Richard L. Kleinhenz

Person

Wappingers Falls, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Manufacturing management using tool operating data
- Patent number 8,634,949
- Issue date Jan 21, 2014
- International Business Machines Corporation
- Brian C. Barker
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Electrical method for assessing yield-limiting asperities in silico...
- Patent number 6,528,335
- Issue date Mar 4, 2003
- International Business Machines Corporation
- Marlene Isabel Almonte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for producing low leakage isolation devices
- Patent number 6,319,794
- Issue date Nov 20, 2001
- International Business Machines Corporation
- Hiroyuki Akatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of trench capacitors using disposable hard mask
- Patent number 6,190,955
- Issue date Feb 20, 2001
- International Business Machines Corporation
- Matthias Ilg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned deep trench DRAM array device
- Patent number 6,140,175
- Issue date Oct 31, 2000
- International Business Machines Corporation
- Richard L. Kleinhenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making a semiconductor memory device having a buried plat...
- Patent number 6,107,135
- Issue date Aug 22, 2000
- Kabushiki Kaisha Toshiba
- Richard L. Kleinhenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor phase etching of oxide masked by resist or masking material
- Patent number 6,074,951
- Issue date Jun 13, 2000
- International Business Machines Corporation
- Richard L. Kleinhenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of patterning sidewalls of a trench in integrated circuit ma...
- Patent number 6,071,815
- Issue date Jun 6, 2000
- International Business Machines Corporation
- Richard L. Kleinhenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench capacitor structures
- Patent number 6,057,188
- Issue date May 2, 2000
- International Business Machines Corporation
- Badih El-Kareh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced stand by power consumption in a DRAM
- Patent number 5,970,009
- Issue date Oct 19, 1999
- Siemens Aktiengesellschaft
- Heinz Hoenigschmid
- G11 - INFORMATION STORAGE
Information Patent Grant
Oxide layer patterned by vapor phase etching
- Patent number 5,876,879
- Issue date Mar 2, 1999
- International Business Machines Corporation
- Richard L. Kleinhenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench sidewall patterned by vapor phase etching
- Patent number 5,838,055
- Issue date Nov 17, 1998
- International Business Machines Corporation
- Richard L. Kleinhenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench capacitor structures
- Patent number 5,805,494
- Issue date Sep 8, 1998
- International Business Machines Corporation
- Badih El-Kareh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making silicon on insulator buried plate trench capacitor
- Patent number 5,770,484
- Issue date Jun 23, 1998
- International Business Machines Corporation
- Richard Leo Kleinhenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced deep trench storage node capacitance for DRAM
- Patent number 5,592,412
- Issue date Jan 7, 1997
- Siemens Aktiengesellschaft
- Richard Kleinhenz
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Manufacturing Management Using Tool Operating Data
- Publication number 20110288668
- Publication date Nov 24, 2011
- International Business Machines Corporation
- Brian C. Barker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Gettering process for bonded SOI wafers
- Publication number 20020187619
- Publication date Dec 12, 2002
- International Business Machines Corporation
- Richard L. Kleinhenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrical method for assessing yield-limiting asperities in silico...
- Publication number 20020109521
- Publication date Aug 15, 2002
- International Business Machines Corporation
- Marlene Isabel Almonte
- H01 - BASIC ELECTRIC ELEMENTS

Richard L. Kleinhenz

Person

Patents Grantslast 30 patents

Manufacturing management using tool operating data

Electrical method for assessing yield-limiting asperities in silico...

Structure and method for producing low leakage isolation devices

Fabrication of trench capacitors using disposable hard mask

Self-aligned deep trench DRAM array device

Method of making a semiconductor memory device having a buried plat...

Vapor phase etching of oxide masked by resist or masking material

Method of patterning sidewalls of a trench in integrated circuit ma...

Trench capacitor structures

Reduced stand by power consumption in a DRAM

Oxide layer patterned by vapor phase etching

Trench sidewall patterned by vapor phase etching

Trench capacitor structures

Method of making silicon on insulator buried plate trench capacitor

Enhanced deep trench storage node capacitance for DRAM

Patents Applicationslast 30 patents

Manufacturing Management Using Tool Operating Data

Gettering process for bonded SOI wafers

Electrical method for assessing yield-limiting asperities in silico...