Membership
Tour
Register
Log in
Shankar Vankataranan
Follow
Person
Santa Clara, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for elimination of TEOS/ozone silicon oxide su...
Patent number
6,319,324
Issue date
Nov 20, 2001
Applied Materials, Inc.
Bang C. Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for elimination of TEOS/ozone silicon oxide surface sensitivity
Patent number
6,149,974
Issue date
Nov 21, 2000
Applied Materials, Inc.
Bang C. Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...