Semyon Sherstinsky

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Detachable electrostatic chuck for supporting a substrate in a proc...
- Patent number 7,907,384
- Issue date Mar 15, 2011
- Applied Materials, Inc.
- Karl Brown
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Detachable electrostatic chuck
- Patent number 7,697,260
- Issue date Apr 13, 2010
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detachable electrostatic chuck for supporting a substrate in a proc...
- Patent number 7,480,129
- Issue date Jan 20, 2009
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal with integral shield
- Patent number 7,252,737
- Issue date Aug 7, 2007
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical vapor deposition plasma reactor with VHF source power appl...
- Patent number 7,244,344
- Issue date Jul 17, 2007
- Applied Materials, Inc.
- Karl M. Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lower pedestal shield
- Patent number 6,837,968
- Issue date Jan 4, 2005
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal with integral shield
- Patent number 6,726,805
- Issue date Apr 27, 2004
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal with integral shield
- Patent number 6,652,713
- Issue date Nov 25, 2003
- Applied Materials, Inc.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating an electrostatic chuck
- Patent number 6,557,248
- Issue date May 6, 2003
- Applied Materials Inc.
- Shamouil Shamouilian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support member for a processing chamber
- Patent number 6,464,795
- Issue date Oct 15, 2002
- Applied Materials, Inc.
- Semyon Sherstinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support member
- Patent number 6,464,790
- Issue date Oct 15, 2002
- Applied Materials, Inc.
- Semyon Sherstinsky
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heater for processing chamber
- Patent number 6,350,320
- Issue date Feb 26, 2002
- Applied Materials, Inc.
- Semyon Sherstinsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with improved temperature control and puncture...
- Patent number 6,278,600
- Issue date Aug 21, 2001
- Applied Materials, Inc.
- Shamouil Shamouilian
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Etch chamber
- Patent number 6,270,621
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Simon W. Tam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for delivering a gas
- Patent number 6,248,176
- Issue date Jun 19, 2001
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch chamber
- Patent number 6,123,864
- Issue date Sep 26, 2000
- Applied Materials, Inc.
- Simon W. Tam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for delivering a gas
- Patent number 5,985,033
- Issue date Nov 16, 1999
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with fluid flow regulator
- Patent number 5,883,778
- Issue date Mar 16, 1999
- Applied Materials, Inc.
- Semyon Sherstinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making electrostatic chuck with conformal insulator film
- Patent number 5,753,132
- Issue date May 19, 1998
- Applied Materials, Inc.
- Shamouil Shamouilian
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck with conformal insulator film
- Patent number 5,745,331
- Issue date Apr 28, 1998
- Applied Materials, Inc.
- Shamouil Shamouilian
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Apparatus for improving wafer and chuck edge protection
- Patent number 5,740,009
- Issue date Apr 14, 1998
- Applied Materials, Inc.
- Bryan Pu
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Apparatus for centering substrates on support members
- Patent number 5,673,922
- Issue date Oct 7, 1997
- Applied Materials, Inc.
- Semyon Sherstinsky
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck
- Patent number 5,671,117
- Issue date Sep 23, 1997
- Applied Materials Inc.
- Semyon Sherstinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making a dielectric chuck
- Patent number 5,634,266
- Issue date Jun 3, 1997
- Applied Materials Inc.
- Semyon Sherstinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compound clamp ring for semiconductor wafers
- Patent number 5,421,401
- Issue date Jun 6, 1995
- Applied Materials, Inc.
- Semyon Sherstinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamping ring and susceptor therefor
- Patent number 5,326,725
- Issue date Jul 5, 1994
- Applied Materials, Inc.
- Semyon Sherstinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamping ring apparatus for processing semiconductor wafers
- Patent number 5,316,278
- Issue date May 31, 1994
- Applied Materials, Inc.
- Semyon Sherstinsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching apparatus with conductive means for inhibiting arcing
- Patent number 5,292,399
- Issue date Mar 8, 1994
- Applied Materials, Inc.
- Terrance Y. Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Detachable electrostatic chuck for supporting a substrate in a proc...
- Publication number 20090201622
- Publication date Aug 13, 2009
- APPLIED MATERIALS, INC.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Physical vapor deposition plasma reactor with VHF source power appl...
- Publication number 20060169576
- Publication date Aug 3, 2006
- APPLIED MATERIALS, INC.
- Karl M. Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Detachable electrostatic chuck for supporting a substrate in a proc...
- Publication number 20060002053
- Publication date Jan 5, 2006
- APPLIED MATERIALS, INC.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Detachable electrostatic chuck
- Publication number 20050219786
- Publication date Oct 6, 2005
- APPLIED MATERIALS, INC.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pedestal with integral shield
- Publication number 20050056370
- Publication date Mar 17, 2005
- APPLIED MATERIALS, INC.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lower pedestal shield
- Publication number 20040083977
- Publication date May 6, 2004
- APPLIED MATERIALS, INC.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pedestal with integral shield
- Publication number 20030029564
- Publication date Feb 13, 2003
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pedestal with integral shield
- Publication number 20030029568
- Publication date Feb 13, 2003
- APPLIED MATERIALS, INC.
- Karl Brown
- H01 - BASIC ELECTRIC ELEMENTS

Semyon Sherstinsky

Person

Patents Grantslast 30 patents

Detachable electrostatic chuck for supporting a substrate in a proc...

Detachable electrostatic chuck

Detachable electrostatic chuck for supporting a substrate in a proc...

Pedestal with integral shield

Physical vapor deposition plasma reactor with VHF source power appl...

Lower pedestal shield

Pedestal with integral shield

Pedestal with integral shield

Method of fabricating an electrostatic chuck

Substrate support member for a processing chamber

Substrate support member

Heater for processing chamber

Electrostatic chuck with improved temperature control and puncture...

Etch chamber

Apparatus and method for delivering a gas

Etch chamber

Apparatus and method for delivering a gas

Electrostatic chuck with fluid flow regulator

Method of making electrostatic chuck with conformal insulator film

Electrostatic chuck with conformal insulator film

Apparatus for improving wafer and chuck edge protection

Apparatus for centering substrates on support members

Electrostatic chuck

Method of making a dielectric chuck

Compound clamp ring for semiconductor wafers

Clamping ring and susceptor therefor

Clamping ring apparatus for processing semiconductor wafers

Plasma etching apparatus with conductive means for inhibiting arcing

Patents Applicationslast 30 patents

Detachable electrostatic chuck for supporting a substrate in a proc...

Physical vapor deposition plasma reactor with VHF source power appl...

Detachable electrostatic chuck for supporting a substrate in a proc...

Detachable electrostatic chuck

Pedestal with integral shield

Lower pedestal shield

Pedestal with integral shield

Pedestal with integral shield