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Sanjay Gopinath
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-layer feature fill
Patent number
12,014,928
Issue date
Jun 18, 2024
Lam Research Corporation
Xiaolan Ba
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for preventing line bending during metal fill process
Patent number
11,355,345
Issue date
Jun 7, 2022
Lam Research Corporation
Adam Jandl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal fill process for three-dimensional vertical NAND wordline
Patent number
11,348,795
Issue date
May 31, 2022
Lam Research Corporation
Lawrence Schloss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for preventing line bending during metal fill process
Patent number
10,573,522
Issue date
Feb 25, 2020
Lam Research Corporation
Adam Jandl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact integration for reduced interface and series contact resist...
Patent number
9,484,251
Issue date
Nov 1, 2016
Lam Research Corporation
Paul Raymond Besser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to tune TiOx stoichiometry using atomic layer deposited Ti f...
Patent number
9,478,411
Issue date
Oct 25, 2016
Lam Research Corporation
Shruti Vivek Thombare
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus to deposit pure titanium thin film at low temp...
Patent number
9,478,438
Issue date
Oct 25, 2016
Lam Research Corporation
Shruti Vivek Thombare
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery
Patent number
9,447,499
Issue date
Sep 20, 2016
Novellus Systems, Inc.
Shambhu N. Roy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for void-free cobalt gap fill
Patent number
9,349,637
Issue date
May 24, 2016
Lam Research Corporation
Jeong-Seok Na
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for remote plasma atomic layer deposition
Patent number
9,255,326
Issue date
Feb 9, 2016
Novellus Systems, Inc.
Jeong-Seok Na
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conformal films on semiconductor substrates
Patent number
9,117,884
Issue date
Aug 25, 2015
Novellus Systems, Inc.
Roey Shaviv
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conformal films on semiconductor substrates
Patent number
8,298,933
Issue date
Oct 30, 2012
Novellus Systems, Inc.
Roey Shaviv
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and methods for processing semiconductor substrates using...
Patent number
7,503,334
Issue date
Mar 17, 2009
Novellus Systems, Inc.
Krishnan Shrinivasan
B08 - CLEANING
Information
Patent Grant
Method for enhancing the nucleation and morphology of ruthenium fil...
Patent number
7,456,101
Issue date
Nov 25, 2008
Novellus Systems, Inc.
Sanjay Gopinath
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Use of metallocenes to inhibit copper oxidation during semiconducto...
Patent number
7,279,417
Issue date
Oct 9, 2007
Novellus Systems, Inc.
Jeremie Dalton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for enhancing the nucleation and morphology of ruthenium fil...
Patent number
7,211,509
Issue date
May 1, 2007
Novellus Systems, Inc,
Sanjay Gopinath
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface treatment using iodine plasma to improve metal deposition
Patent number
7,041,596
Issue date
May 9, 2006
Novellus Systems, Inc.
Jeremie James Dalton
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition for fabricating thin films
Patent number
7,037,574
Issue date
May 2, 2006
Veeco Instruments, Inc.
Ajit P. Paranjpe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for introduction of solid precursors and react...
Patent number
6,951,765
Issue date
Oct 4, 2005
Novellus Systems, Inc.
Sanjay Gopinath
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and methods for processing semiconductor substrates using...
Patent number
6,848,458
Issue date
Feb 1, 2005
Novellus Systems, Inc.
Krishnan Shrinivasan
B08 - CLEANING
Information
Patent Grant
Microelectronic interconnect material with adhesion promotion layer...
Patent number
6,645,847
Issue date
Nov 11, 2003
CVC Products, Inc.
Ajit P. Paranjpe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microelectronic interconnect material with adhesion promotion layer...
Patent number
6,627,995
Issue date
Sep 30, 2003
CVC Products, Inc.
Ajit P. Paranjpe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for maintaining wafer back side and edge exclusion during...
Patent number
6,550,484
Issue date
Apr 22, 2003
Novellus Systems, Inc.
Sanjay Gopinath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of chemical-vapor deposition of a material
Patent number
6,444,263
Issue date
Sep 3, 2002
CVC Products, Inc.
Ajit P. Paranjpe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Microelectronic interconnect material with adhesion promotion layer...
Patent number
6,365,502
Issue date
Apr 2, 2002
CVC Products, Inc.
Ajit P. Paranjpe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
REDUCING LINE BENDING DURING METAL FILL PROCESS
Publication number
20240158913
Publication date
May 16, 2024
LAM RESEARCH CORPORATION
Anand Chandrashekar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
Publication number
20240136192
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Lawrence Schloss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PERFORMANCE PREDICTORS FOR SEMICONDUCTOR-MANUFACTURING PROCESSES
Publication number
20230049157
Publication date
Feb 16, 2023
LAM RESEARCH CORPORATION
Kapil Umesh Sawlani
G05 - CONTROLLING REGULATING
Information
Patent Application
TUNGSTEN DEPOSITION
Publication number
20220364232
Publication date
Nov 17, 2022
LAM RESEARCH CORPORATION
Pragna NANNAPANENI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL DEPOSITION
Publication number
20220290300
Publication date
Sep 15, 2022
LAM RESEARCH CORPORATION
Ravi Vellanki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PREVENTING LINE BENDING DURING METAL FILL PROCESS
Publication number
20220262640
Publication date
Aug 18, 2022
LAM RESEARCH CORPORATION
Adam Jandl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NUCLEATION-FREE TUNGSTEN DEPOSITION
Publication number
20220254685
Publication date
Aug 11, 2022
LAM RESEARCH CORPORATION
Sema ERMEZ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RAPID FLUSH PURGING DURING ATOMIC LAYER DEPOSITION
Publication number
20220186370
Publication date
Jun 16, 2022
LAM RESEARCH CORPORATION
Pragna Nannapaneni
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-LAYER FEATURE FILL
Publication number
20210313183
Publication date
Oct 7, 2021
LAM RESEARCH CORPORATION
Xiaolan Ba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL FILL PROCESS FOR THREE-DIMENSIONAL VERTICAL NAND WORDLINE
Publication number
20200211853
Publication date
Jul 2, 2020
LAM RESEARCH CORPORATION
Lawrence Schloss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PREVENTING LINE BENDING DURING METAL FILL PROCESS
Publication number
20200144066
Publication date
May 7, 2020
LAM RESEARCH CORPORATION
Adam Jandl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PREVENTING LINE BENDING DURING METAL FILL PROCESS
Publication number
20180053660
Publication date
Feb 22, 2018
LAM RESEARCH CORPORATION
Adam Jandl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTILAYER FILM INCLUDING A TANTALUM AND TITANIUM ALLOY AS A SCALAB...
Publication number
20170170114
Publication date
Jun 15, 2017
LAM RESEARCH CORPORATION
Paul Raymond Besser
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Application
METHOD FOR VOID-FREE COBALT GAP FILL
Publication number
20160056074
Publication date
Feb 25, 2016
LAM RESEARCH CORPORATION
Jeong-Seok Na
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD TO TUNE TIOX STOICHIOMETRY USING ATOMIC LAYER DEPOSITED TI F...
Publication number
20160056037
Publication date
Feb 25, 2016
LAM RESEARCH CORPORATION
Shruti Vivek Thombare
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS TO DEPOSIT PURE TITANIUM THIN FILM AT LOW TEMP...
Publication number
20160056053
Publication date
Feb 25, 2016
LAM RESEARCH CORPORATION
Shruti Vivek Thombare
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR REMOTE PLASMA ATOMIC LAYER DEPOSITION
Publication number
20140272185
Publication date
Sep 18, 2014
Jeong-Seok Na
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DUAL PLENUM, AXI-SYMMETRIC SHOWERHEAD WITH EDGE-TO-CENTER GAS DELIVERY
Publication number
20130341433
Publication date
Dec 26, 2013
Shambhu N. Roy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Conformal Films on Semiconductor Substrates
Publication number
20100009533
Publication date
Jan 14, 2010
Novellus Systems, Inc.
Roey Shaviv
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Atomic layer deposition for fabricating thin films
Publication number
20030003635
Publication date
Jan 2, 2003
Ajit P. Paranjpe
B82 - NANO-TECHNOLOGY
Information
Patent Application
Microelectronic interconnect material with adhesion promotion layer...
Publication number
20020137332
Publication date
Sep 26, 2002
CVC Products, Inc., a Delware corporation
Ajit P. Paranjpe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Microelectronic interconnect material with adhesion promotion layer...
Publication number
20020102838
Publication date
Aug 1, 2002
CVC Products, Inc., a Delaware corporation
Ajit P. Paranjpe
H01 - BASIC ELECTRIC ELEMENTS