Randy J. Shul

Person

Albuquerque, NM, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma-based method for delayering of circuits
- Patent number 11,664,238
- Issue date May 30, 2023
- National Technology & Engineering Solutions of Sandia, LLC
- Randy J. Shul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for interferometric end point detection for a f...
- Patent number 10,446,369
- Issue date Oct 15, 2019
- National Technology & Engineering Solutions of Sandia, LLC
- Brian Scott Phillips
- G01 - MEASURING TESTING
Information Patent Grant
Lateral vias for connections to buried microconductors and methods...
- Patent number 10,262,931
- Issue date Apr 16, 2019
- National Technology & Engineering Solutions of Sandia, LLC
- David P. Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for simultaneous modification of multiple semiconductor devi...
- Patent number 10,217,704
- Issue date Feb 26, 2019
- National Technology & Engineering Solutions of Sandia, LLC
- Randy J. Shul
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lateral vias for connections to buried microconductors
- Patent number 9,972,565
- Issue date May 15, 2018
- National Technology & Engineering Solutions of Sandia, LLC
- David P. Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS packaging with etching and thinning of lid wafer to form lids...
- Patent number 8,597,985
- Issue date Dec 3, 2013
- Sandia Corporation
- Rajen Chanchani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Die singulation method and package formed thereby
- Patent number 8,236,611
- Issue date Aug 7, 2012
- Sandia Corporation
- Robert C. Anderson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectromechanical safing and arming apparatus
- Patent number 7,383,774
- Issue date Jun 10, 2008
- Sandia Corporation
- David R. Koehler
- F42 - AMMUNITION BLASTING
Information Patent Grant
Microelectromechanical acceleration-sensing apparatus
- Patent number 7,148,436
- Issue date Dec 12, 2006
- Sandia Corporation
- Robb M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to control artifacts of microstructural fabrication
- Patent number 7,105,098
- Issue date Sep 12, 2006
- Sandia Corporation
- Randy J. Shul
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical safing and arming apparatus
- Patent number 7,051,656
- Issue date May 30, 2006
- Sandia Corporation
- David R. Koehler
- F42 - AMMUNITION BLASTING
Information Patent Grant
Method to fabricate multi-level silicon-based microstructures via u...
- Patent number 6,930,051
- Issue date Aug 16, 2005
- Sandia Corporation
- Ronald P. Manginell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for chemical sensing using a microfabricated teeter-totter r...
- Patent number 6,823,720
- Issue date Nov 30, 2004
- Sandia Corporation
- Douglas Ray Adkins
- G01 - MEASURING TESTING
Information Patent Grant
Microfabricated teeter-totter resonator
- Patent number 6,820,469
- Issue date Nov 23, 2004
- Sandia Corporation
- Douglas Ray Adkins
- G01 - MEASURING TESTING
Information Patent Grant
Process for manufacture of semipermeable silicon nitride membranes
- Patent number 6,660,648
- Issue date Dec 9, 2003
- Sandia Corporation
- Paul Charles Galambos
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface micromachined structure fabrication methods for a fluid eje...
- Patent number 6,472,332
- Issue date Oct 29, 2002
- Xerox Corporation
- Arthur M. Gooray
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for fabricating a microbattery
- Patent number 6,432,577
- Issue date Aug 13, 2002
- Sandia Corporation
- Randy J. Shul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gallium nitride junction field-effect transistor
- Patent number 5,866,925
- Issue date Feb 2, 1999
- Sandia Corporation
- John C. Zolper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for dry etching of transition metals
- Patent number 5,814,238
- Issue date Sep 29, 1998
- Sandia Corporation
- Carol I. H. Ashby
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching method for compound semiconductors
- Patent number 5,624,529
- Issue date Apr 29, 1997
- Sandia Corporation
- Randy J. Shul
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PLASMA-BASED METHOD FOR DELAYERING OF CIRCUITS
- Publication number 20230223273
- Publication date Jul 13, 2023
- National Technology & Engineering Solutions of Sandia, LLC
- Randy J. Shul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LATERAL VIAS FOR CONNECTIONS TO BURIED MICROCONDUCTORS AND METHODS...
- Publication number 20180269143
- Publication date Sep 20, 2018
- National Technology & Engineering Solutions of Sandia, LLC
- David P. Adams
- H01 - BASIC ELECTRIC ELEMENTS

Randy J. Shul

Person

Patents Grantslast 30 patents

Plasma-based method for delayering of circuits

Systems and methods for interferometric end point detection for a f...

Lateral vias for connections to buried microconductors and methods...

Method for simultaneous modification of multiple semiconductor devi...

Lateral vias for connections to buried microconductors

MEMS packaging with etching and thinning of lid wafer to form lids...

Die singulation method and package formed thereby

Microelectromechanical safing and arming apparatus

Microelectromechanical acceleration-sensing apparatus

Method to control artifacts of microstructural fabrication

Microelectromechanical safing and arming apparatus

Method to fabricate multi-level silicon-based microstructures via u...

Method for chemical sensing using a microfabricated teeter-totter r...

Microfabricated teeter-totter resonator

Process for manufacture of semipermeable silicon nitride membranes

Surface micromachined structure fabrication methods for a fluid eje...

Apparatus and method for fabricating a microbattery

Gallium nitride junction field-effect transistor

Method for dry etching of transition metals

Dry etching method for compound semiconductors

Patents Applicationslast 30 patents

PLASMA-BASED METHOD FOR DELAYERING OF CIRCUITS

LATERAL VIAS FOR CONNECTIONS TO BURIED MICROCONDUCTORS AND METHODS...