Sangjine PARK

Person

Suwon-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for drying substrate
- Patent number 12,308,255
- Issue date May 20, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing equipment and method of manufacturing semiconducto...
- Patent number 12,287,147
- Issue date Apr 29, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transferring unit, substrate processing apparatus, and su...
- Patent number 12,278,133
- Issue date Apr 15, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for drying wafer and method for drying wafer
- Patent number 12,216,408
- Issue date Feb 4, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,716
- Issue date Jan 28, 2025
- Semes Co., Ltd.
- Jaeseong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 12,198,923
- Issue date Jan 14, 2025
- Semes Co., Ltd.
- Hae-Won Choi
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing method, micropattern forming method, and subst...
- Patent number 12,057,323
- Issue date Aug 6, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for processing a substrate
- Patent number 11,935,772
- Issue date Mar 19, 2024
- Samsung Electronics Co., Ltd.
- Seohyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transferring unit, substrate processing apparatus, and su...
- Patent number 11,881,426
- Issue date Jan 23, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, semiconductor manufacturing equipme...
- Patent number 11,640,115
- Issue date May 2, 2023
- Samsung Electronics Co., Ltd.
- Jihoon Jeong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer cleaning apparatus based on light irradiation and wafer clean...
- Patent number 11,527,399
- Issue date Dec 13, 2022
- Samsung Electronics Co., Ltd.
- Byungkwon Cho
- B08 - CLEANING
Information Patent Grant
Semiconductor devices having landing pads
- Patent number 11,424,202
- Issue date Aug 23, 2022
- Samsung Electronics Co., Ltd.
- Bowo Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including vertical structures and a method of...
- Patent number 11,393,977
- Issue date Jul 19, 2022
- Samsung Electronics Co., Ltd.
- Jaeuk Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supercritical drying apparatus and method of drying substrate using...
- Patent number 11,302,526
- Issue date Apr 12, 2022
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including a data storage material pattern
- Patent number 11,217,748
- Issue date Jan 4, 2022
- Samsung Electronics Co., Ltd.
- Youngtak Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of fabricating the same
- Patent number 10,714,472
- Issue date Jul 14, 2020
- Samsung Electronics Co., Ltd.
- Kee Sang Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods for manufacturing the same
- Patent number 10,128,336
- Issue date Nov 13, 2018
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices including field effect transistors and method...
- Patent number 10,084,051
- Issue date Sep 25, 2018
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices including an etch stop pattern and a sacrific...
- Patent number 9,966,432
- Issue date May 8, 2018
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device for manufacturing
- Patent number 9,960,241
- Issue date May 1, 2018
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices having spacer protection pattern
- Patent number 9,859,432
- Issue date Jan 2, 2018
- Samsung Electronics, Inc.
- Yongsun Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of fabricating the same
- Patent number 9,748,234
- Issue date Aug 29, 2017
- Samsung Electronics Co., Ltd.
- Kee Sang Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 9,716,162
- Issue date Jul 25, 2017
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having dual metal silicide layers and method o...
- Patent number 9,117,692
- Issue date Aug 25, 2015
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having metal plug and method of manufacturing...
- Patent number 8,841,769
- Issue date Sep 23, 2014
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices including compressive stress patterns and met...
- Patent number 8,735,239
- Issue date May 27, 2014
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LAPPING APPARATUS AND SUBSTRATE LAPPING METHOD USING THE...
- Publication number 20250235980
- Publication date Jul 24, 2025
- Samsung Electronics Co., Ltd.
- SUKHOON JEONG
- B24 - GRINDING POLISHING
Information Patent Application
INTEGRATED CIRCUIT DEVICE
- Publication number 20250234625
- Publication date Jul 17, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
Information Patent Application
WAFER PROCESSING EQUIPMENT AND METHOD OF MANUFACTURING SEMICONDUCTO...
- Publication number 20250224177
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING HEAD, SUBSTRATE CLEANING MODULE INCLUDING THE SA...
- Publication number 20250214114
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- B08 - CLEANING
Information Patent Application
SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20250210405
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
- Publication number 20250192040
- Publication date Jun 12, 2025
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT DEVICE
- Publication number 20250194215
- Publication date Jun 12, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
Information Patent Application
INTEGRATED CIRCUIT DEVICE
- Publication number 20250185293
- Publication date Jun 5, 2025
- Samsung Electronics Co., Ltd.
- Taesun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20250169108
- Publication date May 22, 2025
- Samsung Electronics Co., Ltd.
- Taesun KIM
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20250167141
- Publication date May 22, 2025
- Samsung Electronics, Co., Ltd.
- YoungJun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DRYING WAFER AND METHOD FOR DRYING WAFER
- Publication number 20250155816
- Publication date May 15, 2025
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED CIRCUIT DEVICE
- Publication number 20250157896
- Publication date May 15, 2025
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT DEVICES
- Publication number 20250038110
- Publication date Jan 30, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20250029845
- Publication date Jan 23, 2025
- Samsung Electronics Co., Ltd.
- Hunjae JANG
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...
- Publication number 20250014915
- Publication date Jan 9, 2025
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240339334
- Publication date Oct 10, 2024
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDI...
- Publication number 20240280906
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20240242985
- Publication date Jul 18, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BAFFLE INSPECTION APPARATUS
- Publication number 20240192071
- Publication date Jun 13, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDI...
- Publication number 20240175629
- Publication date May 30, 2024
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- F26 - DRYING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240178024
- Publication date May 30, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20240173751
- Publication date May 30, 2024
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- B08 - CLEANING
Information Patent Application
FLUIDIC BAFFLE FOR HIGH PRESSURE FLUID DISTRIBUTION AND SUBSTRATE P...
- Publication number 20240167156
- Publication date May 23, 2024
- SEMES CO., LTD.
- Hyungseok KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...
- Publication number 20240170306
- Publication date May 23, 2024
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240149312
- Publication date May 9, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- B08 - CLEANING
Information Patent Application
SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20240120232
- Publication date Apr 11, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPERCRITICAL FLUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATU...
- Publication number 20240069451
- Publication date Feb 29, 2024
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240036476
- Publication date Feb 1, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...
- Publication number 20230400252
- Publication date Dec 14, 2023
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE WEIGHT MEASUREMENT APPARATUS, A SUBSTRATE PROCESSING APPA...
- Publication number 20230384681
- Publication date Nov 30, 2023
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Sangjine PARK

Person

Patents Grantslast 30 patents

Apparatus and method for drying substrate

Wafer processing equipment and method of manufacturing semiconducto...

Substrate transferring unit, substrate processing apparatus, and su...

Apparatus for drying wafer and method for drying wafer

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing system

Substrate processing method, micropattern forming method, and subst...

Apparatus for processing a substrate

Substrate transferring unit, substrate processing apparatus, and su...

Substrate processing apparatus, semiconductor manufacturing equipme...

Wafer cleaning apparatus based on light irradiation and wafer clean...

Semiconductor devices having landing pads

Semiconductor device including vertical structures and a method of...

Supercritical drying apparatus and method of drying substrate using...

Semiconductor device including a data storage material pattern

Semiconductor devices and methods of fabricating the same

Semiconductor devices and methods for manufacturing the same

Semiconductor devices including field effect transistors and method...

Semiconductor devices including an etch stop pattern and a sacrific...

Semiconductor device for manufacturing

Semiconductor devices having spacer protection pattern

Semiconductor devices and methods of fabricating the same

Semiconductor device and method of fabricating the same

Semiconductor device having dual metal silicide layers and method o...

Semiconductor device having metal plug and method of manufacturing...

Semiconductor devices including compressive stress patterns and met...

Patents Applicationslast 30 patents

SUBSTRATE LAPPING APPARATUS AND SUBSTRATE LAPPING METHOD USING THE...

INTEGRATED CIRCUIT DEVICE

WAFER PROCESSING EQUIPMENT AND METHOD OF MANUFACTURING SEMICONDUCTO...

SUBSTRATE CLEANING HEAD, SUBSTRATE CLEANING MODULE INCLUDING THE SA...

SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

INTEGRATED CIRCUIT DEVICE

INTEGRATED CIRCUIT DEVICE

INTEGRATED CIRCUIT DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

APPARATUS FOR DRYING WAFER AND METHOD FOR DRYING WAFER

INTEGRATED CIRCUIT DEVICE

INTEGRATED CIRCUIT DEVICES

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDI...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...

BAFFLE INSPECTION APPARATUS

SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDI...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING...

FLUIDIC BAFFLE FOR HIGH PRESSURE FLUID DISTRIBUTION AND SUBSTRATE P...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...

SUPERCRITICAL FLUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATU...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...

SUBSTRATE WEIGHT MEASUREMENT APPARATUS, A SUBSTRATE PROCESSING APPA...