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Patents Grants
last 30 patents
Information
Patent Grant
Parasitic plasma prevention in plasma processing chambers
Patent number
9,728,429
Issue date
Aug 8, 2017
Lam Research Corporation
Anthony Ricci
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
Patent number
9,093,483
Issue date
Jul 28, 2015
Lam Research Corporation
Jason Augustino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for testing an electrostatic chuck
Patent number
9,082,805
Issue date
Jul 14, 2015
Lam Research Corporation
Hong Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma confinement ring assembly for plasma processing chambers
Patent number
9,076,826
Issue date
Jul 7, 2015
Lam Research Corporation
Anthony de la Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and arrangement for plasma dechuck optimization based on co...
Patent number
8,797,705
Issue date
Aug 5, 2014
Lam Research Corporation
John C. Valcore
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Upper electrode backing member with particle reducing features
Patent number
8,709,202
Issue date
Apr 29, 2014
Lam Research Corporation
Anthony De La Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
Patent number
8,702,866
Issue date
Apr 22, 2014
Lam Research Corporation
Jason Augustino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for temperature control of a semiconductor sub...
Patent number
8,410,393
Issue date
Apr 2, 2013
Lam Research Corporation
Anthony Ricci
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Showerhead electrode assemblies for plasma processing apparatuses
Patent number
8,313,665
Issue date
Nov 20, 2012
Lam Research Corporation
Thomas R. Stevenson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for testing an electrostatic chuck
Patent number
8,143,904
Issue date
Mar 27, 2012
Lam Research Corporation
Hong Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing chamber with guard ring for upper electrode assembly
Patent number
7,939,778
Issue date
May 10, 2011
Lam Research Corporation
Dean J. Larson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Showerhead electrode assemblies for plasma processing apparatuses
Patent number
7,862,682
Issue date
Jan 4, 2011
Lam Research Corporation
Thomas R. Stevenson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Upper electrode backing member with particle reducing features
Patent number
7,854,820
Issue date
Dec 21, 2010
Lam Research Corporation
Anthony De La Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ pre-coating of plasma etch chamber for improved productivit...
Patent number
7,767,584
Issue date
Aug 3, 2010
Lam Research Corporation
Harmeet Singh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to improve profile control and N/P loading in dual doped gat...
Patent number
7,682,980
Issue date
Mar 23, 2010
Lam Research Corporation
Helene Del Puppo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Quartz guard ring
Patent number
7,482,550
Issue date
Jan 27, 2009
Lam Research Corporation
Dean J. Larson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ pre-coating of plasma etch chamber for improved productivit...
Patent number
7,204,913
Issue date
Apr 17, 2007
Lam Research Corporation
Harmeet Singh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to improve profile control and N/P loading in dual doped gat...
Patent number
7,186,661
Issue date
Mar 6, 2007
Lam Research Corporation
Helene Del Puppo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ cleaning of a polymer coated plasma processing chamber
Patent number
6,994,769
Issue date
Feb 7, 2006
Lam Research Corporation
Harmeet Singh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
In-situ cleaning of a polymer coated plasma processing chamber
Patent number
6,776,851
Issue date
Aug 17, 2004
Lam Research Corporation
Harmeet Singh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...
Publication number
20140187049
Publication date
Jul 3, 2014
LAM RESEARCH CORPORATION
Jason Augustino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHOD FOR TESTING AN ELECTROSTATIC CHUCK
Publication number
20120153971
Publication date
Jun 21, 2012
Hong Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CONFINEMENT RING ASSEMBLY FOR PLASMA PROCESSING CHAMBERS
Publication number
20120073754
Publication date
Mar 29, 2012
LAM RESEARCH CORPORATION
Anthony de la Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARASITIC PLASMA PREVENTION IN PLASMA PROCESSING CHAMBERS
Publication number
20120024449
Publication date
Feb 2, 2012
LAM RESEARCH CORPORATION
Anthony Ricci
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR TEMPERATURE CONTROL OF A SEMICONDUCTOR SUB...
Publication number
20110284505
Publication date
Nov 24, 2011
LAM RESEARCH CORPORATION
Anthony Ricci
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UPPER ELECTRODE BACKING MEMBER WITH PARTICLE REDUCING FEATURES
Publication number
20110086513
Publication date
Apr 14, 2011
LAM RESEARCH CORPORATION
Anthony De La Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES
Publication number
20110081783
Publication date
Apr 7, 2011
LAM RESEARCH CORPORATION
Thomas R. Stevenson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND ARRANGEMENT FOR PLASMA DECHUCK OPTIMIZATION BASED ON CO...
Publication number
20110058302
Publication date
Mar 10, 2011
John C. Valcore, JR.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT-UP PREVENTION IN ELECTROSTATIC CHUCKS
Publication number
20110024049
Publication date
Feb 3, 2011
LAM RESEARCH CORPORATION
Tom Stevenson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR TESTING AN ELECTROSTATIC CHUCK
Publication number
20100090711
Publication date
Apr 15, 2010
Hong Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING CHAMBER WITH GUARD RING FOR UPPER ELECTRODE ASSEMBLY
Publication number
20090127234
Publication date
May 21, 2009
LAM RESEARCH CORPORATION
Dean J. Larson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Showerhead electrode assemblies for plasma processing apparatuses
Publication number
20080308228
Publication date
Dec 18, 2008
LAM RESEARCH CORPORATION
Thomas R. Stevenson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Showerhead electrode assembly with gas flow modification for extend...
Publication number
20080141941
Publication date
Jun 19, 2008
LAM RESEARCH CORPORATION
Jason Augustino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Quartz guard ring
Publication number
20080099448
Publication date
May 1, 2008
LAM RESEARCH CORPORATION
Dean J. Larson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Components for a plasma processing apparatus
Publication number
20080087641
Publication date
Apr 17, 2008
LAM RESEARCH CORPORATION
Anthony De La Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Upper electrode backing member with particle reducing features
Publication number
20080090417
Publication date
Apr 17, 2008
LAM RESEARCH CORPORATION
Anthony De La Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO IMPROVE PROFILE CONTROL AND N/P LOADING IN DUAL DOPED GAT...
Publication number
20070119545
Publication date
May 31, 2007
Helene Del Puppo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO IMPROVE PROFILE CONTROL AND N/P LOADING IN DUAL DOPED GAT...
Publication number
20070117399
Publication date
May 24, 2007
Helene Del Puppo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
In-situ cleaning of a polymer coated plasma processing chamber
Publication number
20040231800
Publication date
Nov 25, 2004
Lam Research Corporation
Harmeet Singh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
High pressure wafer-less auto clean for etch applications
Publication number
20030005943
Publication date
Jan 9, 2003
LAM RESEARCH CORPORATION
Harmeet Singh
H01 - BASIC ELECTRIC ELEMENTS