Roger Patrick

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for diagnosing status of parts in real time in...
- Patent number 9,541,514
- Issue date Jan 10, 2017
- I AM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for diagnosing status of parts in real time in...
- Patent number 9,279,758
- Issue date Mar 8, 2016
- Lam Research Corporation
- Roger Patrick
- G01 - MEASURING TESTING
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,796,153
- Issue date Aug 5, 2014
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cam-locked showerhead electrode and assembly
- Patent number 8,470,127
- Issue date Jun 25, 2013
- Lam Research Corporation
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,414,719
- Issue date Apr 9, 2013
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for diagnosing status of parts in real time in...
- Patent number 8,343,305
- Issue date Jan 1, 2013
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead electrodes
- Patent number 8,268,117
- Issue date Sep 18, 2012
- Lam Research Corporation
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,221,582
- Issue date Jul 17, 2012
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode assembly and plasma processing chamber utilizing thermall...
- Patent number 8,216,418
- Issue date Jul 10, 2012
- Lam Research Corporation
- Roger Patrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrode assembly and plasma processing chamber utilizing thermall...
- Patent number 8,187,413
- Issue date May 29, 2012
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead electrode assemblies and plasma processing chambers inco...
- Patent number 8,152,954
- Issue date Apr 10, 2012
- Lam Research Corporation
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Architecture for general purpose programmable semiconductor process...
- Patent number 7,228,257
- Issue date Jun 5, 2007
- Lam Research Corporation
- Roger Patrick
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Methods and apparatus for optimizing a substrate in a plasma proces...
- Patent number 7,190,119
- Issue date Mar 13, 2007
- Lam Research Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for reducing plasma-induced charging damage
- Patent number 6,309,979
- Issue date Oct 30, 2001
- Lam Research Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlling ion energy and plasma density...
- Patent number 6,174,450
- Issue date Jan 16, 2001
- Lam Research Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for reducing charging during plasma processing
- Patent number 5,904,571
- Issue date May 18, 1999
- Lam Research Corp.
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for detecting pattern dependent charging on a...
- Patent number 5,869,877
- Issue date Feb 9, 1999
- Lam Research Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COMPACT HIGH DENSITY PLASMA SOURCE
- Publication number 20210183619
- Publication date Jun 17, 2021
- LAM RESEARCH CORPORATION
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOBILE DEVICE USER INTERFACE FOR SUPPORTING SERVICE MAINTENANCE AND...
- Publication number 20160104128
- Publication date Apr 14, 2016
- LAM RESEARCH CORPORATION
- Simon Gosselin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MOBILE CONNECTIVITY AND CONTROL OF SEMICONDUCTOR MANUFACTURING EQUI...
- Publication number 20160103445
- Publication date Apr 14, 2016
- LAM RESEARCH CORPORATION
- Roger Patrick
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR DIAGNOSING STATUS OF PARTS IN REAL TIME IN...
- Publication number 20160103088
- Publication date Apr 14, 2016
- Lam Research Corporation
- Roger PATRICK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
- Publication number 20130337654
- Publication date Dec 19, 2013
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DIAGNOSING STATUS OF PARTS IN REAL TIME IN...
- Publication number 20130093443
- Publication date Apr 18, 2013
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
- Publication number 20120258603
- Publication date Oct 11, 2012
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY
- Publication number 20120175062
- Publication date Jul 12, 2012
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODES
- Publication number 20120160941
- Publication date Jun 28, 2012
- LAM RESEARCH CORPORATION
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Clamped monolithic showerhead electrode
- Publication number 20100003829
- Publication date Jan 7, 2010
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...
- Publication number 20090236040
- Publication date Sep 24, 2009
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCO...
- Publication number 20090095424
- Publication date Apr 16, 2009
- LAM RESEARCH CORPORATION
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for diagnosing status of parts in real time in...
- Publication number 20090061542
- Publication date Mar 5, 2009
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...
- Publication number 20080308229
- Publication date Dec 18, 2008
- LAM RESEARCH CORPORATION
- Roger Patrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods and apparatus for optimizing a substrate in a plasma proces...
- Publication number 20050205532
- Publication date Sep 22, 2005
- Roger Patrick
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
APPARATUS FOR IMPROVING ETCH UNIFORMITY AND METHODS THEREFOR
- Publication number 20010049196
- Publication date Dec 6, 2001
- ROGER PATRICK
- H01 - BASIC ELECTRIC ELEMENTS

Roger Patrick

Person

Patents Grantslast 30 patents

Method and apparatus for diagnosing status of parts in real time in...

Method and apparatus for diagnosing status of parts in real time in...

Clamped monolithic showerhead electrode

Cam-locked showerhead electrode and assembly

Clamped monolithic showerhead electrode

Method and apparatus for diagnosing status of parts in real time in...

Showerhead electrodes

Clamped monolithic showerhead electrode

Electrode assembly and plasma processing chamber utilizing thermall...

Electrode assembly and plasma processing chamber utilizing thermall...

Showerhead electrode assemblies and plasma processing chambers inco...

Architecture for general purpose programmable semiconductor process...

Methods and apparatus for optimizing a substrate in a plasma proces...

Methods for reducing plasma-induced charging damage

Methods and apparatus for controlling ion energy and plasma density...

Methods and apparatus for reducing charging during plasma processing

Methods and apparatus for detecting pattern dependent charging on a...

Patents Applicationslast 30 patents

COMPACT HIGH DENSITY PLASMA SOURCE

MOBILE DEVICE USER INTERFACE FOR SUPPORTING SERVICE MAINTENANCE AND...

MOBILE CONNECTIVITY AND CONTROL OF SEMICONDUCTOR MANUFACTURING EQUI...

METHOD AND APPARATUS FOR DIAGNOSING STATUS OF PARTS IN REAL TIME IN...

CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE

METHOD AND APPARATUS FOR DIAGNOSING STATUS OF PARTS IN REAL TIME IN...

CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE

CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY

SHOWERHEAD ELECTRODES

Clamped monolithic showerhead electrode

ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...

SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCO...

Method and apparatus for diagnosing status of parts in real time in...

ELECTRODE ASSEMBLY AND PLASMA PROCESSING CHAMBER UTILIZING THERMALL...

Methods and apparatus for optimizing a substrate in a plasma proces...

APPARATUS FOR IMPROVING ETCH UNIFORMITY AND METHODS THEREFOR