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Method for etching PT film
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Patent number 5,515,984
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Issue date May 14, 1996
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Sharp Kabushiki Kaisha
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Seiichi Yokoyama
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of forming a ferroelectric film
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Patent number 5,397,446
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Issue date Mar 14, 1995
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Sharp Kabushiki Kaisha
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Kazuya Ishihara
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Dynamic random access memory
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Patent number 5,383,151
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Issue date Jan 17, 1995
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Sharp Kabushiki Kaisha
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Shigeo Onishi
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device
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Patent number 5,183,770
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Issue date Feb 2, 1993
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Sharp Kabushiki Kaisha
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Akitsu Ayukawa
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H01 - BASIC ELECTRIC ELEMENTS
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High resistive element
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Patent number 5,049,970
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Issue date Sep 17, 1991
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Sharp Kabushiki Kaisha
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Kenichi Tanaka
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H01 - BASIC ELECTRIC ELEMENTS
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