This application is a divisional of patent application Ser. No. 08/381,786, filed Jan. 31, 1995, entitled "Electrostatic Chuck with Conformal Insulator Film" by Shamouilian, et al.; which is a continuation-in-part of U.S. patent application Ser. No. 08/189,562, filed Jan. 31, 1994, now abandoned; and is related to U.S. patent application Ser. No. 08/381,258, filed Jan. 31, 1995, entitled, "High Temperature Polyimide Electrostatic Chuck," by Chen, et al.--all of which are incorporated herein by reference.
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Entry |
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Number | Date | Country | |
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Parent | 381786 | Jan 1995 |
Number | Date | Country | |
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Parent | 189562 | Jan 1994 |