Samuel S. Pak

Person

San Ramon, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Spatial deposition of material using short-distance reciprocating m...
- Patent number 9,556,514
- Issue date Jan 31, 2017
- Veeco ALD Inc.
- Jeong Ah Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of deposition device by injecting cleaning gas into deposi...
- Patent number 9,546,423
- Issue date Jan 17, 2017
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radical reactor with inverted orientation
- Patent number 9,435,030
- Issue date Sep 6, 2016
- Veeco ALD Inc.
- Daniel Ho Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scanning injector assembly module for processing substrate
- Patent number 9,145,608
- Issue date Sep 29, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injection plate
- Patent number D732092
- Issue date Jun 16, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- D15 - Machines not elsewhere specified
Information Patent Grant
Gas tube assembly
- Patent number D732093
- Issue date Jun 16, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- D15 - Machines not elsewhere specified
Information Patent Grant
Methods and systems of transferring, docking and processing substrates
- Patent number 8,367,565
- Issue date Feb 5, 2013
- Archers Inc.
- Lawrence Chung-Lai Lei
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods and systems of transferring, docking and processing substrates
- Patent number 8,268,734
- Issue date Sep 18, 2012
- Archers Inc.
- Lawrence Chung-Lai Lei
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods and systems of transferring, docking and processing substrates
- Patent number 7,897,525
- Issue date Mar 1, 2011
- Archers Inc.
- Lawrence Chung-Lai Lei
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus and method for processing substrates using one or more va...
- Patent number 7,628,574
- Issue date Dec 8, 2009
- Arcus Technology, Inc.
- Samuel S. Pak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Radical Reactor With Inverted Orientation
- Publication number 20160340779
- Publication date Nov 24, 2016
- Veeco ALD Inc.
- Daniel Ho Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Linear Deposition Apparatus with Modular Assembly
- Publication number 20150360242
- Publication date Dec 17, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Injection Assembly in Linear Deposition Apparatus with Bulging Ridg...
- Publication number 20150361548
- Publication date Dec 17, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition Using Injector Module Arrays
- Publication number 20150275365
- Publication date Oct 1, 2015
- Veeco ALD Inc.
- Samuel S. Pak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF DEPOSITION DEVICE BY INJECTING CLEANING GAS INTO DEPOSI...
- Publication number 20150259793
- Publication date Sep 17, 2015
- Veeco ALD Inc.
- Sang In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIAL DEPOSITION OF MATERIAL USING SHORT-DISTANCE RECIPROCATING M...
- Publication number 20150218698
- Publication date Aug 6, 2015
- Veeco ALD Inc.
- Jeong Ah Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADICAL REACTOR WITH INVERTED ORIENTATION
- Publication number 20150125627
- Publication date May 7, 2015
- Veeco ALD Inc.
- Daniel Ho Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Performing Atomic Layer Deposition on Large Substrate Using Scannin...
- Publication number 20140366804
- Publication date Dec 18, 2014
- Samuel S. Pak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Scanning Injector Assembly Module for Processing Substrate
- Publication number 20130260034
- Publication date Oct 3, 2013
- Synos Technology, Inc.
- Samuel S. Pak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Systems of Transferring, Docking and Processing Substrates
- Publication number 20110217469
- Publication date Sep 8, 2011
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Systems of Transferring, Docking and Processing Substrates
- Publication number 20110151119
- Publication date Jun 23, 2011
- Lawrence Chung-Lai Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods for substrate processing
- Publication number 20100162955
- Publication date Jul 1, 2010
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and systems of transferring, docking and processing substrates
- Publication number 20100167503
- Publication date Jul 1, 2010
- Lawrence Chung-Lai Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATES USING ONE OR MORE VA...
- Publication number 20070231109
- Publication date Oct 4, 2007
- Samuel S. Pak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Samuel S. Pak

Person

Patents Grantslast 30 patents

Spatial deposition of material using short-distance reciprocating m...

Cleaning of deposition device by injecting cleaning gas into deposi...

Radical reactor with inverted orientation

Scanning injector assembly module for processing substrate

Gas injection plate

Gas tube assembly

Methods and systems of transferring, docking and processing substrates

Methods and systems of transferring, docking and processing substrates

Methods and systems of transferring, docking and processing substrates

Apparatus and method for processing substrates using one or more va...

Patents Applicationslast 30 patents

Radical Reactor With Inverted Orientation

Linear Deposition Apparatus with Modular Assembly

Injection Assembly in Linear Deposition Apparatus with Bulging Ridg...

Atomic Layer Deposition Using Injector Module Arrays

CLEANING OF DEPOSITION DEVICE BY INJECTING CLEANING GAS INTO DEPOSI...

SPATIAL DEPOSITION OF MATERIAL USING SHORT-DISTANCE RECIPROCATING M...

RADICAL REACTOR WITH INVERTED ORIENTATION

Performing Atomic Layer Deposition on Large Substrate Using Scannin...

Scanning Injector Assembly Module for Processing Substrate

Methods and Systems of Transferring, Docking and Processing Substrates

Methods and Systems of Transferring, Docking and Processing Substrates

Systems and methods for substrate processing

Methods and systems of transferring, docking and processing substrates

APPARATUS AND METHOD FOR PROCESSING SUBSTRATES USING ONE OR MORE VA...