Richard Allen Hogle

Person

People

Patents Grantslast 30 patents

Information Patent Grant
Method of treating a gas stream
- Patent number 7,638,106
- Issue date Dec 29, 2009
- Edwards Limited
- Christopher Mark Bailey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for using solution based precursors for atomic...
- Patent number 7,514,119
- Issue date Apr 7, 2009
- Linde, Inc.
- Ce Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of recycling fluorine using an adsorption purification process
- Patent number 6,955,707
- Issue date Oct 18, 2005
- The BOC Group, Inc.
- Edward Frederick Ezell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming low-k dielectric films
- Patent number 6,936,537
- Issue date Aug 30, 2005
- The BOC Group, Inc.
- Richard A. Hogle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal activation of fluorine for use in a semiconductor chamber
- Patent number 6,818,566
- Issue date Nov 16, 2004
- The BOC Group, Inc.
- Noel James Leeson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Valve for use with high purity gas
- Patent number 6,361,020
- Issue date Mar 26, 2002
- The BOC Group plc
- David William Birch
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Seamless cylinder shell construction
- Patent number 5,485,736
- Issue date Jan 23, 1996
- The BOC Group, Inc.
- John P. Collier
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL VAPOR DEPOSITION CHAMBER CLEANING WITH MOLECULAR FLUORINE
- Publication number 20130276820
- Publication date Oct 24, 2013
- Jean-Charles Cigal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREVENTION OF POST-PECVD VACUUM AND ABATEMENT SYSTEM FOULING USING...
- Publication number 20130133697
- Publication date May 30, 2013
- Paul A. STOCKMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR USING SOLUTION BASED PRECURSORS FOR ATOMIC...
- Publication number 20120295038
- Publication date Nov 22, 2012
- Ce MA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR USING SOLUTION BASED PRECURSORS FOR ATOMIC...
- Publication number 20120294753
- Publication date Nov 22, 2012
- Ce MA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAPID SUPPLY OF FLUORINE SOURCE GAS TO REMOTE PLASMA FOR CHAMBER CL...
- Publication number 20110041872
- Publication date Feb 24, 2011
- Richard Allen Hogle
- B08 - CLEANING
Information Patent Application
METHOD OF TREATING A GAS STREAM
- Publication number 20110017140
- Publication date Jan 27, 2011
- Christopher Mark Bailey
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD AND APPARATUS FOR USING SOLUTION PRECURSORS FOR ATOMIC LAYER...
- Publication number 20090220374
- Publication date Sep 3, 2009
- Ce MA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for the production of high purity tungsten hex...
- Publication number 20090068086
- Publication date Mar 12, 2009
- Richard Allen Hogle
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Method of treating a gas stream
- Publication number 20070248516
- Publication date Oct 25, 2007
- Christopher Mark Bailey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated chamber cleaning system
- Publication number 20070079849
- Publication date Apr 12, 2007
- Richard Hogle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
H2 conditioning of chamber following cleaning cycle
- Publication number 20070074743
- Publication date Apr 5, 2007
- Graham McFarlane
- B08 - CLEANING
Information Patent Application
High efficiency trap for deposition process
- Publication number 20060276049
- Publication date Dec 7, 2006
- Christopher M. Bailey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for using solution based precursors for atomic...
- Publication number 20060269667
- Publication date Nov 30, 2006
- Ce Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of recycling fluorine using an adsorption purification process
- Publication number 20060042462
- Publication date Mar 2, 2006
- Edward Frederick Ezell
- B08 - CLEANING
Information Patent Application
High rate etching using high pressure F2 plasma with argon dilution
- Publication number 20060016459
- Publication date Jan 26, 2006
- Graham McFarlane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for maintaining by-product volatility in depos...
- Publication number 20050250347
- Publication date Nov 10, 2005
- Christopher M. Bailey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for disposal of hydrogen from fluorine genera...
- Publication number 20050191225
- Publication date Sep 1, 2005
- Richard A. Hogle
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Sub-atmospheric supply of fluorine to semiconductor process chamber
- Publication number 20040074516
- Publication date Apr 22, 2004
- Richard A. Hogle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal activation of fluorine for use in a semiconductor chamber
- Publication number 20040077162
- Publication date Apr 22, 2004
- Noel James Leeson
- B08 - CLEANING
Information Patent Application
Method of recycling fluorine using an adsorption purification process
- Publication number 20030228989
- Publication date Dec 11, 2003
- Edward Frederick Ezell
- B08 - CLEANING
Information Patent Application
Methods for forming low-k dielectric films
- Publication number 20020192980
- Publication date Dec 19, 2002
- Richard A. Hogle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Richard Allen Hogle

Person

Patents Grantslast 30 patents

Method of treating a gas stream

Method and apparatus for using solution based precursors for atomic...

Method of recycling fluorine using an adsorption purification process

Methods for forming low-k dielectric films

Thermal activation of fluorine for use in a semiconductor chamber

Valve for use with high purity gas

Seamless cylinder shell construction

Patents Applicationslast 30 patents

CHEMICAL VAPOR DEPOSITION CHAMBER CLEANING WITH MOLECULAR FLUORINE

PREVENTION OF POST-PECVD VACUUM AND ABATEMENT SYSTEM FOULING USING...

METHOD AND APPARATUS FOR USING SOLUTION BASED PRECURSORS FOR ATOMIC...

METHOD AND APPARATUS FOR USING SOLUTION BASED PRECURSORS FOR ATOMIC...

RAPID SUPPLY OF FLUORINE SOURCE GAS TO REMOTE PLASMA FOR CHAMBER CL...

METHOD OF TREATING A GAS STREAM

METHOD AND APPARATUS FOR USING SOLUTION PRECURSORS FOR ATOMIC LAYER...

Method and apparatus for the production of high purity tungsten hex...

Method of treating a gas stream

Integrated chamber cleaning system

H2 conditioning of chamber following cleaning cycle

High efficiency trap for deposition process

Method and apparatus for using solution based precursors for atomic...

Method of recycling fluorine using an adsorption purification process

High rate etching using high pressure F2 plasma with argon dilution

Method and apparatus for maintaining by-product volatility in depos...

Methods and apparatus for disposal of hydrogen from fluorine genera...

Sub-atmospheric supply of fluorine to semiconductor process chamber

Thermal activation of fluorine for use in a semiconductor chamber

Method of recycling fluorine using an adsorption purification process

Methods for forming low-k dielectric films