Robert Brennan Milligan

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for depositing a transition metal nitride film on a substra...
- Patent number 11,976,361
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a transition metal nitride film on a substra...
- Patent number 11,306,395
- Issue date Apr 19, 2022
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
NbMC layers
- Patent number 11,233,133
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of metal borides and silicides
- Patent number 10,865,475
- Issue date Dec 15, 2020
- ASM IP Holding B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
NbMC layers
- Patent number 10,211,308
- Issue date Feb 19, 2019
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of metal borides
- Patent number 10,087,522
- Issue date Oct 2, 2018
- ASM IP Holding B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of boron-doped titanium metal films with high work function
- Patent number 10,083,836
- Issue date Sep 25, 2018
- ASM IP Holding B.V.
- Robert Brennan Milligan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process gas management for an inductively-coupled plasma deposition...
- Patent number 10,023,960
- Issue date Jul 17, 2018
- ASM IP Holdings B.V.
- Fred Alokozai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process gas management for an inductively-coupled plasma deposition...
- Patent number 9,605,342
- Issue date Mar 28, 2017
- ASM IP Holding B.V.
- Fred Alokozai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced atomic layer deposition of conductive material over...
- Patent number 9,466,574
- Issue date Oct 11, 2016
- ASM America, Inc.
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor reaction chamber with plasma capabilities
- Patent number 9,412,564
- Issue date Aug 9, 2016
- ASM IP Holding B.V.
- Robert Brennan Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase-stabilized thin films, structures and devices including the t...
- Patent number 9,029,253
- Issue date May 12, 2015
- ASM IP Holding B.V.
- Robert Brennan Milligan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process gas management for an inductively-coupled plasma deposition...
- Patent number 9,021,985
- Issue date May 5, 2015
- ASM IP Holdings B.V.
- Fred Alokozai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor reaction chamber with plasma capabilities
- Patent number 9,018,111
- Issue date Apr 28, 2015
- ASM IP Holding B.V.
- Robert Brennan Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum flange ring
- Patent number D698904
- Issue date Feb 4, 2014
- ASM IP Holding B.V.
- Robert Brennan Milligan
- D23 - Environmental heating and cooling
Information Patent Grant
Plasma-enhanced atomic layers deposition of conductive material ove...
- Patent number 8,557,702
- Issue date Oct 15, 2013
- ASM America, Inc.
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Periodic plasma annealing in an ALD-type process
- Patent number 7,713,874
- Issue date May 11, 2010
- ASM America, Inc.
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD, SYSTEM, AND APPARATUS FOR DEPOSITION OF TRANSITION METAL FILM
- Publication number 20240420958
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Venkata Surya Naga Raju Chava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING A TRANSITION METAL NITRIDE FILM ON A SUBSTRA...
- Publication number 20220228264
- Publication date Jul 21, 2022
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF TUNGSTEN FILMS
- Publication number 20210404060
- Publication date Dec 30, 2021
- ASM IP HOLDING B.V.
- Robert Brennan Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF FILMS COMPRISING MOLYBDENUM
- Publication number 20210407809
- Publication date Dec 30, 2021
- ASM IP HOLDING B.V.
- Bhushan Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NbMC LAYERS
- Publication number 20190140067
- Publication date May 9, 2019
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A TRANSITION METAL NITRIDE FILM ON A SUBSTRA...
- Publication number 20190003052
- Publication date Jan 3, 2019
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METAL BORIDES
- Publication number 20170306478
- Publication date Oct 26, 2017
- ASM IP HOLDING B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METAL BORIDES AND SILICIDES
- Publication number 20170306479
- Publication date Oct 26, 2017
- ASM IP HOLDING B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS MANAGEMENT FOR AN INDUCTIVELY-COUPLED PLASMA DEPOSITION...
- Publication number 20170191164
- Publication date Jul 6, 2017
- ASM IP HOLDING B.V.
- Fred Alokozai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NbMC LAYERS
- Publication number 20170117141
- Publication date Apr 27, 2017
- ASM IP HOLDING B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMATION OF BORON-DOPED TITANIUM METAL FILMS WITH HIGH WORK FUNCTION
- Publication number 20170025280
- Publication date Jan 26, 2017
- ASM IP HOLDING B.V.
- Robert Brennan Milligan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR REACTION CHAMBER WITH PLASMA CAPABILITIES
- Publication number 20160013024
- Publication date Jan 14, 2016
- ASM IP HOLDING B.V.
- Robert Brennan Milligan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS GAS MANAGEMENT FOR AN INDUCTIVELY-COUPLED PLASMA DEPOSITION...
- Publication number 20150184291
- Publication date Jul 2, 2015
- ASM IP HOLDING B.V.
- Fred Alokozai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR REACTION CHAMBER WITH PLASMA CAPABILITIES
- Publication number 20150024609
- Publication date Jan 22, 2015
- ASM IP HOLDING B.V.
- Robert Brennan Milligan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process Gas Management for an Inductively-Coupled Plasma Deposition...
- Publication number 20140073143
- Publication date Mar 13, 2014
- ASM IP HOLDINGS B.V.
- Fred Alokozai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...
- Publication number 20140008803
- Publication date Jan 9, 2014
- ASM AMERICA, INC
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHASE-STABILIZED THIN FILMS, STRUCTURES AND DEVICES INCLUDING THE T...
- Publication number 20130292676
- Publication date Nov 7, 2013
- ASM IP HOLDING B.V.
- Robert Brennan Milligan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TERNARY METAL ALLOYS WITH TUNABLE STOICHIOMETRIES
- Publication number 20120100308
- Publication date Apr 26, 2012
- ASM AMERICA, INC
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...
- Publication number 20100193955
- Publication date Aug 5, 2010
- ASM AMERICA, INC
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PERIODIC PLASMA ANNEALING IN AN ALD-TYPE PROCESS
- Publication number 20080274617
- Publication date Nov 6, 2008
- ASM AMERICA, INC
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Robert Brennan Milligan

Person

Patents Grantslast 30 patents

Methods for depositing a transition metal nitride film on a substra...

Methods for depositing a transition metal nitride film on a substra...

NbMC layers

Deposition of metal borides and silicides

NbMC layers

Deposition of metal borides

Formation of boron-doped titanium metal films with high work function

Process gas management for an inductively-coupled plasma deposition...

Process gas management for an inductively-coupled plasma deposition...

Plasma-enhanced atomic layer deposition of conductive material over...

Semiconductor reaction chamber with plasma capabilities

Phase-stabilized thin films, structures and devices including the t...

Process gas management for an inductively-coupled plasma deposition...

Semiconductor reaction chamber with plasma capabilities

Vacuum flange ring

Plasma-enhanced atomic layers deposition of conductive material ove...

Periodic plasma annealing in an ALD-type process

Patents Applicationslast 30 patents

METHOD, SYSTEM, AND APPARATUS FOR DEPOSITION OF TRANSITION METAL FILM

METHODS FOR DEPOSITING A TRANSITION METAL NITRIDE FILM ON A SUBSTRA...

VAPOR DEPOSITION OF TUNGSTEN FILMS

VAPOR DEPOSITION OF FILMS COMPRISING MOLYBDENUM

NbMC LAYERS

METHODS FOR DEPOSITING A TRANSITION METAL NITRIDE FILM ON A SUBSTRA...

DEPOSITION OF METAL BORIDES

DEPOSITION OF METAL BORIDES AND SILICIDES

PROCESS GAS MANAGEMENT FOR AN INDUCTIVELY-COUPLED PLASMA DEPOSITION...

NbMC LAYERS

FORMATION OF BORON-DOPED TITANIUM METAL FILMS WITH HIGH WORK FUNCTION

SEMICONDUCTOR REACTION CHAMBER WITH PLASMA CAPABILITIES

PROCESS GAS MANAGEMENT FOR AN INDUCTIVELY-COUPLED PLASMA DEPOSITION...

SEMICONDUCTOR REACTION CHAMBER WITH PLASMA CAPABILITIES

Process Gas Management for an Inductively-Coupled Plasma Deposition...

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...

PHASE-STABILIZED THIN FILMS, STRUCTURES AND DEVICES INCLUDING THE T...

TERNARY METAL ALLOYS WITH TUNABLE STOICHIOMETRIES

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...

PERIODIC PLASMA ANNEALING IN AN ALD-TYPE PROCESS