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Patents Grants
last 30 patents
Information
Patent Grant
Nonvolatile storage element and method of manufacturing thereof
Patent number
8,921,200
Issue date
Dec 30, 2014
Panasonic Corporation
Yoshio Kawashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method, semiconductor and fabricating method for the same
Patent number
7,985,691
Issue date
Jul 26, 2011
Panasonic Corporation
Kenshi Kanegae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method, semiconductor and fabricating method for the same
Patent number
7,732,339
Issue date
Jun 8, 2010
Panasonic Corporation
Kenshi Kanegae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating semiconductor device
Patent number
7,700,477
Issue date
Apr 20, 2010
Panasonic Corporation
Hideki Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,559,823
Issue date
Jul 14, 2009
Panasonic Corporation
Naoaki Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
7,324,866
Issue date
Jan 29, 2008
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Etching method, semiconductor and fabricating method for the same
Patent number
7,282,452
Issue date
Oct 16, 2007
Matsushita Electric Industrial Co., Ltd.
Kenshi Kanegae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for monitoring semiconductor production apparatus
Patent number
7,257,457
Issue date
Aug 14, 2007
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for producing the same
Patent number
7,122,877
Issue date
Oct 17, 2006
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for producing the same
Patent number
6,881,998
Issue date
Apr 19, 2005
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
6,856,020
Issue date
Feb 15, 2005
Matsushita Electric Industrial Co., Ltd.
Nobuhiro Jiwari
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
6,821,885
Issue date
Nov 23, 2004
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating semiconductor device
Patent number
6,787,445
Issue date
Sep 7, 2004
Matsushita Electric Industry Co., Ltd.
Nobuhiro Jiwari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
6,749,763
Issue date
Jun 15, 2004
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
6,703,711
Issue date
Mar 9, 2004
Matsushita Electric Industrial Co., Ltd.
Nobuhiro Jiwari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method, semiconductor and fabricating method for the same
Patent number
6,632,746
Issue date
Oct 14, 2003
Matsushita Electric Industrial Co., Ltd.
Kenshi Kanegae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
6,518,169
Issue date
Feb 11, 2003
Matsushita Electric Industrial Co., Ltd.
Nobuhiro Jiwari
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
6,500,769
Issue date
Dec 31, 2002
Matsushita Electric Industrial Co., Ltd.
Nobuhiro Jiwari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for plasma processing
Patent number
6,251,216
Issue date
Jun 26, 2001
Matsushita Electronics Corporation
Hideaki Okamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus
Patent number
6,214,740
Issue date
Apr 10, 2001
Matsushita Electronics Corporation
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method, chemical vapor deposition method, and apparatus...
Patent number
6,089,183
Issue date
Jul 18, 2000
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method and semiconductor device fabrication method
Patent number
6,069,092
Issue date
May 30, 2000
Matsushita Electronics Corporation
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating semiconductor device and method for controll...
Patent number
6,057,247
Issue date
May 2, 2000
Matsushita Electronics Corporation
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for manufacturing semiconductor device
Patent number
5,989,929
Issue date
Nov 23, 1999
Matsushita Electronics Corporation
Hideo Nikoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method, chemical vapor deposition method, and apparatus...
Patent number
5,767,021
Issue date
Jun 16, 1998
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method, chemical vapor deposition method, and apparatus...
Patent number
5,716,494
Issue date
Feb 10, 1998
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and process
Patent number
5,633,211
Issue date
May 27, 1997
Matsushita Electric Industrial Co., Ld.
Shinichi Imai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Removing interhalogen compounds from semiconductor manufacturing eq...
Patent number
5,546,890
Issue date
Aug 20, 1996
Matsushita Electric Industrial Co., Ltd.
Tokuhiko Tamaki
C30 - CRYSTAL GROWTH
Information
Patent Grant
Dry etching method
Patent number
5,318,668
Issue date
Jun 7, 1994
Matsushita Electric Industrial Co., Ltd.
Tokuhiko Tamaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing a semiconductor device using a heat treatm...
Patent number
5,314,848
Issue date
May 24, 1994
Matsushita Electric Industrial Co., Ltd.
Takatoshi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
NONVOLATILE STORAGE ELEMENT AND METHOD OF MANUFACTURING THEREOF
Publication number
20140024197
Publication date
Jan 23, 2014
Yoshio Kawashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD, SEMICONDUCTOR AND FABRICATING METHOD FOR THE SAME
Publication number
20100203733
Publication date
Aug 12, 2010
PANASONIC CORPORATION
Kenshi Kanegae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND CLEANING...
Publication number
20080283088
Publication date
Nov 20, 2008
Miki Shima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20080081540
Publication date
Apr 3, 2008
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Naoaki SATO
B24 - GRINDING POLISHING
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20060161288
Publication date
Jul 20, 2006
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
G05 - CONTROLLING REGULATING
Information
Patent Application
Thin film coating device, thin film coating method, immersion expos...
Publication number
20050276908
Publication date
Dec 15, 2005
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Masaki Kitabata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Etching method, semiconductor and fabricating method for the same
Publication number
20050221599
Publication date
Oct 6, 2005
Matsushita Electric Industrial Co., Ltd.
Kenshi Kanegae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for fabricating semiconductor device
Publication number
20050186794
Publication date
Aug 25, 2005
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Hideki Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method for producing the same
Publication number
20050156211
Publication date
Jul 21, 2005
Matsushita Electric Industrial Co., Ltd.
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for managing polishing apparatus
Publication number
20050014373
Publication date
Jan 20, 2005
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Koutaro Miyasaka
B24 - GRINDING POLISHING
Information
Patent Application
Etching method, semiconductor and fabricating method for the same
Publication number
20040106297
Publication date
Jun 3, 2004
Matsushita Electric Industrial Co., Ltd.
Kenshi Kanegae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for monitoring semiconductor production apparatus
Publication number
20040049898
Publication date
Mar 18, 2004
Shinichi Imai
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for fabricating semiconductor device
Publication number
20040005789
Publication date
Jan 8, 2004
Matsushita Electric Industrial Co., Ltd.
Nobuhiro Jiwari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor device and method for fabricating the same
Publication number
20030094698
Publication date
May 22, 2003
Matsushita Electronics Corporation
Nobuhiro Jiwari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method for fabricating the same
Publication number
20030025209
Publication date
Feb 6, 2003
Matsushita Electric Industrial Co., Ltd.
Nobuhiro Jiwari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method for manufacturing the same
Publication number
20020089059
Publication date
Jul 11, 2002
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching method, semiconductor and fabricating method for the same
Publication number
20020061654
Publication date
May 23, 2002
Kenshi Kanegae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method for fabricating the same
Publication number
20020058390
Publication date
May 16, 2002
Shinichi Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
Publication number
20010047849
Publication date
Dec 6, 2001
NOBUHIRO JIWARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE COOLING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20010008124
Publication date
Jul 19, 2001
NOBUHIRO JIWARI
H01 - BASIC ELECTRIC ELEMENTS