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Shih-Hung Li
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Mountain View, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for fast-cycle atomic layer deposition
Patent number
6,773,507
Issue date
Aug 10, 2004
Applied Materials, Inc.
Ravi Jallepally
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process conditions and precursors for atomic layer deposition (ALD)...
Patent number
6,620,670
Issue date
Sep 16, 2003
Applied Materials, Inc.
Kevin Song
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for improved vaporization of deposition mater...
Patent number
6,596,085
Issue date
Jul 22, 2003
Applied Materials, Inc.
John Vincent Schmitt
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer out-of-pocket detection method
Patent number
6,274,878
Issue date
Aug 14, 2001
Applied Materials, Inc.
Shih-Hung Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for depositing material upon a semiconductor w...
Patent number
6,251,759
Issue date
Jun 26, 2001
Applied Materials, Inc.
Xin Sheng Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer out-of-pocket detector and susceptor leveling tool
Patent number
6,197,117
Issue date
Mar 6, 2001
Applied Materials, Inc.
Shih-Hung Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer out-of-pocket detection tool
Patent number
6,099,596
Issue date
Aug 8, 2000
Applied Materials, Inc.
Shih-Hung Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing chamber calibration tool
Patent number
6,063,196
Issue date
May 16, 2000
Applied Materials, Inc.
Shih-Hung Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PROCESS CONDITIONS AND PRECURSORS FOR ATOMIC LAYER DEPOSITION (ALD)...
Publication number
20030139005
Publication date
Jul 24, 2003
Applied Materials, Inc.
Kevin Song
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and method for fast-cycle atomic layer deposition
Publication number
20030106490
Publication date
Jun 12, 2003
APPLIED MATERIALS, INC.
Ravi Jallepally
C30 - CRYSTAL GROWTH