Membership
Tour
Register
Log in
ROBERT B. TURKOT JR.
Follow
Person
Santa Clara, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Microelectronic transistor source/drain formation using angled etching
Patent number
11,515,402
Issue date
Nov 29, 2022
Intel Corporation
Seung Hoon Sung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Supercritical carbon dioxide to reduce line edge roughness
Patent number
7,049,053
Issue date
May 23, 2006
Intel Corporation
Vijayakumar Ramachandrarao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Filling small dimension vias using supercritical carbon dioxide
Patent number
6,812,132
Issue date
Nov 2, 2004
Intel Corporation
Vijayakumar S. Ramachandrarao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Highly polar cleans for removal of residues from semiconductor stru...
Patent number
6,624,127
Issue date
Sep 23, 2003
Intel Corporation
Justin K. Brask
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
Information
Patent Application
MICROELECTRONIC TRANSISTOR SOURCE/DRAIN FORMATION USING ANGLED ETCHING
Publication number
20210210620
Publication date
Jul 8, 2021
Intel Corporation
Seung Hoon Sung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COLORED SELF-ALIGNED SUBTRACTIVE PATTERNING BY ASYMMETRIC SPACER FO...
Publication number
20200075334
Publication date
Mar 5, 2020
Intel Corporation
Richard E. SCHENKER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DAMASCENE-BASED APPROACHES FOR FABRICATING A PEDESTAL FOR A MAGNETI...
Publication number
20200066967
Publication date
Feb 27, 2020
Intel Corporation
Satyarth SURI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE ETCHING FOR GATE ALL AROUND ARCHITECTURES
Publication number
20170005176
Publication date
Jan 5, 2017
Intel Corporation
SEUNG HOON SUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-PLANAR SEMICONDUCTOR DEVICE HAVING GERMANIUM-BASED ACTIVE REGIO...
Publication number
20140091279
Publication date
Apr 3, 2014
Jessica S. Kachian
B82 - NANO-TECHNOLOGY
Information
Patent Application
Reducing oxidation under a high K gate dielectric
Publication number
20080211033
Publication date
Sep 4, 2008
Robert B. Turkot
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching metal silicides and germanides
Publication number
20060180874
Publication date
Aug 17, 2006
Justin K. Brask
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for removing a residue from a substrate using supercritical...
Publication number
20060102204
Publication date
May 18, 2006
TOKYO ELECTRON LIMITED
Gunilla Jacobson
B08 - CLEANING
Information
Patent Application
Reducing oxidation under a high K gate dielectric
Publication number
20060057808
Publication date
Mar 16, 2006
Robert B. Turkot
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for making a semiconductor device with a high-k gate dielect...
Publication number
20050266619
Publication date
Dec 1, 2005
Justin K. Brask
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MAKING A SEMICONDUCTOR DEVICE HAVING A METAL GATE ELECTRODE
Publication number
20050101113
Publication date
May 12, 2005
Justin K. Brask
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for etching a thin metal layer
Publication number
20050101134
Publication date
May 12, 2005
Justin K. Brask
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Filling small dimension vias using supercritical carbon dioxide
Publication number
20050054201
Publication date
Mar 10, 2005
Vijayakumar S. Ramachandrarao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Selective etch process for making a semiconductor device having a h...
Publication number
20050048791
Publication date
Mar 3, 2005
Justin K. Brask
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching metal silicides and germanides
Publication number
20050012160
Publication date
Jan 20, 2005
Justin K. Brask
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Supercritical carbon dioxide to reduce line edge roughness
Publication number
20040253550
Publication date
Dec 16, 2004
Vijayakumar Ramachandrarao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FILLING SMALL DIMENSION VIAS USING SUPERCRITICAL CARBON DIOXIDE
Publication number
20040185656
Publication date
Sep 23, 2004
Vijayakumar S. Ramachandrarao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACOUSTIC STREAMING OF CONDENSATE DURING SPUTTERED METAL VAPOR DEPOS...
Publication number
20040173452
Publication date
Sep 9, 2004
Justin K. Brask
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cleaning residues from semiconductor structures
Publication number
20040171502
Publication date
Sep 2, 2004
Shan C. Clark
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
Etching and cleaning of semiconductors using supercritical carbon d...
Publication number
20040134885
Publication date
Jul 15, 2004
Subramanyam A. Iyer
B08 - CLEANING
Information
Patent Application
Highly polar cleans for removal of residues from semiconductor stru...
Publication number
20040097388
Publication date
May 20, 2004
Justin K. Brask
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
Removing fluorine-based plasma etch residues
Publication number
20040079388
Publication date
Apr 29, 2004
Vijayakumar S. Ramachandrarao
B08 - CLEANING
Information
Patent Application
Wet etching narrow trenches
Publication number
20040077172
Publication date
Apr 22, 2004
Justin K. Brask
H01 - BASIC ELECTRIC ELEMENTS