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Serge Vanhaelemeersch
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Leuven, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Protective treatment for porous materials
Patent number
8,540,890
Issue date
Sep 24, 2013
IMEC
Mikhail Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High aspect ratio via etch
Patent number
7,807,583
Issue date
Oct 5, 2010
IMEC
Joke Van Aelst
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual damascene patterning method
Patent number
7,611,986
Issue date
Nov 3, 2009
IMEC
Jan Van Olmen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for chip singulation
Patent number
7,566,634
Issue date
Jul 28, 2009
Interuniversitair Microelektronica Centrum (IMEC)
Eric Beyne
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing microcystalline silicon germanium suitable for...
Patent number
7,557,027
Issue date
Jul 7, 2009
Interuniversitair Microelektronica Centrum
Ann Witvrouw
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Formation of deep via airgaps for three dimensional wafer to wafer...
Patent number
7,338,896
Issue date
Mar 4, 2008
Interuniversitair Microelektronica Centrum (IMEC)
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluorinated hard mask for micropatterning of polymers
Patent number
7,042,091
Issue date
May 9, 2006
Imec VZW
Mikhail Rodionovich Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Anisotropic etching of organic-containing insulating layers
Patent number
6,900,140
Issue date
May 31, 2005
Interuniversitair Microelektronica Centrum (IMEC)
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Anisotropic etching of organic-containing insulating layers
Patent number
6,844,266
Issue date
Jan 18, 2005
Interuniversitair Microelektronica Centrum
Karen Maex
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Anisotropic etching of organic-containing insulating layers
Patent number
6,844,267
Issue date
Jan 18, 2005
Interuniversitair Micro-Elektronica Centrum
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a semiconductor device
Patent number
6,821,884
Issue date
Nov 23, 2004
Interuniversitair Microelektronica Centrum (IMEC)
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit having SiC layer
Patent number
6,806,501
Issue date
Oct 19, 2004
Interuniverstair Microelektronica Centrum
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metallization structure on a fluorine-containing dielectric and a m...
Patent number
6,635,964
Issue date
Oct 21, 2003
Interuniversitair Micro-Elektronica Centrum (IMEC vzw)
Karen Maex
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
MIS transistors with a metal gate and high-k dielectric and method...
Patent number
6,607,950
Issue date
Aug 19, 2003
Interuniversitair Microelektronic Centrum (IMEC)
Kirklen Henson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removal of sic
Patent number
6,599,814
Issue date
Jul 29, 2003
Interuniversitair Microelektronica Centrum (IMEC)
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to produce a porous oxygen-silicon layer
Patent number
6,593,251
Issue date
Jul 15, 2003
Interuniversitair Microelektronica Centrum (IMEC)
Mikhail Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a FET having L-shaped insulating spacers
Patent number
6,380,039
Issue date
Apr 30, 2002
Interuniversitair Microelektronica Centrum (IMEC VZW)
Goncal Badenes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for stripping ion implanted photoresist layer
Patent number
6,352,936
Issue date
Mar 5, 2002
Imec VZW
Christian Jehoul
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metallization structure on a fluorine-containing dielectric and a m...
Patent number
6,323,555
Issue date
Nov 27, 2001
Interuniversitiar Microelektronica Centrum (IMEC VZW)
Karen Maex
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluorinated hard mask for micropatterning of polymers
Patent number
6,245,489
Issue date
Jun 12, 2001
Imec VZW
Mikhail Rodionovich Baklanov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for forming a spacer
Patent number
6,096,657
Issue date
Aug 1, 2000
IMEC vzw
Stephan Beckx
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Process for Wafer Bonding
Publication number
20240112944
Publication date
Apr 4, 2024
IMEC vzw
Jakob Visker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROTECTIVE TREATMENT FOR POROUS MATERIALS
Publication number
20130119014
Publication date
May 16, 2013
GLOBALFOUNDERIES Inc.
Mikhail Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH ASPECT RATIO VIA ETCH
Publication number
20080050919
Publication date
Feb 28, 2008
Interuniversitair Microelektronica Centrum (IMEC)
Joke Van Aelst
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Dual damascene patterning method
Publication number
20060264033
Publication date
Nov 23, 2006
Jan Van Olmen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Formation of deep via airgaps for three dimensional wafer to wafer...
Publication number
20060223301
Publication date
Oct 5, 2006
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of producing microcrystalline silicon germanium suitable for...
Publication number
20060166467
Publication date
Jul 27, 2006
Interuniversitair Microelektronica Centrum (IMEC)
Ann Witvrouw
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for chip singulation
Publication number
20060068567
Publication date
Mar 30, 2006
Eric Beyne
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for removal of SiC
Publication number
20050099078
Publication date
May 12, 2005
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of fabricating a semiconductor device
Publication number
20050056941
Publication date
Mar 17, 2005
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of fabricating a semiconductor device
Publication number
20050048782
Publication date
Mar 3, 2005
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Anisotropic etching of organic-containing insulating layers
Publication number
20040175945
Publication date
Sep 9, 2004
Serge Vanhaelemeersch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Surface preparation using plasma for ALD Films
Publication number
20040071878
Publication date
Apr 15, 2004
Interuniversitair Microelektronica Centrum (IMEC vzw)
Jorg Schuhmacher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method to produce a porous oxygen-silicon layer
Publication number
20030181066
Publication date
Sep 25, 2003
Mikhail Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Anisotropic etching of organic-containing insulating layers
Publication number
20030162407
Publication date
Aug 28, 2003
Karen Maex
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Integrated circuit having SiC layer
Publication number
20030143816
Publication date
Jul 31, 2003
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of fabricating a semiconductor device
Publication number
20020173142
Publication date
Nov 21, 2002
Serge Vanhaelemeersch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Anisotropic etching of organic-containing insulating layers
Publication number
20020076935
Publication date
Jun 20, 2002
Karen Maex
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metallization structure on a fluorine-containing dielectric and a m...
Publication number
20020066957
Publication date
Jun 6, 2002
Karen Maex
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method to produce a porous oxygen-silicon layer
Publication number
20020022378
Publication date
Feb 21, 2002
Mikhail Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for forming MIS transistors with a metal gate and high-k die...
Publication number
20010049183
Publication date
Dec 6, 2001
Kirklen Henson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fluorinated hard mask for micropattering of polymers
Publication number
20010026956
Publication date
Oct 4, 2001
Mikhail Rodionovich Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING A FET
Publication number
20010012668
Publication date
Aug 9, 2001
GONCAL BADENES
H01 - BASIC ELECTRIC ELEMENTS