue date May 31, 2005
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...
- Publication number 20240194503
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Randy A. HARRIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...
- Publication number 20220262653
- Publication date Aug 18, 2022
- Randy A. HARRIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...
- Publication number 20220262652
- Publication date Aug 18, 2022
- Randy A. HARRIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...
- Publication number 20220004104
- Publication date Jan 6, 2022
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...
- Publication number 20190187563
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Viachslav Babayan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROELECTRONIC SUBSTRATE ELECTRO PROCESSING SYSTEM
- Publication number 20180298513
- Publication date Oct 18, 2018
- Applied Materials, Inc.
- Robert B. Moore
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SYSTEMS AND METHODS FOR WETTING SUBSTRATES
- Publication number 20180182664
- Publication date Jun 28, 2018
- Applied Materials, Inc.
- Paul McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...
- Publication number 20170363960
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...
- Publication number 20170154797
- Publication date Jun 1, 2017
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER ELECTROPLATING CHUCK ASSEMBLY
- Publication number 20170009367
- Publication date Jan 12, 2017
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
MICROELECTRONIC SUBSTRATE ELECTRO PROCESSING SYSTEM
- Publication number 20160298255
- Publication date Oct 13, 2016
- Applied Materials, Inc.
- Robert B. Moore
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING WITH REDUCED AIR BUBBLE DEFECTS
- Publication number 20160237584
- Publication date Aug 18, 2016
- Applied Materials, Inc.
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
WAFER PROCESSING SYSTEM WITH CHUCK ASSEMBLY MAINTENANCE MODULE
- Publication number 20160225656
- Publication date Aug 4, 2016
- Applied Materials, Inc.
- Jason Rye
- B08 - CLEANING
Information Patent Application
ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH
- Publication number 20150075976
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
MICROELECTRONIC SUBSTRATE ELECTRO PROCESSING SYSTEM
- Publication number 20140318977
- Publication date Oct 30, 2014
- Robert B. Moore
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING PROCESSOR WITH VACUUM ROTOR
- Publication number 20140262795
- Publication date Sep 18, 2014
- Nolan L. Zimmerman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING APPARATUS WITH CONTACT RING DEPLATING
- Publication number 20140083862
- Publication date Mar 27, 2014
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH
- Publication number 20130299343
- Publication date Nov 14, 2013
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CONTACT RING FOR AN ELECTROCHEMICAL PROCESSOR
- Publication number 20130134035
- Publication date May 30, 2013
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
HIGH THROUGHPUT SEMICONDUCTOR WAFER PROCESSING
- Publication number 20090024244
- Publication date Jan 22, 2009
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE LOADING SYSTEM
- Publication number 20090022574
- Publication date Jan 22, 2009
- Steve L. Eudy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR PROCESSING A WORKPIECE
- Publication number 20080163898
- Publication date Jul 10, 2008
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL WAFER PROCESSOR
- Publication number 20080006617
- Publication date Jan 10, 2008
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for cleaning and drying a container for semico...
- Publication number 20070125404
- Publication date Jun 7, 2007
- Semitool, Inc.
- Jeffry Alan Davis
- B08 - CLEANING
Information Patent Application
End-effectors for handling microelectronic workpieces
- Publication number 20070104559
- Publication date May 10, 2007
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
End-effectors and associated control and guidance systems and methods
- Publication number 20070014656
- Publication date Jan 18, 2007
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular tool unit for processing of microfeature workpieces
- Publication number 20060045666
- Publication date Mar 2, 2006
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing tools, components of processing tools, and method of mak...
- Publication number 20060037855
- Publication date Feb 23, 2006
- Kyle M. Hanson
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Modular tool unit for processing microelectronic workpieces
- Publication number 20060009047
- Publication date Jan 12, 2006
- Paul Zachary Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adaptable electrochemical processing chamber
- Publication number 20050155864
- Publication date Jul 21, 2005
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Randy Harris

Person

Patents Grantslast 30 patents

Modular mainframe layout for supporting multiple semiconductor proc...

Modular mainframe layout for supporting multiple semiconductor proc...

Method and apparatus for post exposure processing of photoresist wa...

Method and apparatus for post exposure processing of photoresist wa...

Microelectronic substrate electro processing system

Method and apparatus for post exposure processing of photoresist wa...

Systems and methods for wetting substrates

System and method for simulating infrared (IR) light halos in a com...

Method and apparatus for post exposure processing of photoresist wa...

Wafer electroplating chuck assembly

Microelectronic substrate electro processing system

Wafer processing system with chuck assembly maintenance module

Electroplating apparatus with contact ring deplating

Microelectronic substrate electro processing system

Electroplating processor with geometric electrolyte flow path

Contact ring for an electrochemical processor

High throughput semiconductor wafer processing

System for processing a workpiece

Apparatus and method for cleaning and drying a container for semico...

Thermal wafer processor

Integrated tool with interchangeable wet processing components for...

End-effectors for handling microelectronic wafers

End-effectors for handling microelectronic workpieces

Integrated tool with interchangeable wet processing components for...

Apparatuses and method for transferring and/or pre-processing micro...

Apparatus for manually and automatically processing microelectronic...

Method and apparatus for securing microelectronic workpiece containers

Processing tools, components of processing tools, and method of mak...

Adaptable electrochemical processing chamber

Single workpiece processing system

Patents Applicationslast 30 patents

MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...

MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...

MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...

METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...

METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...

MICROELECTRONIC SUBSTRATE ELECTRO PROCESSING SYSTEM

SYSTEMS AND METHODS FOR WETTING SUBSTRATES

METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...

METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...

WAFER ELECTROPLATING CHUCK ASSEMBLY

MICROELECTRONIC SUBSTRATE ELECTRO PROCESSING SYSTEM

ELECTROPLATING WITH REDUCED AIR BUBBLE DEFECTS

WAFER PROCESSING SYSTEM WITH CHUCK ASSEMBLY MAINTENANCE MODULE

ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH

MICROELECTRONIC SUBSTRATE ELECTRO PROCESSING SYSTEM

ELECTROPLATING PROCESSOR WITH VACUUM ROTOR

ELECTROPLATING APPARATUS WITH CONTACT RING DEPLATING

ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH

CONTACT RING FOR AN ELECTROCHEMICAL PROCESSOR

HIGH THROUGHPUT SEMICONDUCTOR WAFER PROCESSING

WORKPIECE LOADING SYSTEM

SYSTEM FOR PROCESSING A WORKPIECE

THERMAL WAFER PROCESSOR

Apparatus and method for cleaning and drying a container for semico...

End-effectors for handling microelectronic workpieces

End-effectors and associated control and guidance systems and methods

Modular tool unit for processing of microfeature workpieces

Processing tools, components of processing tools, and method of mak...

Modular tool unit for processing microelectronic workpieces

Adaptable electrochemical processing chamber