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Seshasayee Varadarajan

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  • Lake Oswego, OR, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD TO CREATE AIR GAPS
    • Publication number 20240429091
    • Publication date Dec 26, 2024
    • LAM RESEARCH CORPORATION
    • Patrick A. Van Cleemput
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TECHNIQUES AND APPARATUSES FOR PROCESSING CHALCOGENIDES
    • Publication number 20240381790
    • Publication date Nov 14, 2024
    • LAM RESEARCH CORPORATION
    • John Hoang
  • Information Patent Application

    DEPOSITION OF METAL FILMS
    • Publication number 20240271281
    • Publication date Aug 15, 2024
    • LAM RESEARCH CORPORATION
    • Joshua COLLINS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEAM MITIGATION AND INTEGRATED LINER FOR GAP FILL
    • Publication number 20230175117
    • Publication date Jun 8, 2023
    • LAM RESEARCH CORPORATION
    • Dustin Zachary AUSTIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER ETCHING OF MOLYBDENUM
    • Publication number 20230093011
    • Publication date Mar 23, 2023
    • LAM RESEARCH CORPORATION
    • Andreas Fischer
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION OF METAL FILMS
    • Publication number 20220356579
    • Publication date Nov 10, 2022
    • LAM RESEARCH CORPORATION
    • Joshua Collins
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICO...
    • Publication number 20220243323
    • Publication date Aug 4, 2022
    • LAM RESEARCH CORPORATION
    • Ramesh CHANDRASEKHARAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION OF METAL FILMS
    • Publication number 20220195598
    • Publication date Jun 23, 2022
    • LAM RESEARCH CORPORATION
    • Joshua Collins
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD TO CREATE AIR GAPS
    • Publication number 20210343579
    • Publication date Nov 4, 2021
    • LAM RESEARCH CORPORATION
    • Patrick A. Van Cleemput
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF DEPOSITING TUNGSTEN AND OTHER METALS IN 3D NAND STRUCTURES
    • Publication number 20210238736
    • Publication date Aug 5, 2021
    • LAM RESEARCH CORPORATION
    • Gorun Butail
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD TO CREATE AIR GAPS
    • Publication number 20200219758
    • Publication date Jul 9, 2020
    • LAM RESEARCH CORPORATION
    • Patrick van Cleemput
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUPPRESSING INTERFACIAL REACTIONS BY VARYING THE WAFER TEMPERATURE...
    • Publication number 20200066607
    • Publication date Feb 27, 2020
    • LAM RESEARCH CORPORATION
    • Seshasayee Varadarajan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD TO CREATE AIR GAPS
    • Publication number 20180233398
    • Publication date Aug 16, 2018
    • LAM RESEARCH CORPORATION
    • Patrick A. Van Cleemput
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR DEPOSITING ALD FILMS USING HALIDE-BASED PRECURSORS
    • Publication number 20180102245
    • Publication date Apr 12, 2018
    • LAM RESEARCH CORPORATION
    • James S. Sims
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUPPRESSING INTERFACIAL REACTIONS BY VARYING THE WAFER TEMPERATURE...
    • Publication number 20180047645
    • Publication date Feb 15, 2018
    • LAM RESEARCH CORPORATION
    • Seshasayee Varadarajan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR ENCAPSULATING A CHALCOGENIDE MATERIAL
    • Publication number 20170092856
    • Publication date Mar 30, 2017
    • LAM RESEARCH CORPORATION
    • Jon Henri
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LOW VOLUME SHOWERHEAD WITH FACEPLATE HOLES FOR IMPROVED FLOW UNIFOR...
    • Publication number 20160340782
    • Publication date Nov 24, 2016
    • LAM RESEARCH CORPORATION
    • Ramesh Chandrasekharan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TWO-STEP DEPOSITION WITH IMPROVED SELECTIVITY
    • Publication number 20160273113
    • Publication date Sep 22, 2016
    • LAM RESEARCH CORPORATION
    • Artur KOLICS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR RF COMPENSATION IN PLASMA ASSISTED ATOMIC...
    • Publication number 20160090650
    • Publication date Mar 31, 2016
    • LAM RESEARCH CORPORATION
    • Jun Qian
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW T...
    • Publication number 20160056032
    • Publication date Feb 25, 2016
    • LAM RESEARCH CORPORATION
    • Chloe Baldasseroni
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTROLYTE CONCENTRATION CONTROL SYSTEM FOR HIGH RATE ELECTROPLATING
    • Publication number 20150315720
    • Publication date Nov 5, 2015
    • Novellus Systems, Inc.
    • Steven T. Mayer
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Application

    TWO-STEP DEPOSITION WITH IMPROVED SELECTIVITY
    • Publication number 20150275374
    • Publication date Oct 1, 2015
    • LAM RESEARCH CORPORATION
    • Artur KOLICS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THROUGH SILICON VIA METALLIZATION
    • Publication number 20140217590
    • Publication date Aug 7, 2014
    • LAM RESEARCH CORPORATION
    • Praveen Reddy NALLA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD AND APPARATUS FOR ELECTROPLATING
    • Publication number 20130327650
    • Publication date Dec 12, 2013
    • Steven Mayer
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Application

    SPLIT PUMPING METHOD, APPARATUS, AND SYSTEM
    • Publication number 20130237063
    • Publication date Sep 12, 2013
    • SESHASAYEE VARADARAJAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTROPLATING CUP ASSEMBLY
    • Publication number 20110233056
    • Publication date Sep 29, 2011
    • Novellus Systems, Inc.
    • Robert Rash
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Application

    RAPIDLY CLEANABLE ELECTROPLATING CUP SEAL
    • Publication number 20110181000
    • Publication date Jul 28, 2011
    • Novellus Systems, Inc.
    • Shantinath Ghongadi
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Application

    REMOTE PLASMA PROCESSING OF INTERFACE SURFACES
    • Publication number 20110120377
    • Publication date May 26, 2011
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Electrolyte Concentration Control System for High Rate Electroplating
    • Publication number 20110083965
    • Publication date Apr 14, 2011
    • Novellus Systems, Inc.
    • Jonathan D. Reid
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Application

    REMOTE PLASMA PROCESSING OF INTERFACE SURFACES
    • Publication number 20100317198
    • Publication date Dec 16, 2010
    • Novellus Systems, Inc.
    • George Andrew Antonelli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...