Samuel S. Antley

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Mesa, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Inductively coupled high-density plasma source
- Patent number 7,482,757
- Issue date Jan 27, 2009
- Tokyo Electron Limited
- Bill H. Quon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Closed-drift hall effect plasma vacuum pump for process reactors
- Patent number 6,899,527
- Issue date May 31, 2005
- Tokyo Electron Limited
- Bill H Quon
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Applied plasma duct system
- Patent number 6,729,850
- Issue date May 4, 2004
- Tokyo Electron Limited
- Raphael A. Dandl
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for measuring plasma density in processing rea...
- Publication number 20070074811
- Publication date Apr 5, 2007
- Paul Moroz
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Temperature control of plasma density probe
- Publication number 20070074812
- Publication date Apr 5, 2007
- Andrej Mitrovic
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Inductively coupled high-density plasma source
- Publication number 20050099133
- Publication date May 12, 2005
- Bill H. Quon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Closed-drift hall effect plasma vacuum pump for process reactors
- Publication number 20040151595
- Publication date Aug 5, 2004
- TOKYO ELECTRON LIMITED
- Bill H. Quon
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Applied plasma duct system
- Publication number 20030117080
- Publication date Jun 26, 2003
- Raphael A. Dandl
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR