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Ravi Vellanki
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Preventing deposition on pedestal in semiconductor substrate proces...
Patent number
11,725,285
Issue date
Aug 15, 2023
Lam Research Corporation
Vinayakaraddy Gulabal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for removing post-etch residues and other adhe...
Patent number
6,333,268
Issue date
Dec 25, 2001
Novellus Systems, Inc.
Vladimir Starov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
TUNGSTEN WORDLINE FILL IN HIGH ASPECT RATIO 3D NAND ARCHITECTURE
Publication number
20240249949
Publication date
Jul 25, 2024
LAM RESEARCH CORPORATION
Erica Maxine Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHADOW RING ALIGNMENT FOR SUBSTRATE SUPPORT
Publication number
20240203703
Publication date
Jun 20, 2024
LAM RESEARCH CORPORATION
Vinayakaraddy GULABAL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONDUCTIVE COOLING OF A LOW TEMPERATURE PEDESTAL OPERATING IN A HIG...
Publication number
20240175134
Publication date
May 30, 2024
LAM RESEARCH CORPORATION
Gary B. LIND
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EXCLUSION RING FOR SUBSTRATE PROCESSING
Publication number
20230260814
Publication date
Aug 17, 2023
LAM RESEARCH CORPORATION
Vinayakaraddy Gulabal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PERFORMANCE PREDICTORS FOR SEMICONDUCTOR-MANUFACTURING PROCESSES
Publication number
20230049157
Publication date
Feb 16, 2023
LAM RESEARCH CORPORATION
Kapil Umesh Sawlani
G05 - CONTROLLING REGULATING
Information
Patent Application
EXCLUSION RING WITH FLOW PATHS FOR EXHAUSTING WAFER EDGE GAS
Publication number
20230040885
Publication date
Feb 9, 2023
LAM RESEARCH CORPORATION
Vinayakaraddy Gulabal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING CHUCKS FEATURING RECESSED REGIONS NEAR OUT...
Publication number
20230010049
Publication date
Jan 12, 2023
LAM RESEARCH CORPORATION
Ravi Vellanki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METAL DEPOSITION
Publication number
20220290300
Publication date
Sep 15, 2022
LAM RESEARCH CORPORATION
Ravi Vellanki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCES...
Publication number
20210230749
Publication date
Jul 29, 2021
LAM RESEARCH CORPORATION
Vinayakaraddy GULABAL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHOTOVOLTAIC MODULE CONFIGURATION
Publication number
20100319754
Publication date
Dec 23, 2010
Basha S. Sajjad
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...