Shinobu SUGIURA

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heater, temperature control system, and processing apparatus
- Patent number 12,085,338
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceiling heater for substrate processing apparatus
- Patent number D980177
- Issue date Mar 7, 2023
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Retainer plate of top heater for wafer processing furnace
- Patent number D962184
- Issue date Aug 30, 2022
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Retainer plate of top heater for wafer processing furnace
- Patent number D962183
- Issue date Aug 30, 2022
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Ceiling heater for substrate processing apparatus
- Patent number D959393
- Issue date Aug 2, 2022
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heating part, substrate processing apparatus, and method of manufac...
- Patent number 11,198,935
- Issue date Dec 14, 2021
- Kokusai Electric Corporation
- Shinobu Sugiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Retainer of ceiling heater for semiconductor fabrication apparatus
- Patent number D918848
- Issue date May 11, 2021
- Kokusai Electric Corporation
- Shinobu Sugiura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater supporting device
- Patent number 9,779,970
- Issue date Oct 3, 2017
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,698,037
- Issue date Jul 4, 2017
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device using meander-shaped h...
- Patent number 9,449,849
- Issue date Sep 20, 2016
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus capable of switching control mode of...
- Patent number 9,418,881
- Issue date Aug 16, 2016
- Hitachi Kokusai Electric Inc.
- Shinobu Sugiura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating device, substrate processing apparatus, and method of manuf...
- Patent number 9,064,912
- Issue date Jun 23, 2015
- Hitachi Kokusai Electric, Inc.
- Hitoshi Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device having a meander-shaped heating element with an insu...
- Patent number 8,847,124
- Issue date Sep 30, 2014
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 8,535,444
- Issue date Sep 17, 2013
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing equipment
- Patent number D652395
- Issue date Jan 17, 2012
- Hitachi Kokusai Electric Inc.
- Masakazu Shimada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Semiconductor manufacturing equipment
- Patent number D651990
- Issue date Jan 10, 2012
- Hitachi Kokusai Electric Inc.
- Masakazu Shimada
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20240393050
- Publication date Nov 28, 2024
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
CEILING HEATER, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURIN...
- Publication number 20240222160
- Publication date Jul 4, 2024
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20210313205
- Publication date Oct 7, 2021
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20200393197
- Publication date Dec 17, 2020
- KOKUSAI ELECTRIC CORPORATION
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HEATING PART, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFAC...
- Publication number 20170107620
- Publication date Apr 20, 2017
- Hitachi Kokusai Electric Inc.
- Shinobu SUGIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140322926
- Publication date Oct 30, 2014
- Hitoshi Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF S...
- Publication number 20120094010
- Publication date Apr 19, 2012
- Hitachi Kokusai Electric Inc.
- Shinobu SUGIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110305543
- Publication date Dec 15, 2011
- Hitachi Kokusai Electric Inc.
- Seiyo NAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER SUPPORTING DEVICE
- Publication number 20110281226
- Publication date Nov 17, 2011
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...
- Publication number 20110021039
- Publication date Jan 27, 2011
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...
- Publication number 20110021038
- Publication date Jan 27, 2011
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20090209113
- Publication date Aug 20, 2009
- Hitachi Kokusai Electric, Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shinobu SUGIURA

Person

Patents Grantslast 30 patents

Heater, temperature control system, and processing apparatus

Ceiling heater for substrate processing apparatus

Retainer plate of top heater for wafer processing furnace

Retainer plate of top heater for wafer processing furnace

Ceiling heater for substrate processing apparatus

Heating part, substrate processing apparatus, and method of manufac...

Retainer of ceiling heater for semiconductor fabrication apparatus

Heater supporting device

Substrate processing apparatus

Method of manufacturing semiconductor device using meander-shaped h...

Substrate processing apparatus capable of switching control mode of...

Heating device, substrate processing apparatus, and method of manuf...

Heating device having a meander-shaped heating element with an insu...

Substrate processing apparatus, method of manufacturing semiconduct...

Semiconductor manufacturing equipment

Semiconductor manufacturing equipment

Patents Applicationslast 30 patents

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

CEILING HEATER, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURIN...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

HEATING PART, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFAC...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF S...

SUBSTRATE PROCESSING APPARATUS

HEATER SUPPORTING DEVICE

HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...

HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...