Robert J. Small

Person

Tueson, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Compositions for chemical-mechanical planarization of noble-metal-f...
- Patent number 8,142,675
- Issue date Mar 27, 2012
- Air Products and Chemicals, Inc.
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for rapidly removing overfilled substrates
- Patent number 8,057,696
- Issue date Nov 15, 2011
- DuPont Air Products Nanomaterials LLC
- Philippe H. Chelle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Periodic acid compositions for polishing ruthenium/low K substrates
- Patent number 7,968,465
- Issue date Jun 28, 2011
- DuPont Air Products NanoMaterials LLC
- Robert J. Small
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Semiconductor cleaning using superacids
- Patent number 7,923,424
- Issue date Apr 12, 2011
- Advanced Process Technologies, LLC
- Robert J. Small
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions of chemical mechanical planarization slurries contacti...
- Patent number 7,524,346
- Issue date Apr 28, 2009
- DuPont Air Products Nanomaterials LLC
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Free radical-forming activator attached to solid and used to enhanc...
- Patent number 7,513,920
- Issue date Apr 7, 2009
- DuPont Air Products Nanomaterials LLC
- Junaid Ahmed Siddiqui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions for cleaning organic and plasma etched residues for se...
- Patent number 7,456,140
- Issue date Nov 25, 2008
- EKC Technology, Inc.
- Robert J. Small
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particulate or particle-bound chelating agents
- Patent number 7,427,361
- Issue date Sep 23, 2008
- DuPont Air Products Nanomaterials LLC
- Robert J. Small
- B24 - GRINDING POLISHING
Information Patent Grant
Free radical-forming activator attached to solid and used to enhanc...
- Patent number 7,427,305
- Issue date Sep 23, 2008
- DuPont Air Products Nanomaterials LLC
- Brandon Shane Scott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for rapidly removing overfilled substrates
- Patent number 7,419,911
- Issue date Sep 2, 2008
- EKC Technology, Inc.
- Philippe H. Chelle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning solutions including nucleophilic amine compound having red...
- Patent number 7,387,130
- Issue date Jun 17, 2008
- EKC Technology, Inc.
- Wai Mun Lee
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Cerium oxide abrasives for chemical mechanical polishing
- Patent number 7,368,388
- Issue date May 6, 2008
- Robert J. Small
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing composition and process
- Patent number 7,314,823
- Issue date Jan 1, 2008
- DuPont Airproducts NanoMaterials LLC
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing composition and process
- Patent number 7,276,180
- Issue date Oct 2, 2007
- DuPont Air Products Nanomaterials LLC
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for chemically treating a substrate using foam technology
- Patent number 7,273,060
- Issue date Sep 25, 2007
- EKC Technology, Inc.
- Bakul P. Patel
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
CMP method for copper, tungsten, titanium, polysilicon, and other s...
- Patent number 7,247,566
- Issue date Jul 24, 2007
- Dupont Air Products Nanomaterials LLC
- Melvin K. Carter
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Cleaning solutions including nucleophilic amine compound having red...
- Patent number 7,144,849
- Issue date Dec 5, 2006
- EKC Technology, Inc.
- Wai Mun Lee
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Process for the use of bis-choline and tris-choline in the cleaning...
- Patent number 7,135,445
- Issue date Nov 14, 2006
- EKC Technology, Inc.
- Richard William Charm
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Cleaning solutions including nucleophilic amine compound having red...
- Patent number 7,051,742
- Issue date May 30, 2006
- EKC Technology, Inc.
- Wai Mun Lee
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Composition for chemical-mechanical polishing and method of using same
- Patent number 7,037,350
- Issue date May 2, 2006
- DA NanoMaterials L.L.C.
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions for chemical mechanical planarization of tantalum and...
- Patent number 7,033,409
- Issue date Apr 25, 2006
- DANanoMaterials LLC
- Robert J. Small
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing composition and process
- Patent number 7,033,942
- Issue date Apr 25, 2006
- DuPont Air Products Nanomaterials LLC
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalyst attached to solid and used to promote free radical formati...
- Patent number 7,029,508
- Issue date Apr 18, 2006
- DuPont Air Products Nanomaterials LLC
- Brandon Shane Scott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalytic composition for chemical-mechanical polishing, method of...
- Patent number 7,014,669
- Issue date Mar 21, 2006
- DuPont Air Products Nanomaterials LLC
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sulfoxide pyrolid(in)one alkanolamine cleaner composition
- Patent number 6,916,772
- Issue date Jul 12, 2005
- EKC Technology, Inc.
- De-Ling Zhou
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions for chemical mechanical planarization of copper
- Patent number 6,866,792
- Issue date Mar 15, 2005
- EKC Technology, Inc.
- Robert J. Small
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Composition for cleaning chemical mechanical planarization apparatus
- Patent number 6,852,682
- Issue date Feb 8, 2005
- EKC Technology, Inc.
- Robert J. Small
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions for cleaning organic and plasma etched residues for se...
- Patent number 6,777,380
- Issue date Aug 17, 2004
- EKC Technology, Inc.
- Robert J. Small
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical-mechanical planarization using ozone
- Patent number 6,756,308
- Issue date Jun 29, 2004
- EKC Technology, Inc.
- Robert J. Small
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clean room wipes for neutralizing caustic chemicals
- Patent number 6,645,930
- Issue date Nov 11, 2003
- EKC Technology, Inc.
- Danny L. Wallis
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR CLEANING USING SUPERACIDS
- Publication number 20110187010
- Publication date Aug 4, 2011
- Robert J. Small
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPOSITIONS FOR CHEMICAL-MECHANICAL PLANARIZATION OF NOBLE-METAL-F...
- Publication number 20090255903
- Publication date Oct 15, 2009
- Robert J. SMALL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Free Radical-Forming Activator Attached to Solid and Used to Enhanc...
- Publication number 20090250656
- Publication date Oct 8, 2009
- Junaid Ahmed Siddiqui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Free radical-forming activator attached to solid and used to enhanc...
- Publication number 20090029553
- Publication date Jan 29, 2009
- DuPont Air Products NanoMaterials LLC
- Brandon Shane Scott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR RAPIDLY REMOVING OVERFILLED SUBSTRATES
- Publication number 20090014415
- Publication date Jan 15, 2009
- EKC Technology, Inc.
- Philippe H. Chelle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cleaning solutions including nucleophilic amine compound having red...
- Publication number 20090011967
- Publication date Jan 8, 2009
- EKC Technology, Inc.
- Wai Mun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Periodic Acid Compositions For Polishing Ruthenium/Low K Substrates
- Publication number 20080038995
- Publication date Feb 14, 2008
- Robert J. Small
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Methods for chemically treating a substrate using foam technology
- Publication number 20070135321
- Publication date Jun 14, 2007
- EKC Technology, Inc.
- Bakul P. Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cleaning solutions including nucleophilic amine compound having red...
- Publication number 20070078074
- Publication date Apr 5, 2007
- EKC Technology, Inc.
- Wai Mun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Compositions containing free radical quenchers
- Publication number 20060289034
- Publication date Dec 28, 2006
- Robert J. Small
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Cerium oxide abrasives for chemical mechanical polishing
- Publication number 20060234509
- Publication date Oct 19, 2006
- Robert J. Small
- B24 - GRINDING POLISHING
Information Patent Application
Semiconductor cleaning using superacids
- Publication number 20060183248
- Publication date Aug 17, 2006
- Robert J. Small
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor cleaning using ionic liquids
- Publication number 20060183654
- Publication date Aug 17, 2006
- Robert J. Small
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Free radical-forming activator attached to solid and used to enhanc...
- Publication number 20060180788
- Publication date Aug 17, 2006
- DuPont Air Products NanoMaterials LLC
- Brandon Shane Scott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Free radical-forming activator attached to solid and used to enhanc...
- Publication number 20060117667
- Publication date Jun 8, 2006
- Junaid Ahmed Siddiqui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cleaning solutions including nucleophilic amine compound having red...
- Publication number 20060003909
- Publication date Jan 5, 2006
- Wai Mun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chemical mechanical polishing composition and process
- Publication number 20050266689
- Publication date Dec 1, 2005
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Compositions for chemical mechanical planarization of tantalum and...
- Publication number 20050250329
- Publication date Nov 10, 2005
- EKC Technology
- Robert J. Small
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Compositions for cleaning organic and plasma etched residues for se...
- Publication number 20050202987
- Publication date Sep 15, 2005
- Robert J. Small
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Compositions and methods for rapidly removing overfilled substrates
- Publication number 20050178742
- Publication date Aug 18, 2005
- Philippe H. Chelle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CMP method for copper, tungsten, titanium, polysilicon, and other s...
- Publication number 20050090109
- Publication date Apr 28, 2005
- Melvin K. Carter
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Particulate or particle-bound chelating agents
- Publication number 20050076581
- Publication date Apr 14, 2005
- Robert J. Small
- B24 - GRINDING POLISHING
Information Patent Application
Composition for chemical-mechanical polishing and method of using same
- Publication number 20050014890
- Publication date Jan 20, 2005
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Residue removers for electrohydrodynamic cleaning of semiconductors
- Publication number 20040217006
- Publication date Nov 4, 2004
- Robert J. Small
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning solutions including nucleophilic amine compound having red...
- Publication number 20040198621
- Publication date Oct 7, 2004
- Wai Mun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chemical-mechanical planarization using ozone
- Publication number 20040161938
- Publication date Aug 19, 2004
- Robert J. Small
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Process for the use of bis-choline and tris-choline in the cleaning...
- Publication number 20040147421
- Publication date Jul 29, 2004
- Richard William Charm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wet etch of titanium-tungsten film
- Publication number 20040140288
- Publication date Jul 22, 2004
- Bakul Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Abrasive-free chemical mechanical polishing composition and polishi...
- Publication number 20040134873
- Publication date Jul 15, 2004
- Li Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chemical mechanical polishing composition and process
- Publication number 20040072439
- Publication date Apr 15, 2004
- EKC Technology, Inc.
- Robert J. Small
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Robert J. Small

Person

Patents Grantslast 30 patents

Compositions for chemical-mechanical planarization of noble-metal-f...

Compositions and methods for rapidly removing overfilled substrates

Periodic acid compositions for polishing ruthenium/low K substrates

Semiconductor cleaning using superacids

Compositions of chemical mechanical planarization slurries contacti...

Free radical-forming activator attached to solid and used to enhanc...

Compositions for cleaning organic and plasma etched residues for se...

Particulate or particle-bound chelating agents

Free radical-forming activator attached to solid and used to enhanc...

Compositions and methods for rapidly removing overfilled substrates

Cleaning solutions including nucleophilic amine compound having red...

Cerium oxide abrasives for chemical mechanical polishing

Chemical mechanical polishing composition and process

Chemical mechanical polishing composition and process

Methods for chemically treating a substrate using foam technology

CMP method for copper, tungsten, titanium, polysilicon, and other s...

Cleaning solutions including nucleophilic amine compound having red...

Process for the use of bis-choline and tris-choline in the cleaning...

Cleaning solutions including nucleophilic amine compound having red...

Composition for chemical-mechanical polishing and method of using same

Compositions for chemical mechanical planarization of tantalum and...

Chemical mechanical polishing composition and process

Catalyst attached to solid and used to promote free radical formati...

Catalytic composition for chemical-mechanical polishing, method of...

Sulfoxide pyrolid(in)one alkanolamine cleaner composition

Compositions for chemical mechanical planarization of copper

Composition for cleaning chemical mechanical planarization apparatus

Compositions for cleaning organic and plasma etched residues for se...

Chemical-mechanical planarization using ozone

Clean room wipes for neutralizing caustic chemicals

Patents Applicationslast 30 patents

SEMICONDUCTOR CLEANING USING SUPERACIDS

COMPOSITIONS FOR CHEMICAL-MECHANICAL PLANARIZATION OF NOBLE-METAL-F...

Free Radical-Forming Activator Attached to Solid and Used to Enhanc...

Free radical-forming activator attached to solid and used to enhanc...

COMPOSITIONS AND METHODS FOR RAPIDLY REMOVING OVERFILLED SUBSTRATES

Cleaning solutions including nucleophilic amine compound having red...

Periodic Acid Compositions For Polishing Ruthenium/Low K Substrates

Methods for chemically treating a substrate using foam technology

Cleaning solutions including nucleophilic amine compound having red...

Compositions containing free radical quenchers

Cerium oxide abrasives for chemical mechanical polishing

Semiconductor cleaning using superacids

Semiconductor cleaning using ionic liquids

Free radical-forming activator attached to solid and used to enhanc...

Free radical-forming activator attached to solid and used to enhanc...

Cleaning solutions including nucleophilic amine compound having red...

Chemical mechanical polishing composition and process

Compositions for chemical mechanical planarization of tantalum and...

Compositions for cleaning organic and plasma etched residues for se...

Compositions and methods for rapidly removing overfilled substrates

CMP method for copper, tungsten, titanium, polysilicon, and other s...

Particulate or particle-bound chelating agents

Composition for chemical-mechanical polishing and method of using same

Residue removers for electrohydrodynamic cleaning of semiconductors

Cleaning solutions including nucleophilic amine compound having red...

Chemical-mechanical planarization using ozone

Process for the use of bis-choline and tris-choline in the cleaning...

Wet etch of titanium-tungsten film

Abrasive-free chemical mechanical polishing composition and polishi...

Chemical mechanical polishing composition and process