Richard A. Farrell

Person

Albany, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming a narrow trench
- Patent number 11,841,617
- Issue date Dec 12, 2023
- Tokyo Electron Limited
- Anton J. Devilliers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for pitch split patterning using sidewall image transfer
- Patent number 11,676,817
- Issue date Jun 13, 2023
- Tokyo Electron Limited
- Akiteru Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for globally adjusting spacer critical dimension using photo...
- Patent number 11,567,407
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Richard Farrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platform and method of operating for integrated end-to-end self-ali...
- Patent number 11,398,379
- Issue date Jul 26, 2022
- Tokyo Electron Limited
- Robert Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for inhibiting detectivity, metal particle cont...
- Patent number 11,043,378
- Issue date Jun 22, 2021
- Tokyo Electron Limited
- Corey Lemley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition process
- Patent number 10,978,307
- Issue date Apr 13, 2021
- Tokyo Electron Limited
- David O'Meara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platform and method of operating for integrated end-to-end self-ali...
- Patent number 10,727,057
- Issue date Jul 28, 2020
- Tokyo Electron Limited
- Robert Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical nanowires formed on upper fin surface
- Patent number 10,685,847
- Issue date Jun 16, 2020
- GLOBALFOUNDRIES Inc.
- Steven Bentley
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for fully self-aligned via formation using a directed self a...
- Patent number 10,319,637
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Nihar Mohanty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple directed self-assembly material mask patterning for formin...
- Patent number 10,186,577
- Issue date Jan 22, 2019
- GLOBALFOUNDRIES Inc.
- Steven Bentley
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods of spin-on deposition of metal oxides
- Patent number 10,141,183
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Nihar Mohanty
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Directed self-assembly material etch mask for forming vertical nano...
- Patent number 9,865,682
- Issue date Jan 9, 2018
- GLOBALFOUNDRIES Inc.
- Steven Bentley
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Directed self-assembly material growth mask for forming vertical na...
- Patent number 9,698,025
- Issue date Jul 4, 2017
- GLOBALFOUNDRIES Inc.
- Steven Bentley
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods for fabricating integrated circuits using directed self-ass...
- Patent number 9,613,807
- Issue date Apr 4, 2017
- GLOBALFOUNDRIES, INC.
- Ji Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for fabricating integrated circuits using multi-patterning...
- Patent number 9,530,689
- Issue date Dec 27, 2016
- GLOBALFOUNDRIES, INC.
- Deniz Elizabeth Civay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sidewall image templates for directed self-assembly materials
- Patent number 9,508,562
- Issue date Nov 29, 2016
- GLOBALFOUNDRIES Inc.
- Ji Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multilayer pattern transfer for chemical guides
- Patent number 9,478,506
- Issue date Oct 25, 2016
- GLOBALFOUNDRIES Inc.
- Richard A. Farrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for fabricating guide patterns and methods for fabricating...
- Patent number 9,455,154
- Issue date Sep 27, 2016
- GLOBALFOUNDRIES, INC.
- Gerard M. Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for fabricating integrated circuits using directed self-ass...
- Patent number 9,275,896
- Issue date Mar 1, 2016
- GLOBALFOUNDRIES, INC.
- Deniz Elizabeth Civay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming a masking layer for patterning underlying struct...
- Patent number 8,969,207
- Issue date Mar 3, 2015
- GLOBALFOUNDRIES Inc.
- Gerard M. Schmid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming trench/via features in an underlying structure u...
- Patent number 8,906,802
- Issue date Dec 9, 2014
- GLOBALFOUNDRIES Inc.
- Jeremy A. Wahl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimizing lithographic processes using laser annealing techniques
- Patent number 8,889,343
- Issue date Nov 18, 2014
- GLOBALFOUNDRIES Inc.
- Moshe E Preil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for fabricating integrated circuits including formation of...
- Patent number 8,853,101
- Issue date Oct 7, 2014
- GLOBALFOUNDRIES, INC.
- Richard A. Farrell
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BILAYER BINARY 2D GRATINGS FOR WAVEGUIDE DISPLAY
- Publication number 20240329290
- Publication date Oct 3, 2024
- Meta Platforms Technologies, LLC
- Richard Farrell
- G02 - OPTICS
Information Patent Application
ADVANCED OPTICAL MATERIALS AND STRUCTURES
- Publication number 20240295763
- Publication date Sep 5, 2024
- Meta Platforms Technologies, LLC
- Kenneth Alexander Diest
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
3D PRINT MICROSTRUCTURES FOR AR WAVEGUIDE PACKAGING AND PROTECTION
- Publication number 20240142694
- Publication date May 2, 2024
- Meta Platforms Technologies, LLC
- Rongzhi HUANG
- G02 - OPTICS
Information Patent Application
SHOCK ABSORBERS IN AN OPTICAL ASSEMBLY FOR A WEARABLE DISPLAY DEVICE
- Publication number 20240019703
- Publication date Jan 18, 2024
- Meta Platforms Technologies, LLC
- Richard FARRELL
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
TUNABLE SHRINKAGE AND TRIM PROCESS FOR FABRICATING GRATINGS
- Publication number 20230160820
- Publication date May 25, 2023
- Meta Platforms Technologies, LLC
- Austin LANE
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS OF MAKING POLYMERIC OPTICAL LAYERS FOR OPTICAL...
- Publication number 20230125794
- Publication date Apr 27, 2023
- Meta Platforms Technologies, LLC
- Marvin Dion Alim
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SELECTIVE DEPOSITION/PATTERNING FOR LAYERED WAVEGUIDE FABRICATION
- Publication number 20230037929
- Publication date Feb 9, 2023
- Meta Platforms Technologies, LLC
- Austin LANE
- G02 - OPTICS
Information Patent Application
DIRECTED SELF-ASSEMBLY
- Publication number 20220236639
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Lior Huli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PITCH SPLIT PATTERNING USING SIDEWALL IMAGE TRANSFER
- Publication number 20210407804
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Akiteru Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A NARROW TRENCH
- Publication number 20210088904
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Anton J. DEVILLIERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION PROCESS
- Publication number 20210057226
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- David O'Meara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR INHIBITING DEFECTIVITY, METAL PARTICLE CONT...
- Publication number 20200152453
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Corey LEMLEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR GLOBALLY ADJUSTING SPACER CRITICAL DIMENSION USING PHOTO...
- Publication number 20200103755
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Richard FARRELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATFORM AND METHOD OF OPERATING FOR INTEGRATED END-TO-END SELF-ALI...
- Publication number 20190295846
- Publication date Sep 26, 2019
- TOKYO ELECTRON LIMITED
- Robert Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATFORM AND METHOD OF OPERATING FOR INTEGRATED END-TO-END SELF-ALI...
- Publication number 20190295906
- Publication date Sep 26, 2019
- TOKYO ELECTRON LIMITED
- Robert Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Self-Aligned Triple Patterning Process Utilizing Organic Spacers
- Publication number 20180323061
- Publication date Nov 8, 2018
- TOKYO ELECTRON LIMITED
- Angelique D. Raley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Regulating Hardmask Over-Etch for Multi-Patterning Proce...
- Publication number 20180138078
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Richard Farrell
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR FULLY SELF-ALIGNED VIA FORMATION USING A DIRECTED SELF A...
- Publication number 20180130708
- Publication date May 10, 2018
- TOKYO ELECTRON LIMITED
- Nihar Mohanty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL NANOWIRES FORMED ON UPPER FIN SURFACE
- Publication number 20170263465
- Publication date Sep 14, 2017
- GLOBALFOUNDRIES INC.
- Steven Bentley
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods of Spin-on Deposition of Metal Oxides
- Publication number 20170221704
- Publication date Aug 3, 2017
- TOKYO ELECTRON LIMITED
- Nihar Mohanty
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS USING MULTI-PATTERNING...
- Publication number 20160300754
- Publication date Oct 13, 2016
- GLOBALFOUNDRIES, Inc.
- Deniz Elizabeth Civay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTED SELF-ASSEMBLY MATERIAL ETCH MASK FOR FORMING VERTICAL NANO...
- Publication number 20160071929
- Publication date Mar 10, 2016
- GLOBAL FOUNDRIES Inc.
- Steven Bentley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE DIRECTED SELF-ASSEMBLY MATERIAL MASK PATTERNING FOR FORMIN...
- Publication number 20160071930
- Publication date Mar 10, 2016
- GLOBALFOUNDRIES INC.
- Steven Bentley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTED SELF-ASSEMBLY MATERIAL GROWTH MASK FOR FORMING VERTICAL NA...
- Publication number 20160071845
- Publication date Mar 10, 2016
- GLOBALFOUNDRIES Inc.
- Steven Bentley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS USING DIRECTED SELF-ASS...
- Publication number 20160035565
- Publication date Feb 4, 2016
- GLOBALFOUNDRIES, Inc.
- Ji Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS USING DIRECTED SELF-ASS...
- Publication number 20160027685
- Publication date Jan 28, 2016
- GLOBAL FOUNDRIES, INC.
- Deniz Elizabeth Civay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDEWALL IMAGE TEMPLATES FOR DIRECTED SELF-ASSEMBLY MATERIALS
- Publication number 20150380252
- Publication date Dec 31, 2015
- GLOBALFOUNDRIES INC.
- Ji Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS INCLUDING SURFACE TREAT...
- Publication number 20150303055
- Publication date Oct 22, 2015
- GLOBALFOUNDRIES, Inc.
- Ji Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTED SELF-ASSEMBLY (DSA) FORMULATIONS USED TO FORM DSA-BASED LI...
- Publication number 20140377965
- Publication date Dec 25, 2014
- Gerard M. Schmid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING TRENCH/VIA FEATURES IN AN UNDERLYING STRUCTURE U...
- Publication number 20140273469
- Publication date Sep 18, 2014
- Jeremy A. Wahl
- H01 - BASIC ELECTRIC ELEMENTS

Richard A. Farrell

Person

Patents Grantslast 30 patents

Method of forming a narrow trench

Method for pitch split patterning using sidewall image transfer

Method for globally adjusting spacer critical dimension using photo...

Platform and method of operating for integrated end-to-end self-ali...

Systems and methods for inhibiting detectivity, metal particle cont...

Deposition process

Platform and method of operating for integrated end-to-end self-ali...

Vertical nanowires formed on upper fin surface

Method for fully self-aligned via formation using a directed self a...

Multiple directed self-assembly material mask patterning for formin...

Methods of spin-on deposition of metal oxides

Directed self-assembly material etch mask for forming vertical nano...

Directed self-assembly material growth mask for forming vertical na...

Methods for fabricating integrated circuits using directed self-ass...

Methods for fabricating integrated circuits using multi-patterning...

Sidewall image templates for directed self-assembly materials

Multilayer pattern transfer for chemical guides

Methods for fabricating guide patterns and methods for fabricating...

Methods for fabricating integrated circuits using directed self-ass...

Methods of forming a masking layer for patterning underlying struct...

Methods of forming trench/via features in an underlying structure u...

Optimizing lithographic processes using laser annealing techniques

Methods for fabricating integrated circuits including formation of...

Patents Applicationslast 30 patents

BILAYER BINARY 2D GRATINGS FOR WAVEGUIDE DISPLAY

ADVANCED OPTICAL MATERIALS AND STRUCTURES

3D PRINT MICROSTRUCTURES FOR AR WAVEGUIDE PACKAGING AND PROTECTION

SHOCK ABSORBERS IN AN OPTICAL ASSEMBLY FOR A WEARABLE DISPLAY DEVICE

TUNABLE SHRINKAGE AND TRIM PROCESS FOR FABRICATING GRATINGS

SYSTEMS AND METHODS OF MAKING POLYMERIC OPTICAL LAYERS FOR OPTICAL...

SELECTIVE DEPOSITION/PATTERNING FOR LAYERED WAVEGUIDE FABRICATION

DIRECTED SELF-ASSEMBLY

METHOD FOR PITCH SPLIT PATTERNING USING SIDEWALL IMAGE TRANSFER

METHOD OF FORMING A NARROW TRENCH

DEPOSITION PROCESS

SYSTEMS AND METHODS FOR INHIBITING DEFECTIVITY, METAL PARTICLE CONT...

METHOD FOR GLOBALLY ADJUSTING SPACER CRITICAL DIMENSION USING PHOTO...

PLATFORM AND METHOD OF OPERATING FOR INTEGRATED END-TO-END SELF-ALI...

PLATFORM AND METHOD OF OPERATING FOR INTEGRATED END-TO-END SELF-ALI...

Self-Aligned Triple Patterning Process Utilizing Organic Spacers

Method for Regulating Hardmask Over-Etch for Multi-Patterning Proce...

METHOD FOR FULLY SELF-ALIGNED VIA FORMATION USING A DIRECTED SELF A...

VERTICAL NANOWIRES FORMED ON UPPER FIN SURFACE

Methods of Spin-on Deposition of Metal Oxides

METHODS FOR FABRICATING INTEGRATED CIRCUITS USING MULTI-PATTERNING...

DIRECTED SELF-ASSEMBLY MATERIAL ETCH MASK FOR FORMING VERTICAL NANO...

MULTIPLE DIRECTED SELF-ASSEMBLY MATERIAL MASK PATTERNING FOR FORMIN...

DIRECTED SELF-ASSEMBLY MATERIAL GROWTH MASK FOR FORMING VERTICAL NA...

METHODS FOR FABRICATING INTEGRATED CIRCUITS USING DIRECTED SELF-ASS...

METHODS FOR FABRICATING INTEGRATED CIRCUITS USING DIRECTED SELF-ASS...

SIDEWALL IMAGE TEMPLATES FOR DIRECTED SELF-ASSEMBLY MATERIALS

METHODS FOR FABRICATING INTEGRATED CIRCUITS INCLUDING SURFACE TREAT...

DIRECTED SELF-ASSEMBLY (DSA) FORMULATIONS USED TO FORM DSA-BASED LI...

METHODS OF FORMING TRENCH/VIA FEATURES IN AN UNDERLYING STRUCTURE U...