Membership
Tour
Register
Log in
Roger Caldwell
Follow
Person
Milpitas, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Hybrid phase-shift mask
Patent number
6,835,510
Issue date
Dec 28, 2004
ASML Masktools B.V.
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Hybrid phase-shift mask
Patent number
6,623,895
Issue date
Sep 23, 2003
ASML Masktools Netherlands B.V.
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of patterning sub-0.25λ line features with high trans...
Patent number
6,482,555
Issue date
Nov 19, 2002
ASML Masktools Netherlands B.V.
J. Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of patterning sub-0.25 lambda line features with high transm...
Patent number
6,312,854
Issue date
Nov 6, 2001
ASML Masktools Netherlands B.V.
J. Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Hybrid phase-shift mask
Publication number
20040067423
Publication date
Apr 8, 2004
ASML MASKTOOLS NETHERLANDS B.V.
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of patterning sub-0.25lambda line features with high transmi...
Publication number
20020048708
Publication date
Apr 25, 2002
ASML MASKTOOLS NETHERLANDS B.V.
J. Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Hybrid phase-shift mask
Publication number
20020015899
Publication date
Feb 7, 2002
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY