Ryuichi KOSUGE

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing device, polishing method, and recording medium for record...
- Patent number 11,980,998
- Issue date May 14, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,839,948
- Issue date Dec 12, 2023
- Ebara Corporation
- Takashi Yamazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing table and polishing apparatus having ihe same
- Patent number 11,433,502
- Issue date Sep 6, 2022
- Ebara Corporation
- Kenichiro Saito
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,926,374
- Issue date Feb 23, 2021
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate transport apparatus, substrate processing apparatus, and...
- Patent number 10,816,259
- Issue date Oct 27, 2020
- Ebara Corporation
- Kenichi Suzuki
- F26 - DRYING
Information Patent Grant
Apparatus for cleaning a polishing surface, polishing apparatus, an...
- Patent number 10,661,411
- Issue date May 26, 2020
- Ebara Corporation
- Ryuichi Kosuge
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and substrate presence or absence ch...
- Patent number 10,157,762
- Issue date Dec 18, 2018
- Ebara Corporation
- Tomohiro Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary joint and polishing apparatus
- Patent number 9,764,446
- Issue date Sep 19, 2017
- Ebara Corporation
- Hideo Aizawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and wear detection method
- Patent number 9,530,704
- Issue date Dec 27, 2016
- Ebara Corporation
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,522,453
- Issue date Dec 20, 2016
- Ebara Corporation
- Hideo Aizawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,434,044
- Issue date Sep 6, 2016
- Ebara Corporation
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,409,277
- Issue date Aug 9, 2016
- Ebara Corporation
- Masao Umemoto
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus with polishing head cover
- Patent number 9,174,324
- Issue date Nov 3, 2015
- Ebara Corporation
- Masao Umemoto
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and wear detection method
- Patent number 9,144,878
- Issue date Sep 29, 2015
- Ebara Corporation
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,028,297
- Issue date May 12, 2015
- Ebara Corporation
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for dressing a polishing pad, chemical mechanical polishi...
- Patent number 8,382,558
- Issue date Feb 26, 2013
- Ebara Corporation
- Katsuhide Watanabe
- B24 - GRINDING POLISHING
Information Patent Grant
Liquid supply method, liquid supply apparatus, substrate polishing...
- Patent number 8,298,369
- Issue date Oct 30, 2012
- Ebara Corporation
- Koji Maeda
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device and substrate processing device
- Patent number 7,850,817
- Issue date Dec 14, 2010
- Ebara Corporation
- Satoshi Wakabayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for heating or cooling a polishing surface of a polishing...
- Patent number 7,837,534
- Issue date Nov 23, 2010
- Ebara Corporation
- Shunichi Aiyoshizawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CONVEYANCE METHOD, SUBSTRATE PROCESSING DEVICE, AND RECOR...
- Publication number 20230230863
- Publication date Jul 20, 2023
- EBARA CORPORATION
- MATSUTARO MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING DEVICE, POLISHING METHOD, AND RECORDING MEDIUM FOR RECORD...
- Publication number 20200269385
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20200171621
- Publication date Jun 4, 2020
- EBARA CORPORATION
- Takashi Yamazaki
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF DETECTING A POLISHING SURFACE OF A POLISHING PAD USING A...
- Publication number 20190351526
- Publication date Nov 21, 2019
- EBARA CORPORATION
- Masao UMEMOTO
- G01 - MEASURING TESTING
Information Patent Application
POLISHING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190299360
- Publication date Oct 3, 2019
- EBARA CORPORATION
- Tadakazu SONE
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING TABLE AND POLISHING APPARATUS HAVING THE SAME
- Publication number 20180345447
- Publication date Dec 6, 2018
- EBARA CORPORATION
- Kenichiro SAITO
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170291274
- Publication date Oct 12, 2017
- EBARA CORPORATION
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND...
- Publication number 20170284727
- Publication date Oct 5, 2017
- EBARA CORPORATION
- Kenichi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PRESENCE OR ABSENCE CH...
- Publication number 20170287755
- Publication date Oct 5, 2017
- EBARA CORPORATION
- Tomohiro TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE TRANSPORT DEVICE
- Publication number 20160233118
- Publication date Aug 11, 2016
- Ryuichi KOSUGE
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
APPARATUS FOR CLEANING A POLISHING SURFACE, POLISHING APPARATUS, AN...
- Publication number 20160144478
- Publication date May 26, 2016
- EBARA CORPORATION
- Ryuichi Kosuge
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
POLISHING APPARATUS
- Publication number 20160008948
- Publication date Jan 14, 2016
- EBARA CORPORATION
- Hideo AIZAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND WEAR DETECTION METHOD
- Publication number 20150364391
- Publication date Dec 17, 2015
- EBARA CORPORATION
- Ryuichi Kosuge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTARY JOINT AND POLISHING APPARATUS
- Publication number 20150290769
- Publication date Oct 15, 2015
- EBARA CORPORATION
- Hideo AIZAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20150273649
- Publication date Oct 1, 2015
- EBARA CORPORATION
- Ryuichi KOSUGE
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS, METHOD FOR ATTACHING POLISHING PAD, AND METHOD...
- Publication number 20150118944
- Publication date Apr 30, 2015
- EBARA CORPORATION
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20150017889
- Publication date Jan 15, 2015
- EBARA CORPORATION
- Masao Umemoto
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND WEAR DETECTION METHOD
- Publication number 20140295737
- Publication date Oct 2, 2014
- Ryuichi Kosuge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20140213158
- Publication date Jul 31, 2014
- EBARA CORPORATION
- Masao UMEMOTO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20140162536
- Publication date Jun 12, 2014
- Masao UMEMOTO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20140080385
- Publication date Mar 20, 2014
- Masao UMEMOTO
- B24 - GRINDING POLISHING
Information Patent Application
WORKPIECE TRANSPORT DEVICE
- Publication number 20140030048
- Publication date Jan 30, 2014
- EBARA CORPORATION
- Ryuichi KOSUGE
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
POLISHING APPARATUS
- Publication number 20130210324
- Publication date Aug 15, 2013
- EBARA CORPORATION
- Ryuichi KOSUGE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBST...
- Publication number 20120193506
- Publication date Aug 2, 2012
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR DRESSING A POLISHING PAD, CHEMICAL MECHANICAL POLISHI...
- Publication number 20100190417
- Publication date Jul 29, 2010
- Katsuhide WATANABE
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing apparatus, substrate transfer apparatus, subst...
- Publication number 20090067959
- Publication date Mar 12, 2009
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus for heating or cooling a polishing surface of a polishing...
- Publication number 20080311823
- Publication date Dec 18, 2008
- Shunichi Aiyoshizawa
- B24 - GRINDING POLISHING
Information Patent Application
Liquid supply method, liquid supply apparatus, substrate polishing...
- Publication number 20070221615
- Publication date Sep 27, 2007
- Koji Maeda
- B24 - GRINDING POLISHING
Information Patent Application
Polishing device and substrate processing device
- Publication number 20040261944
- Publication date Dec 30, 2004
- Satoshi Wakabayashi
- B24 - GRINDING POLISHING

Ryuichi KOSUGE

Person

Patents Grantslast 30 patents

Polishing device, polishing method, and recording medium for record...

Polishing apparatus

Polishing table and polishing apparatus having ihe same

Substrate processing apparatus

Substrate transport apparatus, substrate processing apparatus, and...

Apparatus for cleaning a polishing surface, polishing apparatus, an...

Substrate processing apparatus and substrate presence or absence ch...

Rotary joint and polishing apparatus

Polishing apparatus and wear detection method

Polishing apparatus

Polishing apparatus

Polishing apparatus and polishing method

Polishing apparatus with polishing head cover

Polishing apparatus and wear detection method

Polishing apparatus

Apparatus for dressing a polishing pad, chemical mechanical polishi...

Liquid supply method, liquid supply apparatus, substrate polishing...

Polishing device and substrate processing device

Apparatus for heating or cooling a polishing surface of a polishing...

Patents Applicationslast 30 patents

SUBSTRATE CONVEYANCE METHOD, SUBSTRATE PROCESSING DEVICE, AND RECOR...

POLISHING DEVICE, POLISHING METHOD, AND RECORDING MEDIUM FOR RECORD...

POLISHING APPARATUS

METHOD OF DETECTING A POLISHING SURFACE OF A POLISHING PAD USING A...

POLISHING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

POLISHING TABLE AND POLISHING APPARATUS HAVING THE SAME

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PRESENCE OR ABSENCE CH...

WORKPIECE TRANSPORT DEVICE

APPARATUS FOR CLEANING A POLISHING SURFACE, POLISHING APPARATUS, AN...

POLISHING APPARATUS

POLISHING APPARATUS AND WEAR DETECTION METHOD

ROTARY JOINT AND POLISHING APPARATUS

POLISHING APPARATUS

POLISHING APPARATUS, METHOD FOR ATTACHING POLISHING PAD, AND METHOD...

POLISHING APPARATUS

POLISHING APPARATUS AND WEAR DETECTION METHOD

POLISHING APPARATUS

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS

WORKPIECE TRANSPORT DEVICE

POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBST...

APPARATUS FOR DRESSING A POLISHING PAD, CHEMICAL MECHANICAL POLISHI...

Substrate processing apparatus, substrate transfer apparatus, subst...

Apparatus for heating or cooling a polishing surface of a polishing...

Liquid supply method, liquid supply apparatus, substrate polishing...

Polishing device and substrate processing device